3/10/2011	12:13:59 AM	Helium valve closed
3/10/2011	12:13:59 AM	H2 valve closed
3/10/2011	12:13:59 AM	BCl3 valve closed
3/10/2011	12:13:59 AM	PH3 valve closed
3/10/2011	12:13:59 AM	SiCl4 pre valve closed
3/10/2011	12:13:59 AM	SiCl4 post valve closed
3/10/2011	12:13:59 AM	Main Vac valve closed
3/10/2011	12:13:59 AM	Bypass valve closed
3/10/2011	12:13:59 AM	Bubbler valve closed
3/10/2011	12:13:59 AM	Helium MFC set to  0.000000
3/10/2011	12:13:59 AM	H2 MFC set to  0.000000
3/10/2011	12:13:59 AM	BCl3 MFC set to  0.000000
3/10/2011	12:13:59 AM	PHl3 MFC set to  0.000000
3/10/2011	12:13:59 AM	SiCl4 MFC set to  0.000000
3/10/2011	12:13:59 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:13:59 AM	Tube furnace set to 0
3/10/2011	12:14:00 AM	Run finished at 12:14 AM
3/10/2011	12:29:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2011	12:29:07 AM	Recipe started at 12:29 AM
3/10/2011	12:29:07 AM	H2 valve closed
3/10/2011	12:29:07 AM	BCl3 valve closed
3/10/2011	12:29:07 AM	PH3 valve closed
3/10/2011	12:29:07 AM	SiCl4 pre valve closed
3/10/2011	12:29:07 AM	SiCl4 post valve closed
3/10/2011	12:29:07 AM	Main Vac valve closed
3/10/2011	12:29:07 AM	Bypass valve closed
3/10/2011	12:29:07 AM	Bubbler valve closed
3/10/2011	12:29:07 AM	Helium valve opened
3/10/2011	12:29:07 AM	Helium MFC set to  500.000000
3/10/2011	12:29:07 AM	H2 MFC set to  0.000000
3/10/2011	12:29:07 AM	BCl3 MFC set to  0.000000
3/10/2011	12:29:07 AM	PHl3 MFC set to  0.000000
3/10/2011	12:29:07 AM	SiCl4 MFC set to  0.000000
3/10/2011	12:29:07 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:29:08 AM	Tube furnace set to 0
3/10/2011	12:29:08 AM	Helium valve closed
3/10/2011	12:29:08 AM	H2 valve closed
3/10/2011	12:29:08 AM	BCl3 valve closed
3/10/2011	12:29:08 AM	PH3 valve closed
3/10/2011	12:29:08 AM	SiCl4 pre valve closed
3/10/2011	12:29:08 AM	SiCl4 post valve closed
3/10/2011	12:29:08 AM	Main Vac valve closed
3/10/2011	12:29:08 AM	Bypass valve closed
3/10/2011	12:29:08 AM	Bubbler valve closed
3/10/2011	12:29:08 AM	Helium MFC set to  0.000000
3/10/2011	12:29:08 AM	H2 MFC set to  0.000000
3/10/2011	12:29:08 AM	BCl3 MFC set to  0.000000
3/10/2011	12:29:08 AM	PHl3 MFC set to  0.000000
3/10/2011	12:29:08 AM	SiCl4 MFC set to  0.000000
3/10/2011	12:29:08 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:29:08 AM	Tube furnace set to 0
3/10/2011	12:29:08 AM	Run finished at 12:29 AM
3/10/2011	12:29:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2011	12:30:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2011	12:30:23 AM	Recipe started at 12:30 AM
3/10/2011	12:30:23 AM	H2 valve closed
3/10/2011	12:30:23 AM	BCl3 valve closed
3/10/2011	12:30:23 AM	PH3 valve closed
3/10/2011	12:30:23 AM	SiCl4 pre valve closed
3/10/2011	12:30:23 AM	SiCl4 post valve closed
3/10/2011	12:30:23 AM	Main Vac valve closed
3/10/2011	12:30:23 AM	Bypass valve closed
3/10/2011	12:30:23 AM	Bubbler valve closed
3/10/2011	12:30:23 AM	Helium valve opened
3/10/2011	12:30:23 AM	Helium MFC set to  500.000000
3/10/2011	12:30:23 AM	H2 MFC set to  0.000000
3/10/2011	12:30:23 AM	BCl3 MFC set to  0.000000
3/10/2011	12:30:23 AM	PHl3 MFC set to  0.000000
3/10/2011	12:30:23 AM	SiCl4 MFC set to  0.000000
3/10/2011	12:30:23 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:30:23 AM	Tube furnace set to 0
3/10/2011	12:30:24 AM	Helium valve closed
3/10/2011	12:30:24 AM	H2 valve closed
3/10/2011	12:30:24 AM	BCl3 valve closed
3/10/2011	12:30:24 AM	PH3 valve closed
3/10/2011	12:30:24 AM	SiCl4 pre valve closed
3/10/2011	12:30:24 AM	SiCl4 post valve closed
3/10/2011	12:30:24 AM	Main Vac valve closed
3/10/2011	12:30:24 AM	Bypass valve closed
3/10/2011	12:30:24 AM	Bubbler valve closed
3/10/2011	12:30:24 AM	Helium MFC set to  0.000000
3/10/2011	12:30:24 AM	H2 MFC set to  0.000000
3/10/2011	12:30:24 AM	BCl3 MFC set to  0.000000
3/10/2011	12:30:24 AM	PHl3 MFC set to  0.000000
3/10/2011	12:30:24 AM	SiCl4 MFC set to  0.000000
3/10/2011	12:30:24 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:30:24 AM	Tube furnace set to 0
3/10/2011	12:30:25 AM	Run finished at 12:30 AM
3/10/2011	12:30:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2011	12:32:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2011	12:32:59 AM	Recipe started at 12:32 AM
3/10/2011	12:32:59 AM	Helium valve closed
3/10/2011	12:32:59 AM	H2 valve closed
3/10/2011	12:32:59 AM	BCl3 valve closed
3/10/2011	12:32:59 AM	PH3 valve closed
3/10/2011	12:32:59 AM	SiCl4 pre valve closed
3/10/2011	12:32:59 AM	SiCl4 post valve closed
3/10/2011	12:32:59 AM	Main Vac valve closed
3/10/2011	12:32:59 AM	Bubbler valve closed
3/10/2011	12:32:59 AM	Bypass valve opened
3/10/2011	12:32:59 AM	Helium MFC set to  0.000000
3/10/2011	12:32:59 AM	H2 MFC set to  0.000000
3/10/2011	12:32:59 AM	BCl3 MFC set to  0.000000
3/10/2011	12:32:59 AM	PHl3 MFC set to  0.000000
3/10/2011	12:32:59 AM	SiCl4 MFC set to  0.000000
3/10/2011	12:32:59 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:32:59 AM	Tube furnace set to 0
3/10/2011	12:33:29 AM	Helium valve closed
3/10/2011	12:33:29 AM	H2 valve closed
3/10/2011	12:33:29 AM	BCl3 valve closed
3/10/2011	12:33:29 AM	PH3 valve closed
3/10/2011	12:33:29 AM	SiCl4 pre valve closed
3/10/2011	12:33:29 AM	SiCl4 post valve closed
3/10/2011	12:33:29 AM	Bubbler valve closed
3/10/2011	12:33:29 AM	Main Vac valve opened
3/10/2011	12:33:29 AM	Bypass valve opened
3/10/2011	12:33:29 AM	Helium MFC set to  0.000000
3/10/2011	12:33:29 AM	H2 MFC set to  0.000000
3/10/2011	12:33:29 AM	BCl3 MFC set to  0.000000
3/10/2011	12:33:29 AM	PHl3 MFC set to  0.000000
3/10/2011	12:33:29 AM	SiCl4 MFC set to  0.000000
3/10/2011	12:33:29 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:33:29 AM	Tube furnace set to 0
3/10/2011	12:33:29 AM	Run finished at 12:33 AM
3/10/2011	12:33:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2011	9:00:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2011	9:00:44 AM	Recipe started at 9:00 AM
3/10/2011	9:00:44 AM	H2 valve closed
3/10/2011	9:00:44 AM	BCl3 valve closed
3/10/2011	9:00:44 AM	PH3 valve closed
3/10/2011	9:00:44 AM	SiCl4 pre valve closed
3/10/2011	9:00:44 AM	SiCl4 post valve closed
3/10/2011	9:00:44 AM	Main Vac valve closed
3/10/2011	9:00:44 AM	Bypass valve closed
3/10/2011	9:00:44 AM	Bubbler valve closed
3/10/2011	9:00:44 AM	Helium valve opened
3/10/2011	9:00:44 AM	Helium MFC set to  500.000000
3/10/2011	9:00:44 AM	H2 MFC set to  0.000000
3/10/2011	9:00:44 AM	BCl3 MFC set to  0.000000
3/10/2011	9:00:44 AM	PHl3 MFC set to  0.000000
3/10/2011	9:00:44 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:00:44 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:00:44 AM	Tube furnace set to 0
3/10/2011	9:02:05 AM	Helium valve closed
3/10/2011	9:02:05 AM	H2 valve closed
3/10/2011	9:02:05 AM	BCl3 valve closed
3/10/2011	9:02:05 AM	PH3 valve closed
3/10/2011	9:02:05 AM	SiCl4 pre valve closed
3/10/2011	9:02:05 AM	SiCl4 post valve closed
3/10/2011	9:02:05 AM	Main Vac valve closed
3/10/2011	9:02:05 AM	Bypass valve closed
3/10/2011	9:02:05 AM	Bubbler valve closed
3/10/2011	9:02:05 AM	Helium MFC set to  0.000000
3/10/2011	9:02:05 AM	H2 MFC set to  0.000000
3/10/2011	9:02:05 AM	BCl3 MFC set to  0.000000
3/10/2011	9:02:05 AM	PHl3 MFC set to  0.000000
3/10/2011	9:02:05 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:02:05 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:02:05 AM	Tube furnace set to 0
3/10/2011	9:02:05 AM	Run finished at 9:02 AM
3/10/2011	9:02:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2011	9:06:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2011	9:06:37 AM	Recipe started at 9:06 AM
3/10/2011	9:06:37 AM	Helium valve closed
3/10/2011	9:06:37 AM	H2 valve closed
3/10/2011	9:06:37 AM	BCl3 valve closed
3/10/2011	9:06:37 AM	PH3 valve closed
3/10/2011	9:06:37 AM	SiCl4 pre valve closed
3/10/2011	9:06:37 AM	SiCl4 post valve closed
3/10/2011	9:06:37 AM	Main Vac valve closed
3/10/2011	9:06:37 AM	Bubbler valve closed
3/10/2011	9:06:37 AM	Bypass valve opened
3/10/2011	9:06:37 AM	Helium MFC set to  0.000000
3/10/2011	9:06:37 AM	H2 MFC set to  0.000000
3/10/2011	9:06:37 AM	BCl3 MFC set to  0.000000
3/10/2011	9:06:37 AM	PHl3 MFC set to  0.000000
3/10/2011	9:06:37 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:06:37 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:06:37 AM	Tube furnace set to 0
3/10/2011	9:07:09 AM	Helium valve closed
3/10/2011	9:07:09 AM	H2 valve closed
3/10/2011	9:07:09 AM	BCl3 valve closed
3/10/2011	9:07:09 AM	PH3 valve closed
3/10/2011	9:07:09 AM	SiCl4 pre valve closed
3/10/2011	9:07:09 AM	SiCl4 post valve closed
3/10/2011	9:07:09 AM	Bubbler valve closed
3/10/2011	9:07:09 AM	Main Vac valve opened
3/10/2011	9:07:09 AM	Bypass valve opened
3/10/2011	9:07:09 AM	Helium MFC set to  0.000000
3/10/2011	9:07:09 AM	H2 MFC set to  0.000000
3/10/2011	9:07:09 AM	BCl3 MFC set to  0.000000
3/10/2011	9:07:09 AM	PHl3 MFC set to  0.000000
3/10/2011	9:07:09 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:07:09 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:07:09 AM	Tube furnace set to 0
3/10/2011	9:07:09 AM	Run finished at 9:07 AM
3/10/2011	9:07:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2011	9:12:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	9:12:51 AM	Recipe started at 9:12 AM
3/10/2011	9:12:51 AM	Helium valve closed
3/10/2011	9:12:51 AM	H2 valve closed
3/10/2011	9:12:51 AM	BCl3 valve closed
3/10/2011	9:12:51 AM	PH3 valve closed
3/10/2011	9:12:51 AM	SiCl4 pre valve closed
3/10/2011	9:12:51 AM	SiCl4 post valve closed
3/10/2011	9:12:51 AM	Main Vac valve closed
3/10/2011	9:12:51 AM	Bubbler valve closed
3/10/2011	9:12:51 AM	Bypass valve opened
3/10/2011	9:12:51 AM	Helium MFC set to  0.000000
3/10/2011	9:12:51 AM	H2 MFC set to  0.000000
3/10/2011	9:12:51 AM	BCl3 MFC set to  0.000000
3/10/2011	9:12:51 AM	PHl3 MFC set to  0.000000
3/10/2011	9:12:51 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:12:51 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:12:51 AM	Tube furnace set to 0
3/10/2011	9:12:51 AM	Helium valve closed
3/10/2011	9:12:51 AM	H2 valve closed
3/10/2011	9:12:51 AM	BCl3 valve closed
3/10/2011	9:12:51 AM	PH3 valve closed
3/10/2011	9:12:51 AM	SiCl4 pre valve closed
3/10/2011	9:12:51 AM	SiCl4 post valve closed
3/10/2011	9:12:51 AM	Bubbler valve closed
3/10/2011	9:12:51 AM	Main Vac valve opened
3/10/2011	9:12:51 AM	Bypass valve opened
3/10/2011	9:12:51 AM	Helium MFC set to  0.000000
3/10/2011	9:12:51 AM	H2 MFC set to  0.000000
3/10/2011	9:12:51 AM	BCl3 MFC set to  0.000000
3/10/2011	9:12:51 AM	PHl3 MFC set to  0.000000
3/10/2011	9:12:51 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:12:51 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:12:51 AM	Tube furnace set to 0
3/10/2011	9:13:51 AM	H2 valve closed
3/10/2011	9:13:51 AM	BCl3 valve closed
3/10/2011	9:13:51 AM	PH3 valve closed
3/10/2011	9:13:51 AM	SiCl4 pre valve closed
3/10/2011	9:13:51 AM	SiCl4 post valve closed
3/10/2011	9:13:51 AM	Bubbler valve closed
3/10/2011	9:13:51 AM	Helium valve opened
3/10/2011	9:13:51 AM	Main Vac valve opened
3/10/2011	9:13:51 AM	Bypass valve opened
3/10/2011	9:13:51 AM	Helium MFC set to  100.000000
3/10/2011	9:13:51 AM	H2 MFC set to  0.000000
3/10/2011	9:13:51 AM	BCl3 MFC set to  0.000000
3/10/2011	9:13:51 AM	PHl3 MFC set to  0.000000
3/10/2011	9:13:51 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:13:51 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:13:51 AM	Tube furnace set to 0
3/10/2011	9:14:51 AM	Helium valve closed
3/10/2011	9:14:51 AM	H2 valve closed
3/10/2011	9:14:52 AM	BCl3 valve closed
3/10/2011	9:14:52 AM	PH3 valve closed
3/10/2011	9:14:52 AM	SiCl4 pre valve closed
3/10/2011	9:14:52 AM	SiCl4 post valve closed
3/10/2011	9:14:52 AM	Bubbler valve closed
3/10/2011	9:14:52 AM	Main Vac valve opened
3/10/2011	9:14:52 AM	Bypass valve opened
3/10/2011	9:14:52 AM	Helium MFC set to  0.000000
3/10/2011	9:14:52 AM	H2 MFC set to  0.000000
3/10/2011	9:14:52 AM	BCl3 MFC set to  0.000000
3/10/2011	9:14:52 AM	PHl3 MFC set to  0.000000
3/10/2011	9:14:52 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:14:52 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:14:52 AM	Tube furnace set to 0
3/10/2011	9:15:52 AM	H2 valve closed
3/10/2011	9:15:52 AM	BCl3 valve closed
3/10/2011	9:15:52 AM	PH3 valve closed
3/10/2011	9:15:52 AM	SiCl4 pre valve closed
3/10/2011	9:15:52 AM	SiCl4 post valve closed
3/10/2011	9:15:52 AM	Bubbler valve closed
3/10/2011	9:15:52 AM	Helium valve opened
3/10/2011	9:15:52 AM	Main Vac valve opened
3/10/2011	9:15:52 AM	Bypass valve opened
3/10/2011	9:15:52 AM	Helium MFC set to  100.000000
3/10/2011	9:15:52 AM	H2 MFC set to  0.000000
3/10/2011	9:15:52 AM	BCl3 MFC set to  0.000000
3/10/2011	9:15:52 AM	PHl3 MFC set to  0.000000
3/10/2011	9:15:52 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:15:52 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:15:52 AM	Tube furnace set to 0
3/10/2011	9:16:52 AM	Helium valve closed
3/10/2011	9:16:52 AM	H2 valve closed
3/10/2011	9:16:52 AM	BCl3 valve closed
3/10/2011	9:16:52 AM	PH3 valve closed
3/10/2011	9:16:52 AM	SiCl4 pre valve closed
3/10/2011	9:16:52 AM	SiCl4 post valve closed
3/10/2011	9:16:52 AM	Bubbler valve closed
3/10/2011	9:16:52 AM	Main Vac valve opened
3/10/2011	9:16:52 AM	Bypass valve opened
3/10/2011	9:16:52 AM	Helium MFC set to  0.000000
3/10/2011	9:16:52 AM	H2 MFC set to  0.000000
3/10/2011	9:16:52 AM	BCl3 MFC set to  0.000000
3/10/2011	9:16:52 AM	PHl3 MFC set to  0.000000
3/10/2011	9:16:52 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:16:52 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:16:52 AM	Tube furnace set to 0
3/10/2011	9:17:52 AM	H2 valve closed
3/10/2011	9:17:52 AM	BCl3 valve closed
3/10/2011	9:17:52 AM	PH3 valve closed
3/10/2011	9:17:52 AM	SiCl4 pre valve closed
3/10/2011	9:17:52 AM	SiCl4 post valve closed
3/10/2011	9:17:52 AM	Bubbler valve closed
3/10/2011	9:17:52 AM	Helium valve opened
3/10/2011	9:17:52 AM	Main Vac valve opened
3/10/2011	9:17:52 AM	Bypass valve opened
3/10/2011	9:17:52 AM	Helium MFC set to  100.000000
3/10/2011	9:17:52 AM	H2 MFC set to  0.000000
3/10/2011	9:17:52 AM	BCl3 MFC set to  0.000000
3/10/2011	9:17:52 AM	PHl3 MFC set to  0.000000
3/10/2011	9:17:52 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:17:52 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:17:52 AM	Tube furnace set to 0
3/10/2011	9:18:52 AM	Helium valve closed
3/10/2011	9:18:52 AM	H2 valve closed
3/10/2011	9:18:52 AM	BCl3 valve closed
3/10/2011	9:18:52 AM	PH3 valve closed
3/10/2011	9:18:52 AM	SiCl4 pre valve closed
3/10/2011	9:18:52 AM	SiCl4 post valve closed
3/10/2011	9:18:52 AM	Bubbler valve closed
3/10/2011	9:18:52 AM	Main Vac valve opened
3/10/2011	9:18:52 AM	Bypass valve opened
3/10/2011	9:18:52 AM	Helium MFC set to  0.000000
3/10/2011	9:18:52 AM	H2 MFC set to  0.000000
3/10/2011	9:18:52 AM	BCl3 MFC set to  0.000000
3/10/2011	9:18:52 AM	PHl3 MFC set to  0.000000
3/10/2011	9:18:52 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:18:52 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:18:52 AM	Tube furnace set to 0
3/10/2011	9:19:52 AM	H2 valve closed
3/10/2011	9:19:52 AM	BCl3 valve closed
3/10/2011	9:19:52 AM	PH3 valve closed
3/10/2011	9:19:52 AM	SiCl4 pre valve closed
3/10/2011	9:19:52 AM	SiCl4 post valve closed
3/10/2011	9:19:52 AM	Bubbler valve closed
3/10/2011	9:19:52 AM	Helium valve opened
3/10/2011	9:19:52 AM	Main Vac valve opened
3/10/2011	9:19:53 AM	Bypass valve opened
3/10/2011	9:19:53 AM	Helium MFC set to  100.000000
3/10/2011	9:19:53 AM	H2 MFC set to  0.000000
3/10/2011	9:19:53 AM	BCl3 MFC set to  0.000000
3/10/2011	9:19:53 AM	PHl3 MFC set to  0.000000
3/10/2011	9:19:53 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:19:53 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:19:53 AM	Tube furnace set to 0
3/10/2011	9:20:53 AM	Helium valve closed
3/10/2011	9:20:53 AM	H2 valve closed
3/10/2011	9:20:53 AM	BCl3 valve closed
3/10/2011	9:20:53 AM	PH3 valve closed
3/10/2011	9:20:53 AM	SiCl4 pre valve closed
3/10/2011	9:20:53 AM	SiCl4 post valve closed
3/10/2011	9:20:53 AM	Bubbler valve closed
3/10/2011	9:20:53 AM	Main Vac valve opened
3/10/2011	9:20:53 AM	Bypass valve opened
3/10/2011	9:20:53 AM	Helium MFC set to  0.000000
3/10/2011	9:20:53 AM	H2 MFC set to  0.000000
3/10/2011	9:20:53 AM	BCl3 MFC set to  0.000000
3/10/2011	9:20:53 AM	PHl3 MFC set to  0.000000
3/10/2011	9:20:53 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:20:53 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:20:53 AM	Tube furnace set to 0
3/10/2011	9:21:53 AM	H2 valve closed
3/10/2011	9:21:53 AM	BCl3 valve closed
3/10/2011	9:21:53 AM	PH3 valve closed
3/10/2011	9:21:53 AM	SiCl4 pre valve closed
3/10/2011	9:21:53 AM	SiCl4 post valve closed
3/10/2011	9:21:53 AM	Bubbler valve closed
3/10/2011	9:21:53 AM	Helium valve opened
3/10/2011	9:21:53 AM	Main Vac valve opened
3/10/2011	9:21:53 AM	Bypass valve opened
3/10/2011	9:21:53 AM	Helium MFC set to  100.000000
3/10/2011	9:21:53 AM	H2 MFC set to  0.000000
3/10/2011	9:21:53 AM	BCl3 MFC set to  0.000000
3/10/2011	9:21:53 AM	PHl3 MFC set to  0.000000
3/10/2011	9:21:53 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:21:53 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:21:53 AM	Tube furnace set to 0
3/10/2011	9:22:53 AM	Helium valve closed
3/10/2011	9:22:53 AM	H2 valve closed
3/10/2011	9:22:53 AM	BCl3 valve closed
3/10/2011	9:22:53 AM	PH3 valve closed
3/10/2011	9:22:53 AM	SiCl4 pre valve closed
3/10/2011	9:22:53 AM	SiCl4 post valve closed
3/10/2011	9:22:53 AM	Bubbler valve closed
3/10/2011	9:22:53 AM	Main Vac valve opened
3/10/2011	9:22:53 AM	Bypass valve opened
3/10/2011	9:22:53 AM	Helium MFC set to  0.000000
3/10/2011	9:22:53 AM	H2 MFC set to  0.000000
3/10/2011	9:22:53 AM	BCl3 MFC set to  0.000000
3/10/2011	9:22:53 AM	PHl3 MFC set to  0.000000
3/10/2011	9:22:53 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:22:53 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:22:53 AM	Tube furnace set to 0
3/10/2011	9:23:53 AM	H2 valve closed
3/10/2011	9:23:53 AM	BCl3 valve closed
3/10/2011	9:23:53 AM	PH3 valve closed
3/10/2011	9:23:53 AM	SiCl4 pre valve closed
3/10/2011	9:23:53 AM	SiCl4 post valve closed
3/10/2011	9:23:53 AM	Bubbler valve closed
3/10/2011	9:23:53 AM	Helium valve opened
3/10/2011	9:23:53 AM	Main Vac valve opened
3/10/2011	9:23:53 AM	Bypass valve opened
3/10/2011	9:23:53 AM	Helium MFC set to  100.000000
3/10/2011	9:23:53 AM	H2 MFC set to  0.000000
3/10/2011	9:23:53 AM	BCl3 MFC set to  0.000000
3/10/2011	9:23:53 AM	PHl3 MFC set to  0.000000
3/10/2011	9:23:53 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:23:53 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:23:53 AM	Tube furnace set to 0
3/10/2011	9:24:53 AM	Helium valve closed
3/10/2011	9:24:53 AM	H2 valve closed
3/10/2011	9:24:53 AM	BCl3 valve closed
3/10/2011	9:24:53 AM	PH3 valve closed
3/10/2011	9:24:53 AM	SiCl4 pre valve closed
3/10/2011	9:24:53 AM	SiCl4 post valve closed
3/10/2011	9:24:53 AM	Bubbler valve closed
3/10/2011	9:24:53 AM	Main Vac valve opened
3/10/2011	9:24:53 AM	Bypass valve opened
3/10/2011	9:24:53 AM	Helium MFC set to  0.000000
3/10/2011	9:24:53 AM	H2 MFC set to  0.000000
3/10/2011	9:24:53 AM	BCl3 MFC set to  0.000000
3/10/2011	9:24:53 AM	PHl3 MFC set to  0.000000
3/10/2011	9:24:53 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:24:54 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:24:54 AM	Tube furnace set to 0
3/10/2011	9:25:54 AM	H2 valve closed
3/10/2011	9:25:54 AM	BCl3 valve closed
3/10/2011	9:25:54 AM	PH3 valve closed
3/10/2011	9:25:54 AM	SiCl4 pre valve closed
3/10/2011	9:25:54 AM	SiCl4 post valve closed
3/10/2011	9:25:54 AM	Bubbler valve closed
3/10/2011	9:25:54 AM	Helium valve opened
3/10/2011	9:25:54 AM	Main Vac valve opened
3/10/2011	9:25:54 AM	Bypass valve opened
3/10/2011	9:25:54 AM	Helium MFC set to  100.000000
3/10/2011	9:25:54 AM	H2 MFC set to  0.000000
3/10/2011	9:25:54 AM	BCl3 MFC set to  0.000000
3/10/2011	9:25:54 AM	PHl3 MFC set to  0.000000
3/10/2011	9:25:54 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:25:54 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:25:54 AM	Tube furnace set to 0
3/10/2011	9:26:54 AM	Helium valve closed
3/10/2011	9:26:54 AM	H2 valve closed
3/10/2011	9:26:54 AM	BCl3 valve closed
3/10/2011	9:26:54 AM	PH3 valve closed
3/10/2011	9:26:54 AM	SiCl4 pre valve closed
3/10/2011	9:26:54 AM	SiCl4 post valve closed
3/10/2011	9:26:54 AM	Bubbler valve closed
3/10/2011	9:26:54 AM	Main Vac valve opened
3/10/2011	9:26:54 AM	Bypass valve opened
3/10/2011	9:26:54 AM	Helium MFC set to  0.000000
3/10/2011	9:26:54 AM	H2 MFC set to  0.000000
3/10/2011	9:26:54 AM	BCl3 MFC set to  0.000000
3/10/2011	9:26:54 AM	PHl3 MFC set to  0.000000
3/10/2011	9:26:54 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:26:54 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:26:54 AM	Tube furnace set to 0
3/10/2011	9:27:54 AM	H2 valve closed
3/10/2011	9:27:54 AM	BCl3 valve closed
3/10/2011	9:27:54 AM	PH3 valve closed
3/10/2011	9:27:54 AM	SiCl4 pre valve closed
3/10/2011	9:27:54 AM	SiCl4 post valve closed
3/10/2011	9:27:54 AM	Bubbler valve closed
3/10/2011	9:27:54 AM	Helium valve opened
3/10/2011	9:27:54 AM	Main Vac valve opened
3/10/2011	9:27:54 AM	Bypass valve opened
3/10/2011	9:27:54 AM	Helium MFC set to  100.000000
3/10/2011	9:27:54 AM	H2 MFC set to  0.000000
3/10/2011	9:27:54 AM	BCl3 MFC set to  0.000000
3/10/2011	9:27:54 AM	PHl3 MFC set to  0.000000
3/10/2011	9:27:54 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:27:54 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:27:54 AM	Tube furnace set to 0
3/10/2011	9:28:54 AM	Helium valve closed
3/10/2011	9:28:54 AM	H2 valve closed
3/10/2011	9:28:54 AM	BCl3 valve closed
3/10/2011	9:28:54 AM	PH3 valve closed
3/10/2011	9:28:54 AM	SiCl4 pre valve closed
3/10/2011	9:28:54 AM	SiCl4 post valve closed
3/10/2011	9:28:54 AM	Bubbler valve closed
3/10/2011	9:28:54 AM	Main Vac valve opened
3/10/2011	9:28:54 AM	Bypass valve opened
3/10/2011	9:28:54 AM	Helium MFC set to  0.000000
3/10/2011	9:28:54 AM	H2 MFC set to  0.000000
3/10/2011	9:28:54 AM	BCl3 MFC set to  0.000000
3/10/2011	9:28:54 AM	PHl3 MFC set to  0.000000
3/10/2011	9:28:54 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:28:54 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:28:54 AM	Tube furnace set to 0
3/10/2011	9:29:54 AM	H2 valve closed
3/10/2011	9:29:54 AM	BCl3 valve closed
3/10/2011	9:29:54 AM	PH3 valve closed
3/10/2011	9:29:54 AM	SiCl4 pre valve closed
3/10/2011	9:29:54 AM	SiCl4 post valve closed
3/10/2011	9:29:54 AM	Bubbler valve closed
3/10/2011	9:29:54 AM	Helium valve opened
3/10/2011	9:29:54 AM	Main Vac valve opened
3/10/2011	9:29:54 AM	Bypass valve opened
3/10/2011	9:29:54 AM	Helium MFC set to  100.000000
3/10/2011	9:29:54 AM	H2 MFC set to  0.000000
3/10/2011	9:29:54 AM	BCl3 MFC set to  0.000000
3/10/2011	9:29:54 AM	PHl3 MFC set to  0.000000
3/10/2011	9:29:54 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:29:55 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:29:55 AM	Tube furnace set to 0
3/10/2011	9:30:55 AM	Helium valve closed
3/10/2011	9:30:55 AM	H2 valve closed
3/10/2011	9:30:55 AM	BCl3 valve closed
3/10/2011	9:30:55 AM	PH3 valve closed
3/10/2011	9:30:55 AM	SiCl4 pre valve closed
3/10/2011	9:30:55 AM	SiCl4 post valve closed
3/10/2011	9:30:55 AM	Bubbler valve closed
3/10/2011	9:30:55 AM	Main Vac valve opened
3/10/2011	9:30:55 AM	Bypass valve opened
3/10/2011	9:30:55 AM	Helium MFC set to  0.000000
3/10/2011	9:30:55 AM	H2 MFC set to  0.000000
3/10/2011	9:30:55 AM	BCl3 MFC set to  0.000000
3/10/2011	9:30:55 AM	PHl3 MFC set to  0.000000
3/10/2011	9:30:55 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:30:55 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:30:55 AM	Tube furnace set to 0
3/10/2011	9:31:55 AM	H2 valve closed
3/10/2011	9:31:55 AM	BCl3 valve closed
3/10/2011	9:31:55 AM	PH3 valve closed
3/10/2011	9:31:55 AM	SiCl4 pre valve closed
3/10/2011	9:31:55 AM	SiCl4 post valve closed
3/10/2011	9:31:55 AM	Bubbler valve closed
3/10/2011	9:31:55 AM	Helium valve opened
3/10/2011	9:31:55 AM	Main Vac valve opened
3/10/2011	9:31:55 AM	Bypass valve opened
3/10/2011	9:31:55 AM	Helium MFC set to  100.000000
3/10/2011	9:31:55 AM	H2 MFC set to  0.000000
3/10/2011	9:31:55 AM	BCl3 MFC set to  0.000000
3/10/2011	9:31:55 AM	PHl3 MFC set to  0.000000
3/10/2011	9:31:55 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:31:55 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:31:55 AM	Tube furnace set to 0
3/10/2011	9:32:11 AM	Helium valve closed
3/10/2011	9:32:11 AM	H2 valve closed
3/10/2011	9:32:11 AM	BCl3 valve closed
3/10/2011	9:32:11 AM	PH3 valve closed
3/10/2011	9:32:11 AM	SiCl4 pre valve closed
3/10/2011	9:32:11 AM	SiCl4 post valve closed
3/10/2011	9:32:11 AM	Bubbler valve closed
3/10/2011	9:32:11 AM	Main Vac valve opened
3/10/2011	9:32:11 AM	Bypass valve opened
3/10/2011	9:32:11 AM	Helium MFC set to  0.000000
3/10/2011	9:32:11 AM	H2 MFC set to  0.000000
3/10/2011	9:32:11 AM	BCl3 MFC set to  0.000000
3/10/2011	9:32:11 AM	PHl3 MFC set to  0.000000
3/10/2011	9:32:11 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:32:11 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:32:11 AM	Tube furnace set to 0
3/10/2011	9:32:12 AM	Run finished at 9:32 AM
3/10/2011	9:32:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	9:34:16 AM	Bypass valve closed
3/10/2011	9:34:16 AM	Main Vac valve closed
3/10/2011	9:43:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2011	9:43:25 AM	Recipe started at 9:43 AM
3/10/2011	9:43:25 AM	H2 valve closed
3/10/2011	9:43:25 AM	BCl3 valve closed
3/10/2011	9:43:25 AM	PH3 valve closed
3/10/2011	9:43:25 AM	SiCl4 pre valve closed
3/10/2011	9:43:25 AM	SiCl4 post valve closed
3/10/2011	9:43:25 AM	Main Vac valve closed
3/10/2011	9:43:25 AM	Bypass valve closed
3/10/2011	9:43:25 AM	Bubbler valve closed
3/10/2011	9:43:25 AM	Helium valve opened
3/10/2011	9:43:25 AM	Helium MFC set to  500.000000
3/10/2011	9:43:25 AM	H2 MFC set to  0.000000
3/10/2011	9:43:25 AM	BCl3 MFC set to  0.000000
3/10/2011	9:43:25 AM	PHl3 MFC set to  0.000000
3/10/2011	9:43:25 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:43:25 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:43:25 AM	Tube furnace set to 0
3/10/2011	9:44:40 AM	Helium valve closed
3/10/2011	9:44:40 AM	H2 valve closed
3/10/2011	9:44:40 AM	BCl3 valve closed
3/10/2011	9:44:40 AM	PH3 valve closed
3/10/2011	9:44:40 AM	SiCl4 pre valve closed
3/10/2011	9:44:40 AM	SiCl4 post valve closed
3/10/2011	9:44:40 AM	Main Vac valve closed
3/10/2011	9:44:40 AM	Bypass valve closed
3/10/2011	9:44:40 AM	Bubbler valve closed
3/10/2011	9:44:40 AM	Helium MFC set to  0.000000
3/10/2011	9:44:40 AM	H2 MFC set to  0.000000
3/10/2011	9:44:40 AM	BCl3 MFC set to  0.000000
3/10/2011	9:44:40 AM	PHl3 MFC set to  0.000000
3/10/2011	9:44:40 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:44:40 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:44:40 AM	Tube furnace set to 0
3/10/2011	9:44:40 AM	Run finished at 9:44 AM
3/10/2011	9:44:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2011	9:49:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2011	9:49:34 AM	Recipe started at 9:49 AM
3/10/2011	9:49:34 AM	Helium valve closed
3/10/2011	9:49:34 AM	H2 valve closed
3/10/2011	9:49:34 AM	BCl3 valve closed
3/10/2011	9:49:34 AM	PH3 valve closed
3/10/2011	9:49:34 AM	SiCl4 pre valve closed
3/10/2011	9:49:34 AM	SiCl4 post valve closed
3/10/2011	9:49:34 AM	Main Vac valve closed
3/10/2011	9:49:34 AM	Bubbler valve closed
3/10/2011	9:49:34 AM	Bypass valve opened
3/10/2011	9:49:34 AM	Helium MFC set to  0.000000
3/10/2011	9:49:34 AM	H2 MFC set to  0.000000
3/10/2011	9:49:34 AM	BCl3 MFC set to  0.000000
3/10/2011	9:49:34 AM	PHl3 MFC set to  0.000000
3/10/2011	9:49:34 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:49:34 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:49:34 AM	Tube furnace set to 0
3/10/2011	9:50:04 AM	Helium valve closed
3/10/2011	9:50:04 AM	H2 valve closed
3/10/2011	9:50:04 AM	BCl3 valve closed
3/10/2011	9:50:04 AM	PH3 valve closed
3/10/2011	9:50:04 AM	SiCl4 pre valve closed
3/10/2011	9:50:04 AM	SiCl4 post valve closed
3/10/2011	9:50:04 AM	Bubbler valve closed
3/10/2011	9:50:04 AM	Main Vac valve opened
3/10/2011	9:50:04 AM	Bypass valve opened
3/10/2011	9:50:04 AM	Helium MFC set to  0.000000
3/10/2011	9:50:04 AM	H2 MFC set to  0.000000
3/10/2011	9:50:04 AM	BCl3 MFC set to  0.000000
3/10/2011	9:50:04 AM	PHl3 MFC set to  0.000000
3/10/2011	9:50:04 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:50:04 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:50:04 AM	Tube furnace set to 0
3/10/2011	9:50:04 AM	Run finished at 9:50 AM
3/10/2011	9:50:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2011	9:50:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	9:50:22 AM	Recipe started at 9:50 AM
3/10/2011	9:50:22 AM	Helium valve closed
3/10/2011	9:50:22 AM	H2 valve closed
3/10/2011	9:50:22 AM	BCl3 valve closed
3/10/2011	9:50:22 AM	PH3 valve closed
3/10/2011	9:50:22 AM	SiCl4 pre valve closed
3/10/2011	9:50:22 AM	SiCl4 post valve closed
3/10/2011	9:50:22 AM	Main Vac valve closed
3/10/2011	9:50:22 AM	Bubbler valve closed
3/10/2011	9:50:22 AM	Bypass valve opened
3/10/2011	9:50:22 AM	Helium MFC set to  0.000000
3/10/2011	9:50:22 AM	H2 MFC set to  0.000000
3/10/2011	9:50:22 AM	BCl3 MFC set to  0.000000
3/10/2011	9:50:22 AM	PHl3 MFC set to  0.000000
3/10/2011	9:50:22 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:50:22 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:50:22 AM	Tube furnace set to 0
3/10/2011	9:50:22 AM	Helium valve closed
3/10/2011	9:50:22 AM	H2 valve closed
3/10/2011	9:50:22 AM	BCl3 valve closed
3/10/2011	9:50:22 AM	PH3 valve closed
3/10/2011	9:50:22 AM	SiCl4 pre valve closed
3/10/2011	9:50:22 AM	SiCl4 post valve closed
3/10/2011	9:50:22 AM	Bubbler valve closed
3/10/2011	9:50:22 AM	Main Vac valve opened
3/10/2011	9:50:22 AM	Bypass valve opened
3/10/2011	9:50:22 AM	Helium MFC set to  0.000000
3/10/2011	9:50:22 AM	H2 MFC set to  0.000000
3/10/2011	9:50:22 AM	BCl3 MFC set to  0.000000
3/10/2011	9:50:22 AM	PHl3 MFC set to  0.000000
3/10/2011	9:50:22 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:50:22 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:50:22 AM	Tube furnace set to 0
3/10/2011	9:51:22 AM	H2 valve closed
3/10/2011	9:51:22 AM	BCl3 valve closed
3/10/2011	9:51:22 AM	PH3 valve closed
3/10/2011	9:51:22 AM	SiCl4 pre valve closed
3/10/2011	9:51:22 AM	SiCl4 post valve closed
3/10/2011	9:51:22 AM	Bubbler valve closed
3/10/2011	9:51:22 AM	Helium valve opened
3/10/2011	9:51:22 AM	Main Vac valve opened
3/10/2011	9:51:22 AM	Bypass valve opened
3/10/2011	9:51:22 AM	Helium MFC set to  100.000000
3/10/2011	9:51:22 AM	H2 MFC set to  0.000000
3/10/2011	9:51:22 AM	BCl3 MFC set to  0.000000
3/10/2011	9:51:22 AM	PHl3 MFC set to  0.000000
3/10/2011	9:51:22 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:51:22 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:51:22 AM	Tube furnace set to 0
3/10/2011	9:52:22 AM	Helium valve closed
3/10/2011	9:52:22 AM	H2 valve closed
3/10/2011	9:52:22 AM	BCl3 valve closed
3/10/2011	9:52:22 AM	PH3 valve closed
3/10/2011	9:52:22 AM	SiCl4 pre valve closed
3/10/2011	9:52:22 AM	SiCl4 post valve closed
3/10/2011	9:52:22 AM	Bubbler valve closed
3/10/2011	9:52:22 AM	Main Vac valve opened
3/10/2011	9:52:22 AM	Bypass valve opened
3/10/2011	9:52:22 AM	Helium MFC set to  0.000000
3/10/2011	9:52:22 AM	H2 MFC set to  0.000000
3/10/2011	9:52:22 AM	BCl3 MFC set to  0.000000
3/10/2011	9:52:22 AM	PHl3 MFC set to  0.000000
3/10/2011	9:52:22 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:52:22 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:52:23 AM	Tube furnace set to 0
3/10/2011	9:53:23 AM	H2 valve closed
3/10/2011	9:53:23 AM	BCl3 valve closed
3/10/2011	9:53:23 AM	PH3 valve closed
3/10/2011	9:53:23 AM	SiCl4 pre valve closed
3/10/2011	9:53:23 AM	SiCl4 post valve closed
3/10/2011	9:53:23 AM	Bubbler valve closed
3/10/2011	9:53:23 AM	Helium valve opened
3/10/2011	9:53:23 AM	Main Vac valve opened
3/10/2011	9:53:23 AM	Bypass valve opened
3/10/2011	9:53:23 AM	Helium MFC set to  100.000000
3/10/2011	9:53:23 AM	H2 MFC set to  0.000000
3/10/2011	9:53:23 AM	BCl3 MFC set to  0.000000
3/10/2011	9:53:23 AM	PHl3 MFC set to  0.000000
3/10/2011	9:53:23 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:53:23 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:53:23 AM	Tube furnace set to 0
3/10/2011	9:54:23 AM	Helium valve closed
3/10/2011	9:54:23 AM	H2 valve closed
3/10/2011	9:54:23 AM	BCl3 valve closed
3/10/2011	9:54:23 AM	PH3 valve closed
3/10/2011	9:54:23 AM	SiCl4 pre valve closed
3/10/2011	9:54:23 AM	SiCl4 post valve closed
3/10/2011	9:54:23 AM	Bubbler valve closed
3/10/2011	9:54:23 AM	Main Vac valve opened
3/10/2011	9:54:23 AM	Bypass valve opened
3/10/2011	9:54:23 AM	Helium MFC set to  0.000000
3/10/2011	9:54:23 AM	H2 MFC set to  0.000000
3/10/2011	9:54:23 AM	BCl3 MFC set to  0.000000
3/10/2011	9:54:23 AM	PHl3 MFC set to  0.000000
3/10/2011	9:54:23 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:54:23 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:54:23 AM	Tube furnace set to 0
3/10/2011	9:55:23 AM	H2 valve closed
3/10/2011	9:55:23 AM	BCl3 valve closed
3/10/2011	9:55:23 AM	PH3 valve closed
3/10/2011	9:55:23 AM	SiCl4 pre valve closed
3/10/2011	9:55:23 AM	SiCl4 post valve closed
3/10/2011	9:55:23 AM	Bubbler valve closed
3/10/2011	9:55:23 AM	Helium valve opened
3/10/2011	9:55:23 AM	Main Vac valve opened
3/10/2011	9:55:23 AM	Bypass valve opened
3/10/2011	9:55:23 AM	Helium MFC set to  100.000000
3/10/2011	9:55:23 AM	H2 MFC set to  0.000000
3/10/2011	9:55:23 AM	BCl3 MFC set to  0.000000
3/10/2011	9:55:23 AM	PHl3 MFC set to  0.000000
3/10/2011	9:55:23 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:55:23 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:55:23 AM	Tube furnace set to 0
3/10/2011	9:56:23 AM	Helium valve closed
3/10/2011	9:56:23 AM	H2 valve closed
3/10/2011	9:56:23 AM	BCl3 valve closed
3/10/2011	9:56:23 AM	PH3 valve closed
3/10/2011	9:56:23 AM	SiCl4 pre valve closed
3/10/2011	9:56:23 AM	SiCl4 post valve closed
3/10/2011	9:56:23 AM	Bubbler valve closed
3/10/2011	9:56:23 AM	Main Vac valve opened
3/10/2011	9:56:23 AM	Bypass valve opened
3/10/2011	9:56:23 AM	Helium MFC set to  0.000000
3/10/2011	9:56:23 AM	H2 MFC set to  0.000000
3/10/2011	9:56:23 AM	BCl3 MFC set to  0.000000
3/10/2011	9:56:23 AM	PHl3 MFC set to  0.000000
3/10/2011	9:56:23 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:56:23 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:56:23 AM	Tube furnace set to 0
3/10/2011	9:57:23 AM	H2 valve closed
3/10/2011	9:57:23 AM	BCl3 valve closed
3/10/2011	9:57:23 AM	PH3 valve closed
3/10/2011	9:57:23 AM	SiCl4 pre valve closed
3/10/2011	9:57:23 AM	SiCl4 post valve closed
3/10/2011	9:57:23 AM	Bubbler valve closed
3/10/2011	9:57:23 AM	Helium valve opened
3/10/2011	9:57:23 AM	Main Vac valve opened
3/10/2011	9:57:23 AM	Bypass valve opened
3/10/2011	9:57:23 AM	Helium MFC set to  100.000000
3/10/2011	9:57:23 AM	H2 MFC set to  0.000000
3/10/2011	9:57:23 AM	BCl3 MFC set to  0.000000
3/10/2011	9:57:23 AM	PHl3 MFC set to  0.000000
3/10/2011	9:57:23 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:57:23 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:57:24 AM	Tube furnace set to 0
3/10/2011	9:58:24 AM	Helium valve closed
3/10/2011	9:58:24 AM	H2 valve closed
3/10/2011	9:58:24 AM	BCl3 valve closed
3/10/2011	9:58:24 AM	PH3 valve closed
3/10/2011	9:58:24 AM	SiCl4 pre valve closed
3/10/2011	9:58:24 AM	SiCl4 post valve closed
3/10/2011	9:58:24 AM	Bubbler valve closed
3/10/2011	9:58:24 AM	Main Vac valve opened
3/10/2011	9:58:24 AM	Bypass valve opened
3/10/2011	9:58:24 AM	Helium MFC set to  0.000000
3/10/2011	9:58:24 AM	H2 MFC set to  0.000000
3/10/2011	9:58:24 AM	BCl3 MFC set to  0.000000
3/10/2011	9:58:24 AM	PHl3 MFC set to  0.000000
3/10/2011	9:58:24 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:58:24 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:58:24 AM	Tube furnace set to 0
3/10/2011	9:59:24 AM	H2 valve closed
3/10/2011	9:59:24 AM	BCl3 valve closed
3/10/2011	9:59:24 AM	PH3 valve closed
3/10/2011	9:59:24 AM	SiCl4 pre valve closed
3/10/2011	9:59:24 AM	SiCl4 post valve closed
3/10/2011	9:59:24 AM	Bubbler valve closed
3/10/2011	9:59:24 AM	Helium valve opened
3/10/2011	9:59:24 AM	Main Vac valve opened
3/10/2011	9:59:24 AM	Bypass valve opened
3/10/2011	9:59:24 AM	Helium MFC set to  100.000000
3/10/2011	9:59:24 AM	H2 MFC set to  0.000000
3/10/2011	9:59:24 AM	BCl3 MFC set to  0.000000
3/10/2011	9:59:24 AM	PHl3 MFC set to  0.000000
3/10/2011	9:59:24 AM	SiCl4 MFC set to  0.000000
3/10/2011	9:59:24 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	9:59:24 AM	Tube furnace set to 0
3/10/2011	10:00:24 AM	Helium valve closed
3/10/2011	10:00:24 AM	H2 valve closed
3/10/2011	10:00:24 AM	BCl3 valve closed
3/10/2011	10:00:24 AM	PH3 valve closed
3/10/2011	10:00:24 AM	SiCl4 pre valve closed
3/10/2011	10:00:24 AM	SiCl4 post valve closed
3/10/2011	10:00:24 AM	Bubbler valve closed
3/10/2011	10:00:24 AM	Main Vac valve opened
3/10/2011	10:00:24 AM	Bypass valve opened
3/10/2011	10:00:24 AM	Helium MFC set to  0.000000
3/10/2011	10:00:24 AM	H2 MFC set to  0.000000
3/10/2011	10:00:24 AM	BCl3 MFC set to  0.000000
3/10/2011	10:00:24 AM	PHl3 MFC set to  0.000000
3/10/2011	10:00:24 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:00:24 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:00:24 AM	Tube furnace set to 0
3/10/2011	10:01:24 AM	H2 valve closed
3/10/2011	10:01:24 AM	BCl3 valve closed
3/10/2011	10:01:24 AM	PH3 valve closed
3/10/2011	10:01:24 AM	SiCl4 pre valve closed
3/10/2011	10:01:24 AM	SiCl4 post valve closed
3/10/2011	10:01:24 AM	Bubbler valve closed
3/10/2011	10:01:24 AM	Helium valve opened
3/10/2011	10:01:24 AM	Main Vac valve opened
3/10/2011	10:01:24 AM	Bypass valve opened
3/10/2011	10:01:24 AM	Helium MFC set to  100.000000
3/10/2011	10:01:24 AM	H2 MFC set to  0.000000
3/10/2011	10:01:24 AM	BCl3 MFC set to  0.000000
3/10/2011	10:01:24 AM	PHl3 MFC set to  0.000000
3/10/2011	10:01:24 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:01:24 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:01:24 AM	Tube furnace set to 0
3/10/2011	10:02:24 AM	Helium valve closed
3/10/2011	10:02:24 AM	H2 valve closed
3/10/2011	10:02:24 AM	BCl3 valve closed
3/10/2011	10:02:24 AM	PH3 valve closed
3/10/2011	10:02:24 AM	SiCl4 pre valve closed
3/10/2011	10:02:24 AM	SiCl4 post valve closed
3/10/2011	10:02:24 AM	Bubbler valve closed
3/10/2011	10:02:24 AM	Main Vac valve opened
3/10/2011	10:02:24 AM	Bypass valve opened
3/10/2011	10:02:24 AM	Helium MFC set to  0.000000
3/10/2011	10:02:24 AM	H2 MFC set to  0.000000
3/10/2011	10:02:24 AM	BCl3 MFC set to  0.000000
3/10/2011	10:02:24 AM	PHl3 MFC set to  0.000000
3/10/2011	10:02:24 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:02:24 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:02:25 AM	Tube furnace set to 0
3/10/2011	10:03:25 AM	H2 valve closed
3/10/2011	10:03:25 AM	BCl3 valve closed
3/10/2011	10:03:25 AM	PH3 valve closed
3/10/2011	10:03:25 AM	SiCl4 pre valve closed
3/10/2011	10:03:25 AM	SiCl4 post valve closed
3/10/2011	10:03:25 AM	Bubbler valve closed
3/10/2011	10:03:25 AM	Helium valve opened
3/10/2011	10:03:25 AM	Main Vac valve opened
3/10/2011	10:03:25 AM	Bypass valve opened
3/10/2011	10:03:25 AM	Helium MFC set to  100.000000
3/10/2011	10:03:25 AM	H2 MFC set to  0.000000
3/10/2011	10:03:25 AM	BCl3 MFC set to  0.000000
3/10/2011	10:03:25 AM	PHl3 MFC set to  0.000000
3/10/2011	10:03:25 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:03:25 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:03:25 AM	Tube furnace set to 0
3/10/2011	10:04:25 AM	Helium valve closed
3/10/2011	10:04:25 AM	H2 valve closed
3/10/2011	10:04:25 AM	BCl3 valve closed
3/10/2011	10:04:25 AM	PH3 valve closed
3/10/2011	10:04:25 AM	SiCl4 pre valve closed
3/10/2011	10:04:25 AM	SiCl4 post valve closed
3/10/2011	10:04:25 AM	Bubbler valve closed
3/10/2011	10:04:25 AM	Main Vac valve opened
3/10/2011	10:04:25 AM	Bypass valve opened
3/10/2011	10:04:25 AM	Helium MFC set to  0.000000
3/10/2011	10:04:25 AM	H2 MFC set to  0.000000
3/10/2011	10:04:25 AM	BCl3 MFC set to  0.000000
3/10/2011	10:04:25 AM	PHl3 MFC set to  0.000000
3/10/2011	10:04:25 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:04:25 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:04:25 AM	Tube furnace set to 0
3/10/2011	10:05:25 AM	H2 valve closed
3/10/2011	10:05:25 AM	BCl3 valve closed
3/10/2011	10:05:25 AM	PH3 valve closed
3/10/2011	10:05:25 AM	SiCl4 pre valve closed
3/10/2011	10:05:25 AM	SiCl4 post valve closed
3/10/2011	10:05:25 AM	Bubbler valve closed
3/10/2011	10:05:25 AM	Helium valve opened
3/10/2011	10:05:25 AM	Main Vac valve opened
3/10/2011	10:05:25 AM	Bypass valve opened
3/10/2011	10:05:25 AM	Helium MFC set to  100.000000
3/10/2011	10:05:25 AM	H2 MFC set to  0.000000
3/10/2011	10:05:25 AM	BCl3 MFC set to  0.000000
3/10/2011	10:05:25 AM	PHl3 MFC set to  0.000000
3/10/2011	10:05:25 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:05:25 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:05:25 AM	Tube furnace set to 0
3/10/2011	10:06:25 AM	Helium valve closed
3/10/2011	10:06:25 AM	H2 valve closed
3/10/2011	10:06:25 AM	BCl3 valve closed
3/10/2011	10:06:25 AM	PH3 valve closed
3/10/2011	10:06:25 AM	SiCl4 pre valve closed
3/10/2011	10:06:25 AM	SiCl4 post valve closed
3/10/2011	10:06:25 AM	Bubbler valve closed
3/10/2011	10:06:25 AM	Main Vac valve opened
3/10/2011	10:06:25 AM	Bypass valve opened
3/10/2011	10:06:25 AM	Helium MFC set to  0.000000
3/10/2011	10:06:25 AM	H2 MFC set to  0.000000
3/10/2011	10:06:25 AM	BCl3 MFC set to  0.000000
3/10/2011	10:06:25 AM	PHl3 MFC set to  0.000000
3/10/2011	10:06:25 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:06:25 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:06:25 AM	Tube furnace set to 0
3/10/2011	10:07:25 AM	H2 valve closed
3/10/2011	10:07:25 AM	BCl3 valve closed
3/10/2011	10:07:25 AM	PH3 valve closed
3/10/2011	10:07:25 AM	SiCl4 pre valve closed
3/10/2011	10:07:25 AM	SiCl4 post valve closed
3/10/2011	10:07:25 AM	Bubbler valve closed
3/10/2011	10:07:25 AM	Helium valve opened
3/10/2011	10:07:25 AM	Main Vac valve opened
3/10/2011	10:07:25 AM	Bypass valve opened
3/10/2011	10:07:25 AM	Helium MFC set to  100.000000
3/10/2011	10:07:25 AM	H2 MFC set to  0.000000
3/10/2011	10:07:25 AM	BCl3 MFC set to  0.000000
3/10/2011	10:07:25 AM	PHl3 MFC set to  0.000000
3/10/2011	10:07:25 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:07:25 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:07:26 AM	Tube furnace set to 0
3/10/2011	10:08:26 AM	Helium valve closed
3/10/2011	10:08:26 AM	H2 valve closed
3/10/2011	10:08:26 AM	BCl3 valve closed
3/10/2011	10:08:26 AM	PH3 valve closed
3/10/2011	10:08:26 AM	SiCl4 pre valve closed
3/10/2011	10:08:26 AM	SiCl4 post valve closed
3/10/2011	10:08:26 AM	Bubbler valve closed
3/10/2011	10:08:26 AM	Main Vac valve opened
3/10/2011	10:08:26 AM	Bypass valve opened
3/10/2011	10:08:26 AM	Helium MFC set to  0.000000
3/10/2011	10:08:26 AM	H2 MFC set to  0.000000
3/10/2011	10:08:26 AM	BCl3 MFC set to  0.000000
3/10/2011	10:08:26 AM	PHl3 MFC set to  0.000000
3/10/2011	10:08:26 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:08:26 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:08:26 AM	Tube furnace set to 0
3/10/2011	10:09:26 AM	H2 valve closed
3/10/2011	10:09:26 AM	BCl3 valve closed
3/10/2011	10:09:26 AM	PH3 valve closed
3/10/2011	10:09:26 AM	SiCl4 pre valve closed
3/10/2011	10:09:26 AM	SiCl4 post valve closed
3/10/2011	10:09:26 AM	Bubbler valve closed
3/10/2011	10:09:26 AM	Helium valve opened
3/10/2011	10:09:26 AM	Main Vac valve opened
3/10/2011	10:09:26 AM	Bypass valve opened
3/10/2011	10:09:26 AM	Helium MFC set to  100.000000
3/10/2011	10:09:26 AM	H2 MFC set to  0.000000
3/10/2011	10:09:26 AM	BCl3 MFC set to  0.000000
3/10/2011	10:09:26 AM	PHl3 MFC set to  0.000000
3/10/2011	10:09:26 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:09:26 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:09:26 AM	Tube furnace set to 0
3/10/2011	10:10:26 AM	Helium valve closed
3/10/2011	10:10:26 AM	H2 valve closed
3/10/2011	10:10:26 AM	BCl3 valve closed
3/10/2011	10:10:26 AM	PH3 valve closed
3/10/2011	10:10:26 AM	SiCl4 pre valve closed
3/10/2011	10:10:26 AM	SiCl4 post valve closed
3/10/2011	10:10:26 AM	Bubbler valve closed
3/10/2011	10:10:26 AM	Main Vac valve opened
3/10/2011	10:10:26 AM	Bypass valve opened
3/10/2011	10:10:26 AM	Helium MFC set to  0.000000
3/10/2011	10:10:26 AM	H2 MFC set to  0.000000
3/10/2011	10:10:26 AM	BCl3 MFC set to  0.000000
3/10/2011	10:10:26 AM	PHl3 MFC set to  0.000000
3/10/2011	10:10:26 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:10:26 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:10:26 AM	Tube furnace set to 0
3/10/2011	10:10:27 AM	Run finished at 10:10 AM
3/10/2011	10:10:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	10:19:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	10:19:44 AM	Recipe started at 10:19 AM
3/10/2011	10:19:44 AM	Helium valve closed
3/10/2011	10:19:44 AM	H2 valve closed
3/10/2011	10:19:44 AM	BCl3 valve closed
3/10/2011	10:19:44 AM	PH3 valve closed
3/10/2011	10:19:44 AM	SiCl4 pre valve closed
3/10/2011	10:19:44 AM	SiCl4 post valve closed
3/10/2011	10:19:44 AM	Main Vac valve closed
3/10/2011	10:19:44 AM	Bubbler valve closed
3/10/2011	10:19:44 AM	Bypass valve opened
3/10/2011	10:19:44 AM	Helium MFC set to  0.000000
3/10/2011	10:19:44 AM	H2 MFC set to  0.000000
3/10/2011	10:19:44 AM	BCl3 MFC set to  0.000000
3/10/2011	10:19:44 AM	PHl3 MFC set to  0.000000
3/10/2011	10:19:44 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:19:44 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:19:45 AM	Tube furnace set to 0
3/10/2011	10:19:45 AM	Helium valve closed
3/10/2011	10:19:45 AM	H2 valve closed
3/10/2011	10:19:45 AM	BCl3 valve closed
3/10/2011	10:19:45 AM	PH3 valve closed
3/10/2011	10:19:45 AM	SiCl4 pre valve closed
3/10/2011	10:19:45 AM	SiCl4 post valve closed
3/10/2011	10:19:45 AM	Bubbler valve closed
3/10/2011	10:19:45 AM	Main Vac valve opened
3/10/2011	10:19:45 AM	Bypass valve opened
3/10/2011	10:19:45 AM	Helium MFC set to  0.000000
3/10/2011	10:19:45 AM	H2 MFC set to  0.000000
3/10/2011	10:19:45 AM	BCl3 MFC set to  0.000000
3/10/2011	10:19:45 AM	PHl3 MFC set to  0.000000
3/10/2011	10:19:45 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:19:45 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:19:45 AM	Tube furnace set to 0
3/10/2011	10:20:45 AM	H2 valve closed
3/10/2011	10:20:45 AM	BCl3 valve closed
3/10/2011	10:20:45 AM	PH3 valve closed
3/10/2011	10:20:45 AM	SiCl4 pre valve closed
3/10/2011	10:20:45 AM	SiCl4 post valve closed
3/10/2011	10:20:45 AM	Bubbler valve closed
3/10/2011	10:20:45 AM	Helium valve opened
3/10/2011	10:20:45 AM	Main Vac valve opened
3/10/2011	10:20:45 AM	Bypass valve opened
3/10/2011	10:20:45 AM	Helium MFC set to  100.000000
3/10/2011	10:20:45 AM	H2 MFC set to  0.000000
3/10/2011	10:20:45 AM	BCl3 MFC set to  0.000000
3/10/2011	10:20:45 AM	PHl3 MFC set to  0.000000
3/10/2011	10:20:45 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:20:45 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:20:45 AM	Tube furnace set to 0
3/10/2011	10:21:45 AM	Helium valve closed
3/10/2011	10:21:45 AM	H2 valve closed
3/10/2011	10:21:45 AM	BCl3 valve closed
3/10/2011	10:21:45 AM	PH3 valve closed
3/10/2011	10:21:45 AM	SiCl4 pre valve closed
3/10/2011	10:21:45 AM	SiCl4 post valve closed
3/10/2011	10:21:45 AM	Bubbler valve closed
3/10/2011	10:21:45 AM	Main Vac valve opened
3/10/2011	10:21:45 AM	Bypass valve opened
3/10/2011	10:21:45 AM	Helium MFC set to  0.000000
3/10/2011	10:21:45 AM	H2 MFC set to  0.000000
3/10/2011	10:21:45 AM	BCl3 MFC set to  0.000000
3/10/2011	10:21:45 AM	PHl3 MFC set to  0.000000
3/10/2011	10:21:45 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:21:45 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:21:45 AM	Tube furnace set to 0
3/10/2011	10:22:45 AM	H2 valve closed
3/10/2011	10:22:45 AM	BCl3 valve closed
3/10/2011	10:22:45 AM	PH3 valve closed
3/10/2011	10:22:45 AM	SiCl4 pre valve closed
3/10/2011	10:22:45 AM	SiCl4 post valve closed
3/10/2011	10:22:45 AM	Bubbler valve closed
3/10/2011	10:22:45 AM	Helium valve opened
3/10/2011	10:22:45 AM	Main Vac valve opened
3/10/2011	10:22:45 AM	Bypass valve opened
3/10/2011	10:22:45 AM	Helium MFC set to  100.000000
3/10/2011	10:22:45 AM	H2 MFC set to  0.000000
3/10/2011	10:22:45 AM	BCl3 MFC set to  0.000000
3/10/2011	10:22:45 AM	PHl3 MFC set to  0.000000
3/10/2011	10:22:45 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:22:45 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:22:46 AM	Tube furnace set to 0
3/10/2011	10:23:46 AM	Helium valve closed
3/10/2011	10:23:46 AM	H2 valve closed
3/10/2011	10:23:46 AM	BCl3 valve closed
3/10/2011	10:23:46 AM	PH3 valve closed
3/10/2011	10:23:46 AM	SiCl4 pre valve closed
3/10/2011	10:23:46 AM	SiCl4 post valve closed
3/10/2011	10:23:46 AM	Bubbler valve closed
3/10/2011	10:23:46 AM	Main Vac valve opened
3/10/2011	10:23:46 AM	Bypass valve opened
3/10/2011	10:23:46 AM	Helium MFC set to  0.000000
3/10/2011	10:23:46 AM	H2 MFC set to  0.000000
3/10/2011	10:23:46 AM	BCl3 MFC set to  0.000000
3/10/2011	10:23:46 AM	PHl3 MFC set to  0.000000
3/10/2011	10:23:46 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:23:46 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:23:46 AM	Tube furnace set to 0
3/10/2011	10:24:46 AM	H2 valve closed
3/10/2011	10:24:46 AM	BCl3 valve closed
3/10/2011	10:24:46 AM	PH3 valve closed
3/10/2011	10:24:46 AM	SiCl4 pre valve closed
3/10/2011	10:24:46 AM	SiCl4 post valve closed
3/10/2011	10:24:46 AM	Bubbler valve closed
3/10/2011	10:24:46 AM	Helium valve opened
3/10/2011	10:24:46 AM	Main Vac valve opened
3/10/2011	10:24:46 AM	Bypass valve opened
3/10/2011	10:24:46 AM	Helium MFC set to  100.000000
3/10/2011	10:24:46 AM	H2 MFC set to  0.000000
3/10/2011	10:24:46 AM	BCl3 MFC set to  0.000000
3/10/2011	10:24:46 AM	PHl3 MFC set to  0.000000
3/10/2011	10:24:46 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:24:46 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:24:46 AM	Tube furnace set to 0
3/10/2011	10:25:46 AM	Helium valve closed
3/10/2011	10:25:46 AM	H2 valve closed
3/10/2011	10:25:46 AM	BCl3 valve closed
3/10/2011	10:25:46 AM	PH3 valve closed
3/10/2011	10:25:46 AM	SiCl4 pre valve closed
3/10/2011	10:25:46 AM	SiCl4 post valve closed
3/10/2011	10:25:46 AM	Bubbler valve closed
3/10/2011	10:25:46 AM	Main Vac valve opened
3/10/2011	10:25:46 AM	Bypass valve opened
3/10/2011	10:25:46 AM	Helium MFC set to  0.000000
3/10/2011	10:25:46 AM	H2 MFC set to  0.000000
3/10/2011	10:25:46 AM	BCl3 MFC set to  0.000000
3/10/2011	10:25:46 AM	PHl3 MFC set to  0.000000
3/10/2011	10:25:46 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:25:46 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:25:46 AM	Tube furnace set to 0
3/10/2011	10:26:46 AM	H2 valve closed
3/10/2011	10:26:46 AM	BCl3 valve closed
3/10/2011	10:26:46 AM	PH3 valve closed
3/10/2011	10:26:46 AM	SiCl4 pre valve closed
3/10/2011	10:26:46 AM	SiCl4 post valve closed
3/10/2011	10:26:46 AM	Bubbler valve closed
3/10/2011	10:26:46 AM	Helium valve opened
3/10/2011	10:26:46 AM	Main Vac valve opened
3/10/2011	10:26:46 AM	Bypass valve opened
3/10/2011	10:26:46 AM	Helium MFC set to  100.000000
3/10/2011	10:26:46 AM	H2 MFC set to  0.000000
3/10/2011	10:26:46 AM	BCl3 MFC set to  0.000000
3/10/2011	10:26:46 AM	PHl3 MFC set to  0.000000
3/10/2011	10:26:46 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:26:46 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:26:46 AM	Tube furnace set to 0
3/10/2011	10:27:46 AM	Helium valve closed
3/10/2011	10:27:46 AM	H2 valve closed
3/10/2011	10:27:46 AM	BCl3 valve closed
3/10/2011	10:27:46 AM	PH3 valve closed
3/10/2011	10:27:46 AM	SiCl4 pre valve closed
3/10/2011	10:27:46 AM	SiCl4 post valve closed
3/10/2011	10:27:46 AM	Bubbler valve closed
3/10/2011	10:27:46 AM	Main Vac valve opened
3/10/2011	10:27:46 AM	Bypass valve opened
3/10/2011	10:27:46 AM	Helium MFC set to  0.000000
3/10/2011	10:27:46 AM	H2 MFC set to  0.000000
3/10/2011	10:27:46 AM	BCl3 MFC set to  0.000000
3/10/2011	10:27:46 AM	PHl3 MFC set to  0.000000
3/10/2011	10:27:46 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:27:46 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:27:47 AM	Tube furnace set to 0
3/10/2011	10:28:47 AM	H2 valve closed
3/10/2011	10:28:47 AM	BCl3 valve closed
3/10/2011	10:28:47 AM	PH3 valve closed
3/10/2011	10:28:47 AM	SiCl4 pre valve closed
3/10/2011	10:28:47 AM	SiCl4 post valve closed
3/10/2011	10:28:47 AM	Bubbler valve closed
3/10/2011	10:28:47 AM	Helium valve opened
3/10/2011	10:28:47 AM	Main Vac valve opened
3/10/2011	10:28:47 AM	Bypass valve opened
3/10/2011	10:28:47 AM	Helium MFC set to  100.000000
3/10/2011	10:28:47 AM	H2 MFC set to  0.000000
3/10/2011	10:28:47 AM	BCl3 MFC set to  0.000000
3/10/2011	10:28:47 AM	PHl3 MFC set to  0.000000
3/10/2011	10:28:47 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:28:47 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:28:47 AM	Tube furnace set to 0
3/10/2011	10:29:47 AM	Helium valve closed
3/10/2011	10:29:47 AM	H2 valve closed
3/10/2011	10:29:47 AM	BCl3 valve closed
3/10/2011	10:29:47 AM	PH3 valve closed
3/10/2011	10:29:47 AM	SiCl4 pre valve closed
3/10/2011	10:29:47 AM	SiCl4 post valve closed
3/10/2011	10:29:47 AM	Bubbler valve closed
3/10/2011	10:29:47 AM	Main Vac valve opened
3/10/2011	10:29:47 AM	Bypass valve opened
3/10/2011	10:29:47 AM	Helium MFC set to  0.000000
3/10/2011	10:29:47 AM	H2 MFC set to  0.000000
3/10/2011	10:29:47 AM	BCl3 MFC set to  0.000000
3/10/2011	10:29:47 AM	PHl3 MFC set to  0.000000
3/10/2011	10:29:47 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:29:47 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:29:47 AM	Tube furnace set to 0
3/10/2011	10:30:47 AM	H2 valve closed
3/10/2011	10:30:47 AM	BCl3 valve closed
3/10/2011	10:30:47 AM	PH3 valve closed
3/10/2011	10:30:47 AM	SiCl4 pre valve closed
3/10/2011	10:30:47 AM	SiCl4 post valve closed
3/10/2011	10:30:47 AM	Bubbler valve closed
3/10/2011	10:30:47 AM	Helium valve opened
3/10/2011	10:30:47 AM	Main Vac valve opened
3/10/2011	10:30:47 AM	Bypass valve opened
3/10/2011	10:30:47 AM	Helium MFC set to  100.000000
3/10/2011	10:30:47 AM	H2 MFC set to  0.000000
3/10/2011	10:30:47 AM	BCl3 MFC set to  0.000000
3/10/2011	10:30:47 AM	PHl3 MFC set to  0.000000
3/10/2011	10:30:47 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:30:47 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:30:47 AM	Tube furnace set to 0
3/10/2011	10:31:47 AM	Helium valve closed
3/10/2011	10:31:47 AM	H2 valve closed
3/10/2011	10:31:47 AM	BCl3 valve closed
3/10/2011	10:31:47 AM	PH3 valve closed
3/10/2011	10:31:47 AM	SiCl4 pre valve closed
3/10/2011	10:31:47 AM	SiCl4 post valve closed
3/10/2011	10:31:47 AM	Bubbler valve closed
3/10/2011	10:31:47 AM	Main Vac valve opened
3/10/2011	10:31:47 AM	Bypass valve opened
3/10/2011	10:31:47 AM	Helium MFC set to  0.000000
3/10/2011	10:31:47 AM	H2 MFC set to  0.000000
3/10/2011	10:31:47 AM	BCl3 MFC set to  0.000000
3/10/2011	10:31:47 AM	PHl3 MFC set to  0.000000
3/10/2011	10:31:47 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:31:47 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:31:47 AM	Tube furnace set to 0
3/10/2011	10:32:47 AM	H2 valve closed
3/10/2011	10:32:47 AM	BCl3 valve closed
3/10/2011	10:32:47 AM	PH3 valve closed
3/10/2011	10:32:47 AM	SiCl4 pre valve closed
3/10/2011	10:32:47 AM	SiCl4 post valve closed
3/10/2011	10:32:47 AM	Bubbler valve closed
3/10/2011	10:32:47 AM	Helium valve opened
3/10/2011	10:32:47 AM	Main Vac valve opened
3/10/2011	10:32:47 AM	Bypass valve opened
3/10/2011	10:32:47 AM	Helium MFC set to  100.000000
3/10/2011	10:32:47 AM	H2 MFC set to  0.000000
3/10/2011	10:32:47 AM	BCl3 MFC set to  0.000000
3/10/2011	10:32:47 AM	PHl3 MFC set to  0.000000
3/10/2011	10:32:47 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:32:47 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:32:48 AM	Tube furnace set to 0
3/10/2011	10:33:48 AM	Helium valve closed
3/10/2011	10:33:48 AM	H2 valve closed
3/10/2011	10:33:48 AM	BCl3 valve closed
3/10/2011	10:33:48 AM	PH3 valve closed
3/10/2011	10:33:48 AM	SiCl4 pre valve closed
3/10/2011	10:33:48 AM	SiCl4 post valve closed
3/10/2011	10:33:48 AM	Bubbler valve closed
3/10/2011	10:33:48 AM	Main Vac valve opened
3/10/2011	10:33:48 AM	Bypass valve opened
3/10/2011	10:33:48 AM	Helium MFC set to  0.000000
3/10/2011	10:33:48 AM	H2 MFC set to  0.000000
3/10/2011	10:33:48 AM	BCl3 MFC set to  0.000000
3/10/2011	10:33:48 AM	PHl3 MFC set to  0.000000
3/10/2011	10:33:48 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:33:48 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:33:48 AM	Tube furnace set to 0
3/10/2011	10:34:48 AM	H2 valve closed
3/10/2011	10:34:48 AM	BCl3 valve closed
3/10/2011	10:34:48 AM	PH3 valve closed
3/10/2011	10:34:48 AM	SiCl4 pre valve closed
3/10/2011	10:34:48 AM	SiCl4 post valve closed
3/10/2011	10:34:48 AM	Bubbler valve closed
3/10/2011	10:34:48 AM	Helium valve opened
3/10/2011	10:34:48 AM	Main Vac valve opened
3/10/2011	10:34:48 AM	Bypass valve opened
3/10/2011	10:34:48 AM	Helium MFC set to  100.000000
3/10/2011	10:34:48 AM	H2 MFC set to  0.000000
3/10/2011	10:34:48 AM	BCl3 MFC set to  0.000000
3/10/2011	10:34:48 AM	PHl3 MFC set to  0.000000
3/10/2011	10:34:48 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:34:48 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:34:48 AM	Tube furnace set to 0
3/10/2011	10:35:48 AM	Helium valve closed
3/10/2011	10:35:48 AM	H2 valve closed
3/10/2011	10:35:48 AM	BCl3 valve closed
3/10/2011	10:35:48 AM	PH3 valve closed
3/10/2011	10:35:48 AM	SiCl4 pre valve closed
3/10/2011	10:35:48 AM	SiCl4 post valve closed
3/10/2011	10:35:48 AM	Bubbler valve closed
3/10/2011	10:35:48 AM	Main Vac valve opened
3/10/2011	10:35:48 AM	Bypass valve opened
3/10/2011	10:35:48 AM	Helium MFC set to  0.000000
3/10/2011	10:35:48 AM	H2 MFC set to  0.000000
3/10/2011	10:35:48 AM	BCl3 MFC set to  0.000000
3/10/2011	10:35:48 AM	PHl3 MFC set to  0.000000
3/10/2011	10:35:48 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:35:48 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:35:48 AM	Tube furnace set to 0
3/10/2011	10:36:48 AM	H2 valve closed
3/10/2011	10:36:48 AM	BCl3 valve closed
3/10/2011	10:36:48 AM	PH3 valve closed
3/10/2011	10:36:48 AM	SiCl4 pre valve closed
3/10/2011	10:36:48 AM	SiCl4 post valve closed
3/10/2011	10:36:48 AM	Bubbler valve closed
3/10/2011	10:36:48 AM	Helium valve opened
3/10/2011	10:36:48 AM	Main Vac valve opened
3/10/2011	10:36:48 AM	Bypass valve opened
3/10/2011	10:36:48 AM	Helium MFC set to  100.000000
3/10/2011	10:36:48 AM	H2 MFC set to  0.000000
3/10/2011	10:36:48 AM	BCl3 MFC set to  0.000000
3/10/2011	10:36:48 AM	PHl3 MFC set to  0.000000
3/10/2011	10:36:48 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:36:48 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:36:48 AM	Tube furnace set to 0
3/10/2011	10:37:48 AM	Helium valve closed
3/10/2011	10:37:48 AM	H2 valve closed
3/10/2011	10:37:48 AM	BCl3 valve closed
3/10/2011	10:37:48 AM	PH3 valve closed
3/10/2011	10:37:48 AM	SiCl4 pre valve closed
3/10/2011	10:37:48 AM	SiCl4 post valve closed
3/10/2011	10:37:48 AM	Bubbler valve closed
3/10/2011	10:37:48 AM	Main Vac valve opened
3/10/2011	10:37:48 AM	Bypass valve opened
3/10/2011	10:37:48 AM	Helium MFC set to  0.000000
3/10/2011	10:37:48 AM	H2 MFC set to  0.000000
3/10/2011	10:37:48 AM	BCl3 MFC set to  0.000000
3/10/2011	10:37:48 AM	PHl3 MFC set to  0.000000
3/10/2011	10:37:48 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:37:48 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:37:49 AM	Tube furnace set to 0
3/10/2011	10:38:49 AM	H2 valve closed
3/10/2011	10:38:49 AM	BCl3 valve closed
3/10/2011	10:38:49 AM	PH3 valve closed
3/10/2011	10:38:49 AM	SiCl4 pre valve closed
3/10/2011	10:38:49 AM	SiCl4 post valve closed
3/10/2011	10:38:49 AM	Bubbler valve closed
3/10/2011	10:38:49 AM	Helium valve opened
3/10/2011	10:38:49 AM	Main Vac valve opened
3/10/2011	10:38:49 AM	Bypass valve opened
3/10/2011	10:38:49 AM	Helium MFC set to  100.000000
3/10/2011	10:38:49 AM	H2 MFC set to  0.000000
3/10/2011	10:38:49 AM	BCl3 MFC set to  0.000000
3/10/2011	10:38:49 AM	PHl3 MFC set to  0.000000
3/10/2011	10:38:49 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:38:49 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:38:49 AM	Tube furnace set to 0
3/10/2011	10:39:49 AM	Helium valve closed
3/10/2011	10:39:49 AM	H2 valve closed
3/10/2011	10:39:49 AM	BCl3 valve closed
3/10/2011	10:39:49 AM	PH3 valve closed
3/10/2011	10:39:49 AM	SiCl4 pre valve closed
3/10/2011	10:39:49 AM	SiCl4 post valve closed
3/10/2011	10:39:49 AM	Bubbler valve closed
3/10/2011	10:39:49 AM	Main Vac valve opened
3/10/2011	10:39:49 AM	Bypass valve opened
3/10/2011	10:39:49 AM	Helium MFC set to  0.000000
3/10/2011	10:39:49 AM	H2 MFC set to  0.000000
3/10/2011	10:39:49 AM	BCl3 MFC set to  0.000000
3/10/2011	10:39:49 AM	PHl3 MFC set to  0.000000
3/10/2011	10:39:49 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:39:49 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:39:49 AM	Tube furnace set to 0
3/10/2011	10:39:50 AM	Run finished at 10:39 AM
3/10/2011	10:39:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	10:41:22 AM	Bypass valve closed
3/10/2011	10:41:23 AM	Main Vac valve closed
3/10/2011	10:41:32 AM	Main Vac valve opened
3/10/2011	10:41:33 AM	Bypass valve opened
3/10/2011	10:44:18 AM	Recipe started at 10:44 AM
3/10/2011	10:44:18 AM	Helium valve closed
3/10/2011	10:44:18 AM	BCl3 valve closed
3/10/2011	10:44:18 AM	PH3 valve closed
3/10/2011	10:44:18 AM	SiCl4 pre valve closed
3/10/2011	10:44:18 AM	SiCl4 post valve closed
3/10/2011	10:44:18 AM	Main Vac valve closed
3/10/2011	10:44:18 AM	Bypass valve closed
3/10/2011	10:44:18 AM	Bubbler valve closed
3/10/2011	10:44:18 AM	H2 valve opened
3/10/2011	10:44:18 AM	Helium MFC set to  0.000000
3/10/2011	10:44:18 AM	H2 MFC set to  500.000000
3/10/2011	10:44:18 AM	BCl3 MFC set to  0.000000
3/10/2011	10:44:18 AM	PHl3 MFC set to  0.000000
3/10/2011	10:44:18 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:44:18 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:44:18 AM	Tube furnace set to 0
3/10/2011	10:45:36 AM	Helium valve closed
3/10/2011	10:45:36 AM	BCl3 valve closed
3/10/2011	10:45:36 AM	PH3 valve closed
3/10/2011	10:45:36 AM	SiCl4 pre valve closed
3/10/2011	10:45:36 AM	SiCl4 post valve closed
3/10/2011	10:45:36 AM	Main Vac valve closed
3/10/2011	10:45:36 AM	Bypass valve closed
3/10/2011	10:45:36 AM	H2 valve opened
3/10/2011	10:45:36 AM	Bubbler valve opened
3/10/2011	10:45:36 AM	Helium MFC set to  0.000000
3/10/2011	10:45:36 AM	H2 MFC set to  500.000000
3/10/2011	10:45:36 AM	BCl3 MFC set to  0.000000
3/10/2011	10:45:36 AM	PHl3 MFC set to  0.000000
3/10/2011	10:45:36 AM	SiCl4 MFC set to  0.000000
3/10/2011	10:45:36 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:45:36 AM	Tube furnace set to 1000
3/10/2011	11:05:36 AM	Helium valve closed
3/10/2011	11:05:36 AM	BCl3 valve closed
3/10/2011	11:05:36 AM	Main Vac valve closed
3/10/2011	11:05:36 AM	Bypass valve closed
3/10/2011	11:05:36 AM	H2 valve opened
3/10/2011	11:05:36 AM	PH3 valve opened
3/10/2011	11:05:36 AM	SiCl4 pre valve opened
3/10/2011	11:05:36 AM	SiCl4 post valve opened
3/10/2011	11:05:36 AM	Bubbler valve opened
3/10/2011	11:05:36 AM	Helium MFC set to  0.000000
3/10/2011	11:05:36 AM	H2 MFC set to  500.000000
3/10/2011	11:05:36 AM	BCl3 MFC set to  0.000000
3/10/2011	11:05:36 AM	PHl3 MFC set to  1.000000
3/10/2011	11:05:36 AM	SiCl4 MFC set to  50.000000
3/10/2011	11:05:36 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:05:36 AM	Tube furnace set to 1000
3/10/2011	11:22:36 AM	H2 valve closed
3/10/2011	11:22:36 AM	BCl3 valve closed
3/10/2011	11:22:36 AM	PH3 valve closed
3/10/2011	11:22:36 AM	SiCl4 pre valve closed
3/10/2011	11:22:36 AM	SiCl4 post valve closed
3/10/2011	11:22:36 AM	Main Vac valve closed
3/10/2011	11:22:36 AM	Bypass valve closed
3/10/2011	11:22:36 AM	Helium valve opened
3/10/2011	11:22:36 AM	Bubbler valve opened
3/10/2011	11:22:36 AM	Helium MFC set to  500.000000
3/10/2011	11:22:36 AM	H2 MFC set to  0.000000
3/10/2011	11:22:36 AM	BCl3 MFC set to  0.000000
3/10/2011	11:22:36 AM	PHl3 MFC set to  0.000000
3/10/2011	11:22:36 AM	SiCl4 MFC set to  0.000000
3/10/2011	11:22:36 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:22:36 AM	Tube furnace set to 0
3/10/2011	11:42:36 AM	Helium valve closed
3/10/2011	11:42:36 AM	H2 valve closed
3/10/2011	11:42:36 AM	BCl3 valve closed
3/10/2011	11:42:36 AM	PH3 valve closed
3/10/2011	11:42:36 AM	SiCl4 pre valve closed
3/10/2011	11:42:36 AM	SiCl4 post valve closed
3/10/2011	11:42:36 AM	Main Vac valve closed
3/10/2011	11:42:36 AM	Bypass valve closed
3/10/2011	11:42:36 AM	Bubbler valve closed
3/10/2011	11:42:36 AM	Helium MFC set to  0.000000
3/10/2011	11:42:36 AM	H2 MFC set to  0.000000
3/10/2011	11:42:36 AM	BCl3 MFC set to  0.000000
3/10/2011	11:42:36 AM	PHl3 MFC set to  0.000000
3/10/2011	11:42:36 AM	SiCl4 MFC set to  0.000000
3/10/2011	11:42:36 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:42:37 AM	Tube furnace set to 0
3/10/2011	11:42:37 AM	Run finished at 11:42 AM
3/10/2011	11:47:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2011	11:47:27 AM	Recipe started at 11:47 AM
3/10/2011	11:47:27 AM	H2 valve closed
3/10/2011	11:47:27 AM	BCl3 valve closed
3/10/2011	11:47:27 AM	PH3 valve closed
3/10/2011	11:47:27 AM	SiCl4 pre valve closed
3/10/2011	11:47:27 AM	SiCl4 post valve closed
3/10/2011	11:47:27 AM	Main Vac valve closed
3/10/2011	11:47:27 AM	Bypass valve closed
3/10/2011	11:47:27 AM	Bubbler valve closed
3/10/2011	11:47:27 AM	Helium valve opened
3/10/2011	11:47:27 AM	Helium MFC set to  500.000000
3/10/2011	11:47:27 AM	H2 MFC set to  0.000000
3/10/2011	11:47:27 AM	BCl3 MFC set to  0.000000
3/10/2011	11:47:27 AM	PHl3 MFC set to  0.000000
3/10/2011	11:47:27 AM	SiCl4 MFC set to  0.000000
3/10/2011	11:47:27 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:47:27 AM	Tube furnace set to 0
3/10/2011	11:47:29 AM	Helium valve closed
3/10/2011	11:47:29 AM	H2 valve closed
3/10/2011	11:47:29 AM	BCl3 valve closed
3/10/2011	11:47:29 AM	PH3 valve closed
3/10/2011	11:47:29 AM	SiCl4 pre valve closed
3/10/2011	11:47:29 AM	SiCl4 post valve closed
3/10/2011	11:47:29 AM	Main Vac valve closed
3/10/2011	11:47:29 AM	Bypass valve closed
3/10/2011	11:47:29 AM	Bubbler valve closed
3/10/2011	11:47:29 AM	Helium MFC set to  0.000000
3/10/2011	11:47:29 AM	H2 MFC set to  0.000000
3/10/2011	11:47:29 AM	BCl3 MFC set to  0.000000
3/10/2011	11:47:29 AM	PHl3 MFC set to  0.000000
3/10/2011	11:47:29 AM	SiCl4 MFC set to  0.000000
3/10/2011	11:47:29 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:47:30 AM	Tube furnace set to 0
3/10/2011	11:47:30 AM	Run finished at 11:47 AM
3/10/2011	11:47:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2011	11:53:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2011	11:53:39 AM	Recipe started at 11:53 AM
3/10/2011	11:53:39 AM	Helium valve closed
3/10/2011	11:53:39 AM	H2 valve closed
3/10/2011	11:53:39 AM	BCl3 valve closed
3/10/2011	11:53:39 AM	PH3 valve closed
3/10/2011	11:53:39 AM	SiCl4 pre valve closed
3/10/2011	11:53:39 AM	SiCl4 post valve closed
3/10/2011	11:53:39 AM	Main Vac valve closed
3/10/2011	11:53:39 AM	Bubbler valve closed
3/10/2011	11:53:39 AM	Bypass valve opened
3/10/2011	11:53:39 AM	Helium MFC set to  0.000000
3/10/2011	11:53:39 AM	H2 MFC set to  0.000000
3/10/2011	11:53:39 AM	BCl3 MFC set to  0.000000
3/10/2011	11:53:39 AM	PHl3 MFC set to  0.000000
3/10/2011	11:53:39 AM	SiCl4 MFC set to  0.000000
3/10/2011	11:53:39 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:53:40 AM	Tube furnace set to 0
3/10/2011	11:54:11 AM	Helium valve closed
3/10/2011	11:54:11 AM	H2 valve closed
3/10/2011	11:54:11 AM	BCl3 valve closed
3/10/2011	11:54:11 AM	PH3 valve closed
3/10/2011	11:54:11 AM	SiCl4 pre valve closed
3/10/2011	11:54:11 AM	SiCl4 post valve closed
3/10/2011	11:54:11 AM	Bubbler valve closed
3/10/2011	11:54:11 AM	Main Vac valve opened
3/10/2011	11:54:11 AM	Bypass valve opened
3/10/2011	11:54:11 AM	Helium MFC set to  0.000000
3/10/2011	11:54:11 AM	H2 MFC set to  0.000000
3/10/2011	11:54:11 AM	BCl3 MFC set to  0.000000
3/10/2011	11:54:11 AM	PHl3 MFC set to  0.000000
3/10/2011	11:54:11 AM	SiCl4 MFC set to  0.000000
3/10/2011	11:54:11 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:54:11 AM	Tube furnace set to 0
3/10/2011	11:54:11 AM	Run finished at 11:54 AM
3/10/2011	11:54:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2011	11:54:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	11:54:49 AM	Recipe started at 11:54 AM
3/10/2011	11:54:49 AM	Helium valve closed
3/10/2011	11:54:49 AM	H2 valve closed
3/10/2011	11:54:49 AM	BCl3 valve closed
3/10/2011	11:54:49 AM	PH3 valve closed
3/10/2011	11:54:49 AM	SiCl4 pre valve closed
3/10/2011	11:54:49 AM	SiCl4 post valve closed
3/10/2011	11:54:49 AM	Main Vac valve closed
3/10/2011	11:54:49 AM	Bubbler valve closed
3/10/2011	11:54:49 AM	Bypass valve opened
3/10/2011	11:54:49 AM	Helium MFC set to  0.000000
3/10/2011	11:54:49 AM	H2 MFC set to  0.000000
3/10/2011	11:54:49 AM	BCl3 MFC set to  0.000000
3/10/2011	11:54:49 AM	PHl3 MFC set to  0.000000
3/10/2011	11:54:49 AM	SiCl4 MFC set to  0.000000
3/10/2011	11:54:49 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:54:49 AM	Tube furnace set to 0
3/10/2011	11:54:50 AM	Helium valve closed
3/10/2011	11:54:50 AM	H2 valve closed
3/10/2011	11:54:50 AM	BCl3 valve closed
3/10/2011	11:54:50 AM	PH3 valve closed
3/10/2011	11:54:50 AM	SiCl4 pre valve closed
3/10/2011	11:54:50 AM	SiCl4 post valve closed
3/10/2011	11:54:50 AM	Bubbler valve closed
3/10/2011	11:54:50 AM	Main Vac valve opened
3/10/2011	11:54:50 AM	Bypass valve opened
3/10/2011	11:54:50 AM	Helium MFC set to  0.000000
3/10/2011	11:54:50 AM	H2 MFC set to  0.000000
3/10/2011	11:54:50 AM	BCl3 MFC set to  0.000000
3/10/2011	11:54:50 AM	PHl3 MFC set to  0.000000
3/10/2011	11:54:50 AM	SiCl4 MFC set to  0.000000
3/10/2011	11:54:50 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:54:50 AM	Tube furnace set to 0
3/10/2011	11:55:50 AM	H2 valve closed
3/10/2011	11:55:50 AM	BCl3 valve closed
3/10/2011	11:55:50 AM	PH3 valve closed
3/10/2011	11:55:50 AM	SiCl4 pre valve closed
3/10/2011	11:55:50 AM	SiCl4 post valve closed
3/10/2011	11:55:50 AM	Bubbler valve closed
3/10/2011	11:55:50 AM	Helium valve opened
3/10/2011	11:55:50 AM	Main Vac valve opened
3/10/2011	11:55:50 AM	Bypass valve opened
3/10/2011	11:55:50 AM	Helium MFC set to  100.000000
3/10/2011	11:55:50 AM	H2 MFC set to  0.000000
3/10/2011	11:55:50 AM	BCl3 MFC set to  0.000000
3/10/2011	11:55:50 AM	PHl3 MFC set to  0.000000
3/10/2011	11:55:50 AM	SiCl4 MFC set to  0.000000
3/10/2011	11:55:50 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:55:50 AM	Tube furnace set to 0
3/10/2011	11:56:50 AM	Helium valve closed
3/10/2011	11:56:50 AM	H2 valve closed
3/10/2011	11:56:50 AM	BCl3 valve closed
3/10/2011	11:56:50 AM	PH3 valve closed
3/10/2011	11:56:50 AM	SiCl4 pre valve closed
3/10/2011	11:56:50 AM	SiCl4 post valve closed
3/10/2011	11:56:50 AM	Bubbler valve closed
3/10/2011	11:56:50 AM	Main Vac valve opened
3/10/2011	11:56:50 AM	Bypass valve opened
3/10/2011	11:56:50 AM	Helium MFC set to  0.000000
3/10/2011	11:56:50 AM	H2 MFC set to  0.000000
3/10/2011	11:56:50 AM	BCl3 MFC set to  0.000000
3/10/2011	11:56:50 AM	PHl3 MFC set to  0.000000
3/10/2011	11:56:50 AM	SiCl4 MFC set to  0.000000
3/10/2011	11:56:50 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:56:50 AM	Tube furnace set to 0
3/10/2011	11:57:50 AM	H2 valve closed
3/10/2011	11:57:50 AM	BCl3 valve closed
3/10/2011	11:57:50 AM	PH3 valve closed
3/10/2011	11:57:50 AM	SiCl4 pre valve closed
3/10/2011	11:57:50 AM	SiCl4 post valve closed
3/10/2011	11:57:50 AM	Bubbler valve closed
3/10/2011	11:57:50 AM	Helium valve opened
3/10/2011	11:57:50 AM	Main Vac valve opened
3/10/2011	11:57:50 AM	Bypass valve opened
3/10/2011	11:57:50 AM	Helium MFC set to  100.000000
3/10/2011	11:57:50 AM	H2 MFC set to  0.000000
3/10/2011	11:57:50 AM	BCl3 MFC set to  0.000000
3/10/2011	11:57:50 AM	PHl3 MFC set to  0.000000
3/10/2011	11:57:50 AM	SiCl4 MFC set to  0.000000
3/10/2011	11:57:50 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:57:50 AM	Tube furnace set to 0
3/10/2011	11:58:50 AM	Helium valve closed
3/10/2011	11:58:50 AM	H2 valve closed
3/10/2011	11:58:50 AM	BCl3 valve closed
3/10/2011	11:58:50 AM	PH3 valve closed
3/10/2011	11:58:50 AM	SiCl4 pre valve closed
3/10/2011	11:58:50 AM	SiCl4 post valve closed
3/10/2011	11:58:50 AM	Bubbler valve closed
3/10/2011	11:58:50 AM	Main Vac valve opened
3/10/2011	11:58:50 AM	Bypass valve opened
3/10/2011	11:58:50 AM	Helium MFC set to  0.000000
3/10/2011	11:58:50 AM	H2 MFC set to  0.000000
3/10/2011	11:58:50 AM	BCl3 MFC set to  0.000000
3/10/2011	11:58:50 AM	PHl3 MFC set to  0.000000
3/10/2011	11:58:50 AM	SiCl4 MFC set to  0.000000
3/10/2011	11:58:50 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:58:51 AM	Tube furnace set to 0
3/10/2011	11:59:51 AM	H2 valve closed
3/10/2011	11:59:51 AM	BCl3 valve closed
3/10/2011	11:59:51 AM	PH3 valve closed
3/10/2011	11:59:51 AM	SiCl4 pre valve closed
3/10/2011	11:59:51 AM	SiCl4 post valve closed
3/10/2011	11:59:51 AM	Bubbler valve closed
3/10/2011	11:59:51 AM	Helium valve opened
3/10/2011	11:59:51 AM	Main Vac valve opened
3/10/2011	11:59:51 AM	Bypass valve opened
3/10/2011	11:59:51 AM	Helium MFC set to  100.000000
3/10/2011	11:59:51 AM	H2 MFC set to  0.000000
3/10/2011	11:59:51 AM	BCl3 MFC set to  0.000000
3/10/2011	11:59:51 AM	PHl3 MFC set to  0.000000
3/10/2011	11:59:51 AM	SiCl4 MFC set to  0.000000
3/10/2011	11:59:51 AM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:59:51 AM	Tube furnace set to 0
3/10/2011	12:00:51 PM	Helium valve closed
3/10/2011	12:00:51 PM	H2 valve closed
3/10/2011	12:00:51 PM	BCl3 valve closed
3/10/2011	12:00:51 PM	PH3 valve closed
3/10/2011	12:00:51 PM	SiCl4 pre valve closed
3/10/2011	12:00:51 PM	SiCl4 post valve closed
3/10/2011	12:00:51 PM	Bubbler valve closed
3/10/2011	12:00:51 PM	Main Vac valve opened
3/10/2011	12:00:51 PM	Bypass valve opened
3/10/2011	12:00:51 PM	Helium MFC set to  0.000000
3/10/2011	12:00:51 PM	H2 MFC set to  0.000000
3/10/2011	12:00:51 PM	BCl3 MFC set to  0.000000
3/10/2011	12:00:51 PM	PHl3 MFC set to  0.000000
3/10/2011	12:00:51 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:00:51 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:00:51 PM	Tube furnace set to 0
3/10/2011	12:01:51 PM	H2 valve closed
3/10/2011	12:01:51 PM	BCl3 valve closed
3/10/2011	12:01:51 PM	PH3 valve closed
3/10/2011	12:01:51 PM	SiCl4 pre valve closed
3/10/2011	12:01:51 PM	SiCl4 post valve closed
3/10/2011	12:01:51 PM	Bubbler valve closed
3/10/2011	12:01:51 PM	Helium valve opened
3/10/2011	12:01:51 PM	Main Vac valve opened
3/10/2011	12:01:51 PM	Bypass valve opened
3/10/2011	12:01:51 PM	Helium MFC set to  100.000000
3/10/2011	12:01:51 PM	H2 MFC set to  0.000000
3/10/2011	12:01:51 PM	BCl3 MFC set to  0.000000
3/10/2011	12:01:51 PM	PHl3 MFC set to  0.000000
3/10/2011	12:01:51 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:01:51 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:01:51 PM	Tube furnace set to 0
3/10/2011	12:02:51 PM	Helium valve closed
3/10/2011	12:02:51 PM	H2 valve closed
3/10/2011	12:02:51 PM	BCl3 valve closed
3/10/2011	12:02:51 PM	PH3 valve closed
3/10/2011	12:02:51 PM	SiCl4 pre valve closed
3/10/2011	12:02:51 PM	SiCl4 post valve closed
3/10/2011	12:02:51 PM	Bubbler valve closed
3/10/2011	12:02:51 PM	Main Vac valve opened
3/10/2011	12:02:51 PM	Bypass valve opened
3/10/2011	12:02:51 PM	Helium MFC set to  0.000000
3/10/2011	12:02:51 PM	H2 MFC set to  0.000000
3/10/2011	12:02:51 PM	BCl3 MFC set to  0.000000
3/10/2011	12:02:51 PM	PHl3 MFC set to  0.000000
3/10/2011	12:02:51 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:02:51 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:02:51 PM	Tube furnace set to 0
3/10/2011	12:03:51 PM	H2 valve closed
3/10/2011	12:03:51 PM	BCl3 valve closed
3/10/2011	12:03:51 PM	PH3 valve closed
3/10/2011	12:03:51 PM	SiCl4 pre valve closed
3/10/2011	12:03:51 PM	SiCl4 post valve closed
3/10/2011	12:03:51 PM	Bubbler valve closed
3/10/2011	12:03:51 PM	Helium valve opened
3/10/2011	12:03:51 PM	Main Vac valve opened
3/10/2011	12:03:51 PM	Bypass valve opened
3/10/2011	12:03:51 PM	Helium MFC set to  100.000000
3/10/2011	12:03:51 PM	H2 MFC set to  0.000000
3/10/2011	12:03:51 PM	BCl3 MFC set to  0.000000
3/10/2011	12:03:51 PM	PHl3 MFC set to  0.000000
3/10/2011	12:03:51 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:03:51 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:03:52 PM	Tube furnace set to 0
3/10/2011	12:04:52 PM	Helium valve closed
3/10/2011	12:04:52 PM	H2 valve closed
3/10/2011	12:04:52 PM	BCl3 valve closed
3/10/2011	12:04:52 PM	PH3 valve closed
3/10/2011	12:04:52 PM	SiCl4 pre valve closed
3/10/2011	12:04:52 PM	SiCl4 post valve closed
3/10/2011	12:04:52 PM	Bubbler valve closed
3/10/2011	12:04:52 PM	Main Vac valve opened
3/10/2011	12:04:52 PM	Bypass valve opened
3/10/2011	12:04:52 PM	Helium MFC set to  0.000000
3/10/2011	12:04:52 PM	H2 MFC set to  0.000000
3/10/2011	12:04:52 PM	BCl3 MFC set to  0.000000
3/10/2011	12:04:52 PM	PHl3 MFC set to  0.000000
3/10/2011	12:04:52 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:04:52 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:04:52 PM	Tube furnace set to 0
3/10/2011	12:05:52 PM	H2 valve closed
3/10/2011	12:05:52 PM	BCl3 valve closed
3/10/2011	12:05:52 PM	PH3 valve closed
3/10/2011	12:05:52 PM	SiCl4 pre valve closed
3/10/2011	12:05:52 PM	SiCl4 post valve closed
3/10/2011	12:05:52 PM	Bubbler valve closed
3/10/2011	12:05:52 PM	Helium valve opened
3/10/2011	12:05:52 PM	Main Vac valve opened
3/10/2011	12:05:52 PM	Bypass valve opened
3/10/2011	12:05:52 PM	Helium MFC set to  100.000000
3/10/2011	12:05:52 PM	H2 MFC set to  0.000000
3/10/2011	12:05:52 PM	BCl3 MFC set to  0.000000
3/10/2011	12:05:52 PM	PHl3 MFC set to  0.000000
3/10/2011	12:05:52 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:05:52 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:05:52 PM	Tube furnace set to 0
3/10/2011	12:06:52 PM	Helium valve closed
3/10/2011	12:06:52 PM	H2 valve closed
3/10/2011	12:06:52 PM	BCl3 valve closed
3/10/2011	12:06:52 PM	PH3 valve closed
3/10/2011	12:06:52 PM	SiCl4 pre valve closed
3/10/2011	12:06:52 PM	SiCl4 post valve closed
3/10/2011	12:06:52 PM	Bubbler valve closed
3/10/2011	12:06:52 PM	Main Vac valve opened
3/10/2011	12:06:52 PM	Bypass valve opened
3/10/2011	12:06:52 PM	Helium MFC set to  0.000000
3/10/2011	12:06:52 PM	H2 MFC set to  0.000000
3/10/2011	12:06:52 PM	BCl3 MFC set to  0.000000
3/10/2011	12:06:52 PM	PHl3 MFC set to  0.000000
3/10/2011	12:06:52 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:06:52 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:06:52 PM	Tube furnace set to 0
3/10/2011	12:07:52 PM	H2 valve closed
3/10/2011	12:07:52 PM	BCl3 valve closed
3/10/2011	12:07:52 PM	PH3 valve closed
3/10/2011	12:07:52 PM	SiCl4 pre valve closed
3/10/2011	12:07:52 PM	SiCl4 post valve closed
3/10/2011	12:07:52 PM	Bubbler valve closed
3/10/2011	12:07:52 PM	Helium valve opened
3/10/2011	12:07:52 PM	Main Vac valve opened
3/10/2011	12:07:52 PM	Bypass valve opened
3/10/2011	12:07:52 PM	Helium MFC set to  100.000000
3/10/2011	12:07:52 PM	H2 MFC set to  0.000000
3/10/2011	12:07:52 PM	BCl3 MFC set to  0.000000
3/10/2011	12:07:52 PM	PHl3 MFC set to  0.000000
3/10/2011	12:07:52 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:07:52 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:07:52 PM	Tube furnace set to 0
3/10/2011	12:08:52 PM	Helium valve closed
3/10/2011	12:08:52 PM	H2 valve closed
3/10/2011	12:08:52 PM	BCl3 valve closed
3/10/2011	12:08:52 PM	PH3 valve closed
3/10/2011	12:08:52 PM	SiCl4 pre valve closed
3/10/2011	12:08:52 PM	SiCl4 post valve closed
3/10/2011	12:08:52 PM	Bubbler valve closed
3/10/2011	12:08:52 PM	Main Vac valve opened
3/10/2011	12:08:52 PM	Bypass valve opened
3/10/2011	12:08:52 PM	Helium MFC set to  0.000000
3/10/2011	12:08:52 PM	H2 MFC set to  0.000000
3/10/2011	12:08:52 PM	BCl3 MFC set to  0.000000
3/10/2011	12:08:52 PM	PHl3 MFC set to  0.000000
3/10/2011	12:08:52 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:08:52 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:08:53 PM	Tube furnace set to 0
3/10/2011	12:09:53 PM	H2 valve closed
3/10/2011	12:09:53 PM	BCl3 valve closed
3/10/2011	12:09:53 PM	PH3 valve closed
3/10/2011	12:09:53 PM	SiCl4 pre valve closed
3/10/2011	12:09:53 PM	SiCl4 post valve closed
3/10/2011	12:09:53 PM	Bubbler valve closed
3/10/2011	12:09:53 PM	Helium valve opened
3/10/2011	12:09:53 PM	Main Vac valve opened
3/10/2011	12:09:53 PM	Bypass valve opened
3/10/2011	12:09:53 PM	Helium MFC set to  100.000000
3/10/2011	12:09:53 PM	H2 MFC set to  0.000000
3/10/2011	12:09:53 PM	BCl3 MFC set to  0.000000
3/10/2011	12:09:53 PM	PHl3 MFC set to  0.000000
3/10/2011	12:09:53 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:09:53 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:09:53 PM	Tube furnace set to 0
3/10/2011	12:10:53 PM	Helium valve closed
3/10/2011	12:10:53 PM	H2 valve closed
3/10/2011	12:10:53 PM	BCl3 valve closed
3/10/2011	12:10:53 PM	PH3 valve closed
3/10/2011	12:10:53 PM	SiCl4 pre valve closed
3/10/2011	12:10:53 PM	SiCl4 post valve closed
3/10/2011	12:10:53 PM	Bubbler valve closed
3/10/2011	12:10:53 PM	Main Vac valve opened
3/10/2011	12:10:53 PM	Bypass valve opened
3/10/2011	12:10:53 PM	Helium MFC set to  0.000000
3/10/2011	12:10:53 PM	H2 MFC set to  0.000000
3/10/2011	12:10:53 PM	BCl3 MFC set to  0.000000
3/10/2011	12:10:53 PM	PHl3 MFC set to  0.000000
3/10/2011	12:10:53 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:10:53 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:10:53 PM	Tube furnace set to 0
3/10/2011	12:11:53 PM	H2 valve closed
3/10/2011	12:11:53 PM	BCl3 valve closed
3/10/2011	12:11:53 PM	PH3 valve closed
3/10/2011	12:11:53 PM	SiCl4 pre valve closed
3/10/2011	12:11:53 PM	SiCl4 post valve closed
3/10/2011	12:11:53 PM	Bubbler valve closed
3/10/2011	12:11:53 PM	Helium valve opened
3/10/2011	12:11:53 PM	Main Vac valve opened
3/10/2011	12:11:53 PM	Bypass valve opened
3/10/2011	12:11:53 PM	Helium MFC set to  100.000000
3/10/2011	12:11:53 PM	H2 MFC set to  0.000000
3/10/2011	12:11:53 PM	BCl3 MFC set to  0.000000
3/10/2011	12:11:53 PM	PHl3 MFC set to  0.000000
3/10/2011	12:11:53 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:11:53 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:11:53 PM	Tube furnace set to 0
3/10/2011	12:12:53 PM	Helium valve closed
3/10/2011	12:12:53 PM	H2 valve closed
3/10/2011	12:12:53 PM	BCl3 valve closed
3/10/2011	12:12:53 PM	PH3 valve closed
3/10/2011	12:12:53 PM	SiCl4 pre valve closed
3/10/2011	12:12:53 PM	SiCl4 post valve closed
3/10/2011	12:12:53 PM	Bubbler valve closed
3/10/2011	12:12:53 PM	Main Vac valve opened
3/10/2011	12:12:53 PM	Bypass valve opened
3/10/2011	12:12:53 PM	Helium MFC set to  0.000000
3/10/2011	12:12:53 PM	H2 MFC set to  0.000000
3/10/2011	12:12:53 PM	BCl3 MFC set to  0.000000
3/10/2011	12:12:53 PM	PHl3 MFC set to  0.000000
3/10/2011	12:12:53 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:12:53 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:12:53 PM	Tube furnace set to 0
3/10/2011	12:13:53 PM	H2 valve closed
3/10/2011	12:13:53 PM	BCl3 valve closed
3/10/2011	12:13:53 PM	PH3 valve closed
3/10/2011	12:13:53 PM	SiCl4 pre valve closed
3/10/2011	12:13:53 PM	SiCl4 post valve closed
3/10/2011	12:13:53 PM	Bubbler valve closed
3/10/2011	12:13:53 PM	Helium valve opened
3/10/2011	12:13:53 PM	Main Vac valve opened
3/10/2011	12:13:53 PM	Bypass valve opened
3/10/2011	12:13:53 PM	Helium MFC set to  100.000000
3/10/2011	12:13:53 PM	H2 MFC set to  0.000000
3/10/2011	12:13:53 PM	BCl3 MFC set to  0.000000
3/10/2011	12:13:53 PM	PHl3 MFC set to  0.000000
3/10/2011	12:13:53 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:13:53 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:13:54 PM	Tube furnace set to 0
3/10/2011	12:14:54 PM	Helium valve closed
3/10/2011	12:14:54 PM	H2 valve closed
3/10/2011	12:14:54 PM	BCl3 valve closed
3/10/2011	12:14:54 PM	PH3 valve closed
3/10/2011	12:14:54 PM	SiCl4 pre valve closed
3/10/2011	12:14:54 PM	SiCl4 post valve closed
3/10/2011	12:14:54 PM	Bubbler valve closed
3/10/2011	12:14:54 PM	Main Vac valve opened
3/10/2011	12:14:54 PM	Bypass valve opened
3/10/2011	12:14:54 PM	Helium MFC set to  0.000000
3/10/2011	12:14:54 PM	H2 MFC set to  0.000000
3/10/2011	12:14:54 PM	BCl3 MFC set to  0.000000
3/10/2011	12:14:54 PM	PHl3 MFC set to  0.000000
3/10/2011	12:14:54 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:14:54 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:14:54 PM	Tube furnace set to 0
3/10/2011	12:14:55 PM	Run finished at 12:14 PM
3/10/2011	12:14:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	12:30:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	12:31:10 PM	Recipe started at 12:31 PM
3/10/2011	12:31:10 PM	Helium valve closed
3/10/2011	12:31:10 PM	H2 valve closed
3/10/2011	12:31:10 PM	BCl3 valve closed
3/10/2011	12:31:10 PM	PH3 valve closed
3/10/2011	12:31:10 PM	SiCl4 pre valve closed
3/10/2011	12:31:10 PM	SiCl4 post valve closed
3/10/2011	12:31:10 PM	Main Vac valve closed
3/10/2011	12:31:10 PM	Bubbler valve closed
3/10/2011	12:31:10 PM	Bypass valve opened
3/10/2011	12:31:10 PM	Helium MFC set to  0.000000
3/10/2011	12:31:10 PM	H2 MFC set to  0.000000
3/10/2011	12:31:10 PM	BCl3 MFC set to  0.000000
3/10/2011	12:31:10 PM	PHl3 MFC set to  0.000000
3/10/2011	12:31:10 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:31:10 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:31:10 PM	Tube furnace set to 0
3/10/2011	12:31:10 PM	Helium valve closed
3/10/2011	12:31:10 PM	H2 valve closed
3/10/2011	12:31:10 PM	BCl3 valve closed
3/10/2011	12:31:10 PM	PH3 valve closed
3/10/2011	12:31:10 PM	SiCl4 pre valve closed
3/10/2011	12:31:10 PM	SiCl4 post valve closed
3/10/2011	12:31:10 PM	Bubbler valve closed
3/10/2011	12:31:10 PM	Main Vac valve opened
3/10/2011	12:31:10 PM	Bypass valve opened
3/10/2011	12:31:10 PM	Helium MFC set to  0.000000
3/10/2011	12:31:10 PM	H2 MFC set to  0.000000
3/10/2011	12:31:10 PM	BCl3 MFC set to  0.000000
3/10/2011	12:31:10 PM	PHl3 MFC set to  0.000000
3/10/2011	12:31:10 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:31:10 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:31:10 PM	Tube furnace set to 0
3/10/2011	12:32:10 PM	H2 valve closed
3/10/2011	12:32:10 PM	BCl3 valve closed
3/10/2011	12:32:10 PM	PH3 valve closed
3/10/2011	12:32:10 PM	SiCl4 pre valve closed
3/10/2011	12:32:10 PM	SiCl4 post valve closed
3/10/2011	12:32:10 PM	Bubbler valve closed
3/10/2011	12:32:10 PM	Helium valve opened
3/10/2011	12:32:10 PM	Main Vac valve opened
3/10/2011	12:32:10 PM	Bypass valve opened
3/10/2011	12:32:10 PM	Helium MFC set to  100.000000
3/10/2011	12:32:10 PM	H2 MFC set to  0.000000
3/10/2011	12:32:10 PM	BCl3 MFC set to  0.000000
3/10/2011	12:32:10 PM	PHl3 MFC set to  0.000000
3/10/2011	12:32:10 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:32:10 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:32:10 PM	Tube furnace set to 0
3/10/2011	12:33:10 PM	Helium valve closed
3/10/2011	12:33:10 PM	H2 valve closed
3/10/2011	12:33:10 PM	BCl3 valve closed
3/10/2011	12:33:10 PM	PH3 valve closed
3/10/2011	12:33:10 PM	SiCl4 pre valve closed
3/10/2011	12:33:10 PM	SiCl4 post valve closed
3/10/2011	12:33:10 PM	Bubbler valve closed
3/10/2011	12:33:10 PM	Main Vac valve opened
3/10/2011	12:33:10 PM	Bypass valve opened
3/10/2011	12:33:10 PM	Helium MFC set to  0.000000
3/10/2011	12:33:10 PM	H2 MFC set to  0.000000
3/10/2011	12:33:10 PM	BCl3 MFC set to  0.000000
3/10/2011	12:33:10 PM	PHl3 MFC set to  0.000000
3/10/2011	12:33:10 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:33:10 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:33:11 PM	Tube furnace set to 0
3/10/2011	12:34:11 PM	H2 valve closed
3/10/2011	12:34:11 PM	BCl3 valve closed
3/10/2011	12:34:11 PM	PH3 valve closed
3/10/2011	12:34:11 PM	SiCl4 pre valve closed
3/10/2011	12:34:11 PM	SiCl4 post valve closed
3/10/2011	12:34:11 PM	Bubbler valve closed
3/10/2011	12:34:11 PM	Helium valve opened
3/10/2011	12:34:11 PM	Main Vac valve opened
3/10/2011	12:34:11 PM	Bypass valve opened
3/10/2011	12:34:11 PM	Helium MFC set to  100.000000
3/10/2011	12:34:11 PM	H2 MFC set to  0.000000
3/10/2011	12:34:11 PM	BCl3 MFC set to  0.000000
3/10/2011	12:34:11 PM	PHl3 MFC set to  0.000000
3/10/2011	12:34:11 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:34:11 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:34:11 PM	Tube furnace set to 0
3/10/2011	12:35:11 PM	Helium valve closed
3/10/2011	12:35:11 PM	H2 valve closed
3/10/2011	12:35:11 PM	BCl3 valve closed
3/10/2011	12:35:11 PM	PH3 valve closed
3/10/2011	12:35:11 PM	SiCl4 pre valve closed
3/10/2011	12:35:11 PM	SiCl4 post valve closed
3/10/2011	12:35:11 PM	Bubbler valve closed
3/10/2011	12:35:11 PM	Main Vac valve opened
3/10/2011	12:35:11 PM	Bypass valve opened
3/10/2011	12:35:11 PM	Helium MFC set to  0.000000
3/10/2011	12:35:11 PM	H2 MFC set to  0.000000
3/10/2011	12:35:11 PM	BCl3 MFC set to  0.000000
3/10/2011	12:35:11 PM	PHl3 MFC set to  0.000000
3/10/2011	12:35:11 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:35:11 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:35:11 PM	Tube furnace set to 0
3/10/2011	12:36:11 PM	H2 valve closed
3/10/2011	12:36:11 PM	BCl3 valve closed
3/10/2011	12:36:11 PM	PH3 valve closed
3/10/2011	12:36:11 PM	SiCl4 pre valve closed
3/10/2011	12:36:11 PM	SiCl4 post valve closed
3/10/2011	12:36:11 PM	Bubbler valve closed
3/10/2011	12:36:11 PM	Helium valve opened
3/10/2011	12:36:11 PM	Main Vac valve opened
3/10/2011	12:36:11 PM	Bypass valve opened
3/10/2011	12:36:11 PM	Helium MFC set to  100.000000
3/10/2011	12:36:11 PM	H2 MFC set to  0.000000
3/10/2011	12:36:11 PM	BCl3 MFC set to  0.000000
3/10/2011	12:36:11 PM	PHl3 MFC set to  0.000000
3/10/2011	12:36:11 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:36:11 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:36:11 PM	Tube furnace set to 0
3/10/2011	12:37:11 PM	Helium valve closed
3/10/2011	12:37:11 PM	H2 valve closed
3/10/2011	12:37:11 PM	BCl3 valve closed
3/10/2011	12:37:11 PM	PH3 valve closed
3/10/2011	12:37:11 PM	SiCl4 pre valve closed
3/10/2011	12:37:11 PM	SiCl4 post valve closed
3/10/2011	12:37:11 PM	Bubbler valve closed
3/10/2011	12:37:11 PM	Main Vac valve opened
3/10/2011	12:37:11 PM	Bypass valve opened
3/10/2011	12:37:11 PM	Helium MFC set to  0.000000
3/10/2011	12:37:11 PM	H2 MFC set to  0.000000
3/10/2011	12:37:11 PM	BCl3 MFC set to  0.000000
3/10/2011	12:37:11 PM	PHl3 MFC set to  0.000000
3/10/2011	12:37:11 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:37:11 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:37:11 PM	Tube furnace set to 0
3/10/2011	12:38:11 PM	H2 valve closed
3/10/2011	12:38:11 PM	BCl3 valve closed
3/10/2011	12:38:11 PM	PH3 valve closed
3/10/2011	12:38:11 PM	SiCl4 pre valve closed
3/10/2011	12:38:11 PM	SiCl4 post valve closed
3/10/2011	12:38:11 PM	Bubbler valve closed
3/10/2011	12:38:11 PM	Helium valve opened
3/10/2011	12:38:11 PM	Main Vac valve opened
3/10/2011	12:38:11 PM	Bypass valve opened
3/10/2011	12:38:11 PM	Helium MFC set to  100.000000
3/10/2011	12:38:11 PM	H2 MFC set to  0.000000
3/10/2011	12:38:11 PM	BCl3 MFC set to  0.000000
3/10/2011	12:38:11 PM	PHl3 MFC set to  0.000000
3/10/2011	12:38:11 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:38:11 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:38:12 PM	Tube furnace set to 0
3/10/2011	12:39:12 PM	Helium valve closed
3/10/2011	12:39:12 PM	H2 valve closed
3/10/2011	12:39:12 PM	BCl3 valve closed
3/10/2011	12:39:12 PM	PH3 valve closed
3/10/2011	12:39:12 PM	SiCl4 pre valve closed
3/10/2011	12:39:12 PM	SiCl4 post valve closed
3/10/2011	12:39:12 PM	Bubbler valve closed
3/10/2011	12:39:12 PM	Main Vac valve opened
3/10/2011	12:39:12 PM	Bypass valve opened
3/10/2011	12:39:12 PM	Helium MFC set to  0.000000
3/10/2011	12:39:12 PM	H2 MFC set to  0.000000
3/10/2011	12:39:12 PM	BCl3 MFC set to  0.000000
3/10/2011	12:39:12 PM	PHl3 MFC set to  0.000000
3/10/2011	12:39:12 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:39:12 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:39:12 PM	Tube furnace set to 0
3/10/2011	12:40:12 PM	H2 valve closed
3/10/2011	12:40:12 PM	BCl3 valve closed
3/10/2011	12:40:12 PM	PH3 valve closed
3/10/2011	12:40:12 PM	SiCl4 pre valve closed
3/10/2011	12:40:12 PM	SiCl4 post valve closed
3/10/2011	12:40:12 PM	Bubbler valve closed
3/10/2011	12:40:12 PM	Helium valve opened
3/10/2011	12:40:12 PM	Main Vac valve opened
3/10/2011	12:40:12 PM	Bypass valve opened
3/10/2011	12:40:12 PM	Helium MFC set to  100.000000
3/10/2011	12:40:12 PM	H2 MFC set to  0.000000
3/10/2011	12:40:12 PM	BCl3 MFC set to  0.000000
3/10/2011	12:40:12 PM	PHl3 MFC set to  0.000000
3/10/2011	12:40:12 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:40:12 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:40:12 PM	Tube furnace set to 0
3/10/2011	12:41:12 PM	Helium valve closed
3/10/2011	12:41:12 PM	H2 valve closed
3/10/2011	12:41:12 PM	BCl3 valve closed
3/10/2011	12:41:12 PM	PH3 valve closed
3/10/2011	12:41:12 PM	SiCl4 pre valve closed
3/10/2011	12:41:12 PM	SiCl4 post valve closed
3/10/2011	12:41:12 PM	Bubbler valve closed
3/10/2011	12:41:12 PM	Main Vac valve opened
3/10/2011	12:41:12 PM	Bypass valve opened
3/10/2011	12:41:12 PM	Helium MFC set to  0.000000
3/10/2011	12:41:12 PM	H2 MFC set to  0.000000
3/10/2011	12:41:12 PM	BCl3 MFC set to  0.000000
3/10/2011	12:41:12 PM	PHl3 MFC set to  0.000000
3/10/2011	12:41:12 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:41:12 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:41:12 PM	Tube furnace set to 0
3/10/2011	12:42:12 PM	H2 valve closed
3/10/2011	12:42:12 PM	BCl3 valve closed
3/10/2011	12:42:12 PM	PH3 valve closed
3/10/2011	12:42:12 PM	SiCl4 pre valve closed
3/10/2011	12:42:12 PM	SiCl4 post valve closed
3/10/2011	12:42:12 PM	Bubbler valve closed
3/10/2011	12:42:12 PM	Helium valve opened
3/10/2011	12:42:12 PM	Main Vac valve opened
3/10/2011	12:42:12 PM	Bypass valve opened
3/10/2011	12:42:12 PM	Helium MFC set to  100.000000
3/10/2011	12:42:12 PM	H2 MFC set to  0.000000
3/10/2011	12:42:12 PM	BCl3 MFC set to  0.000000
3/10/2011	12:42:12 PM	PHl3 MFC set to  0.000000
3/10/2011	12:42:12 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:42:12 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:42:12 PM	Tube furnace set to 0
3/10/2011	12:43:12 PM	Helium valve closed
3/10/2011	12:43:12 PM	H2 valve closed
3/10/2011	12:43:12 PM	BCl3 valve closed
3/10/2011	12:43:12 PM	PH3 valve closed
3/10/2011	12:43:12 PM	SiCl4 pre valve closed
3/10/2011	12:43:12 PM	SiCl4 post valve closed
3/10/2011	12:43:12 PM	Bubbler valve closed
3/10/2011	12:43:12 PM	Main Vac valve opened
3/10/2011	12:43:12 PM	Bypass valve opened
3/10/2011	12:43:12 PM	Helium MFC set to  0.000000
3/10/2011	12:43:12 PM	H2 MFC set to  0.000000
3/10/2011	12:43:12 PM	BCl3 MFC set to  0.000000
3/10/2011	12:43:12 PM	PHl3 MFC set to  0.000000
3/10/2011	12:43:12 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:43:12 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:43:13 PM	Tube furnace set to 0
3/10/2011	12:44:13 PM	H2 valve closed
3/10/2011	12:44:13 PM	BCl3 valve closed
3/10/2011	12:44:13 PM	PH3 valve closed
3/10/2011	12:44:13 PM	SiCl4 pre valve closed
3/10/2011	12:44:13 PM	SiCl4 post valve closed
3/10/2011	12:44:13 PM	Bubbler valve closed
3/10/2011	12:44:13 PM	Helium valve opened
3/10/2011	12:44:13 PM	Main Vac valve opened
3/10/2011	12:44:13 PM	Bypass valve opened
3/10/2011	12:44:13 PM	Helium MFC set to  100.000000
3/10/2011	12:44:13 PM	H2 MFC set to  0.000000
3/10/2011	12:44:13 PM	BCl3 MFC set to  0.000000
3/10/2011	12:44:13 PM	PHl3 MFC set to  0.000000
3/10/2011	12:44:13 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:44:13 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:44:13 PM	Tube furnace set to 0
3/10/2011	12:45:13 PM	Helium valve closed
3/10/2011	12:45:13 PM	H2 valve closed
3/10/2011	12:45:13 PM	BCl3 valve closed
3/10/2011	12:45:13 PM	PH3 valve closed
3/10/2011	12:45:13 PM	SiCl4 pre valve closed
3/10/2011	12:45:13 PM	SiCl4 post valve closed
3/10/2011	12:45:13 PM	Bubbler valve closed
3/10/2011	12:45:13 PM	Main Vac valve opened
3/10/2011	12:45:13 PM	Bypass valve opened
3/10/2011	12:45:13 PM	Helium MFC set to  0.000000
3/10/2011	12:45:13 PM	H2 MFC set to  0.000000
3/10/2011	12:45:13 PM	BCl3 MFC set to  0.000000
3/10/2011	12:45:13 PM	PHl3 MFC set to  0.000000
3/10/2011	12:45:13 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:45:13 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:45:13 PM	Tube furnace set to 0
3/10/2011	12:46:13 PM	H2 valve closed
3/10/2011	12:46:13 PM	BCl3 valve closed
3/10/2011	12:46:13 PM	PH3 valve closed
3/10/2011	12:46:13 PM	SiCl4 pre valve closed
3/10/2011	12:46:13 PM	SiCl4 post valve closed
3/10/2011	12:46:13 PM	Bubbler valve closed
3/10/2011	12:46:13 PM	Helium valve opened
3/10/2011	12:46:13 PM	Main Vac valve opened
3/10/2011	12:46:13 PM	Bypass valve opened
3/10/2011	12:46:13 PM	Helium MFC set to  100.000000
3/10/2011	12:46:13 PM	H2 MFC set to  0.000000
3/10/2011	12:46:13 PM	BCl3 MFC set to  0.000000
3/10/2011	12:46:13 PM	PHl3 MFC set to  0.000000
3/10/2011	12:46:13 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:46:13 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:46:13 PM	Tube furnace set to 0
3/10/2011	12:47:13 PM	Helium valve closed
3/10/2011	12:47:13 PM	H2 valve closed
3/10/2011	12:47:13 PM	BCl3 valve closed
3/10/2011	12:47:13 PM	PH3 valve closed
3/10/2011	12:47:13 PM	SiCl4 pre valve closed
3/10/2011	12:47:13 PM	SiCl4 post valve closed
3/10/2011	12:47:13 PM	Bubbler valve closed
3/10/2011	12:47:13 PM	Main Vac valve opened
3/10/2011	12:47:13 PM	Bypass valve opened
3/10/2011	12:47:13 PM	Helium MFC set to  0.000000
3/10/2011	12:47:13 PM	H2 MFC set to  0.000000
3/10/2011	12:47:13 PM	BCl3 MFC set to  0.000000
3/10/2011	12:47:13 PM	PHl3 MFC set to  0.000000
3/10/2011	12:47:13 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:47:13 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:47:13 PM	Tube furnace set to 0
3/10/2011	12:48:13 PM	H2 valve closed
3/10/2011	12:48:13 PM	BCl3 valve closed
3/10/2011	12:48:13 PM	PH3 valve closed
3/10/2011	12:48:13 PM	SiCl4 pre valve closed
3/10/2011	12:48:13 PM	SiCl4 post valve closed
3/10/2011	12:48:13 PM	Bubbler valve closed
3/10/2011	12:48:13 PM	Helium valve opened
3/10/2011	12:48:13 PM	Main Vac valve opened
3/10/2011	12:48:13 PM	Bypass valve opened
3/10/2011	12:48:13 PM	Helium MFC set to  100.000000
3/10/2011	12:48:13 PM	H2 MFC set to  0.000000
3/10/2011	12:48:13 PM	BCl3 MFC set to  0.000000
3/10/2011	12:48:13 PM	PHl3 MFC set to  0.000000
3/10/2011	12:48:13 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:48:13 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:48:14 PM	Tube furnace set to 0
3/10/2011	12:49:14 PM	Helium valve closed
3/10/2011	12:49:14 PM	H2 valve closed
3/10/2011	12:49:14 PM	BCl3 valve closed
3/10/2011	12:49:14 PM	PH3 valve closed
3/10/2011	12:49:14 PM	SiCl4 pre valve closed
3/10/2011	12:49:14 PM	SiCl4 post valve closed
3/10/2011	12:49:14 PM	Bubbler valve closed
3/10/2011	12:49:14 PM	Main Vac valve opened
3/10/2011	12:49:14 PM	Bypass valve opened
3/10/2011	12:49:14 PM	Helium MFC set to  0.000000
3/10/2011	12:49:14 PM	H2 MFC set to  0.000000
3/10/2011	12:49:14 PM	BCl3 MFC set to  0.000000
3/10/2011	12:49:14 PM	PHl3 MFC set to  0.000000
3/10/2011	12:49:14 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:49:14 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:49:14 PM	Tube furnace set to 0
3/10/2011	12:50:14 PM	H2 valve closed
3/10/2011	12:50:14 PM	BCl3 valve closed
3/10/2011	12:50:14 PM	PH3 valve closed
3/10/2011	12:50:14 PM	SiCl4 pre valve closed
3/10/2011	12:50:14 PM	SiCl4 post valve closed
3/10/2011	12:50:14 PM	Bubbler valve closed
3/10/2011	12:50:14 PM	Helium valve opened
3/10/2011	12:50:14 PM	Main Vac valve opened
3/10/2011	12:50:14 PM	Bypass valve opened
3/10/2011	12:50:14 PM	Helium MFC set to  100.000000
3/10/2011	12:50:14 PM	H2 MFC set to  0.000000
3/10/2011	12:50:14 PM	BCl3 MFC set to  0.000000
3/10/2011	12:50:14 PM	PHl3 MFC set to  0.000000
3/10/2011	12:50:14 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:50:14 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:50:14 PM	Tube furnace set to 0
3/10/2011	12:51:14 PM	Helium valve closed
3/10/2011	12:51:14 PM	H2 valve closed
3/10/2011	12:51:14 PM	BCl3 valve closed
3/10/2011	12:51:14 PM	PH3 valve closed
3/10/2011	12:51:14 PM	SiCl4 pre valve closed
3/10/2011	12:51:14 PM	SiCl4 post valve closed
3/10/2011	12:51:14 PM	Bubbler valve closed
3/10/2011	12:51:14 PM	Main Vac valve opened
3/10/2011	12:51:14 PM	Bypass valve opened
3/10/2011	12:51:14 PM	Helium MFC set to  0.000000
3/10/2011	12:51:14 PM	H2 MFC set to  0.000000
3/10/2011	12:51:14 PM	BCl3 MFC set to  0.000000
3/10/2011	12:51:14 PM	PHl3 MFC set to  0.000000
3/10/2011	12:51:14 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:51:14 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:51:14 PM	Tube furnace set to 0
3/10/2011	12:51:15 PM	Run finished at 12:51 PM
3/10/2011	12:51:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	12:55:13 PM	Bypass valve closed
3/10/2011	12:55:13 PM	Main Vac valve closed
3/10/2011	12:55:32 PM	Main Vac valve opened
3/10/2011	12:55:33 PM	Bypass valve opened
3/10/2011	12:56:02 PM	Recipe started at 12:56 PM
3/10/2011	12:56:02 PM	Helium valve closed
3/10/2011	12:56:02 PM	BCl3 valve closed
3/10/2011	12:56:02 PM	PH3 valve closed
3/10/2011	12:56:02 PM	SiCl4 pre valve closed
3/10/2011	12:56:02 PM	SiCl4 post valve closed
3/10/2011	12:56:02 PM	Main Vac valve closed
3/10/2011	12:56:02 PM	Bypass valve closed
3/10/2011	12:56:02 PM	Bubbler valve closed
3/10/2011	12:56:02 PM	H2 valve opened
3/10/2011	12:56:02 PM	Helium MFC set to  0.000000
3/10/2011	12:56:02 PM	H2 MFC set to  500.000000
3/10/2011	12:56:02 PM	BCl3 MFC set to  0.000000
3/10/2011	12:56:02 PM	PHl3 MFC set to  0.000000
3/10/2011	12:56:02 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:56:02 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:56:02 PM	Tube furnace set to 0
3/10/2011	12:57:20 PM	Helium valve closed
3/10/2011	12:57:20 PM	BCl3 valve closed
3/10/2011	12:57:20 PM	PH3 valve closed
3/10/2011	12:57:20 PM	SiCl4 pre valve closed
3/10/2011	12:57:20 PM	SiCl4 post valve closed
3/10/2011	12:57:20 PM	Main Vac valve closed
3/10/2011	12:57:20 PM	Bypass valve closed
3/10/2011	12:57:20 PM	H2 valve opened
3/10/2011	12:57:20 PM	Bubbler valve opened
3/10/2011	12:57:20 PM	Helium MFC set to  0.000000
3/10/2011	12:57:20 PM	H2 MFC set to  500.000000
3/10/2011	12:57:20 PM	BCl3 MFC set to  0.000000
3/10/2011	12:57:20 PM	PHl3 MFC set to  0.000000
3/10/2011	12:57:20 PM	SiCl4 MFC set to  0.000000
3/10/2011	12:57:20 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	12:57:20 PM	Tube furnace set to 1000
3/10/2011	1:17:20 PM	Helium valve closed
3/10/2011	1:17:20 PM	BCl3 valve closed
3/10/2011	1:17:20 PM	Main Vac valve closed
3/10/2011	1:17:20 PM	Bypass valve closed
3/10/2011	1:17:20 PM	H2 valve opened
3/10/2011	1:17:20 PM	PH3 valve opened
3/10/2011	1:17:20 PM	SiCl4 pre valve opened
3/10/2011	1:17:20 PM	SiCl4 post valve opened
3/10/2011	1:17:20 PM	Bubbler valve opened
3/10/2011	1:17:20 PM	Helium MFC set to  0.000000
3/10/2011	1:17:20 PM	H2 MFC set to  500.000000
3/10/2011	1:17:20 PM	BCl3 MFC set to  0.000000
3/10/2011	1:17:20 PM	PHl3 MFC set to  1.000000
3/10/2011	1:17:20 PM	SiCl4 MFC set to  50.000000
3/10/2011	1:17:20 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	1:17:20 PM	Tube furnace set to 1000
3/10/2011	1:34:20 PM	H2 valve closed
3/10/2011	1:34:20 PM	BCl3 valve closed
3/10/2011	1:34:20 PM	PH3 valve closed
3/10/2011	1:34:20 PM	SiCl4 pre valve closed
3/10/2011	1:34:20 PM	SiCl4 post valve closed
3/10/2011	1:34:20 PM	Main Vac valve closed
3/10/2011	1:34:20 PM	Bypass valve closed
3/10/2011	1:34:20 PM	Helium valve opened
3/10/2011	1:34:20 PM	Bubbler valve opened
3/10/2011	1:34:20 PM	Helium MFC set to  500.000000
3/10/2011	1:34:20 PM	H2 MFC set to  0.000000
3/10/2011	1:34:20 PM	BCl3 MFC set to  0.000000
3/10/2011	1:34:20 PM	PHl3 MFC set to  0.000000
3/10/2011	1:34:20 PM	SiCl4 MFC set to  0.000000
3/10/2011	1:34:20 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	1:34:21 PM	Tube furnace set to 0
3/10/2011	1:54:21 PM	Helium valve closed
3/10/2011	1:54:21 PM	H2 valve closed
3/10/2011	1:54:21 PM	BCl3 valve closed
3/10/2011	1:54:21 PM	PH3 valve closed
3/10/2011	1:54:21 PM	SiCl4 pre valve closed
3/10/2011	1:54:21 PM	SiCl4 post valve closed
3/10/2011	1:54:21 PM	Main Vac valve closed
3/10/2011	1:54:21 PM	Bypass valve closed
3/10/2011	1:54:21 PM	Bubbler valve closed
3/10/2011	1:54:21 PM	Helium MFC set to  0.000000
3/10/2011	1:54:21 PM	H2 MFC set to  0.000000
3/10/2011	1:54:21 PM	BCl3 MFC set to  0.000000
3/10/2011	1:54:21 PM	PHl3 MFC set to  0.000000
3/10/2011	1:54:21 PM	SiCl4 MFC set to  0.000000
3/10/2011	1:54:21 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	1:54:21 PM	Tube furnace set to 0
3/10/2011	1:54:21 PM	Run finished at 1:54 PM
3/10/2011	2:25:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2011	2:25:22 PM	Recipe started at 2:25 PM
3/10/2011	2:25:22 PM	H2 valve closed
3/10/2011	2:25:22 PM	BCl3 valve closed
3/10/2011	2:25:22 PM	PH3 valve closed
3/10/2011	2:25:22 PM	SiCl4 pre valve closed
3/10/2011	2:25:22 PM	SiCl4 post valve closed
3/10/2011	2:25:22 PM	Main Vac valve closed
3/10/2011	2:25:22 PM	Bypass valve closed
3/10/2011	2:25:22 PM	Bubbler valve closed
3/10/2011	2:25:22 PM	Helium valve opened
3/10/2011	2:25:22 PM	Helium MFC set to  500.000000
3/10/2011	2:25:22 PM	H2 MFC set to  0.000000
3/10/2011	2:25:22 PM	BCl3 MFC set to  0.000000
3/10/2011	2:25:22 PM	PHl3 MFC set to  0.000000
3/10/2011	2:25:22 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:25:22 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:25:22 PM	Tube furnace set to 0
3/10/2011	2:25:25 PM	Helium valve closed
3/10/2011	2:25:25 PM	H2 valve closed
3/10/2011	2:25:25 PM	BCl3 valve closed
3/10/2011	2:25:25 PM	PH3 valve closed
3/10/2011	2:25:25 PM	SiCl4 pre valve closed
3/10/2011	2:25:25 PM	SiCl4 post valve closed
3/10/2011	2:25:25 PM	Main Vac valve closed
3/10/2011	2:25:25 PM	Bypass valve closed
3/10/2011	2:25:25 PM	Bubbler valve closed
3/10/2011	2:25:25 PM	Helium MFC set to  0.000000
3/10/2011	2:25:25 PM	H2 MFC set to  0.000000
3/10/2011	2:25:25 PM	BCl3 MFC set to  0.000000
3/10/2011	2:25:25 PM	PHl3 MFC set to  0.000000
3/10/2011	2:25:25 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:25:25 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:25:25 PM	Tube furnace set to 0
3/10/2011	2:25:26 PM	Run finished at 2:25 PM
3/10/2011	2:25:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2011	2:33:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2011	2:33:55 PM	Recipe started at 2:33 PM
3/10/2011	2:33:55 PM	Helium valve closed
3/10/2011	2:33:55 PM	H2 valve closed
3/10/2011	2:33:55 PM	BCl3 valve closed
3/10/2011	2:33:55 PM	PH3 valve closed
3/10/2011	2:33:55 PM	SiCl4 pre valve closed
3/10/2011	2:33:55 PM	SiCl4 post valve closed
3/10/2011	2:33:55 PM	Main Vac valve closed
3/10/2011	2:33:55 PM	Bubbler valve closed
3/10/2011	2:33:55 PM	Bypass valve opened
3/10/2011	2:33:55 PM	Helium MFC set to  0.000000
3/10/2011	2:33:55 PM	H2 MFC set to  0.000000
3/10/2011	2:33:55 PM	BCl3 MFC set to  0.000000
3/10/2011	2:33:55 PM	PHl3 MFC set to  0.000000
3/10/2011	2:33:55 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:33:55 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:33:55 PM	Tube furnace set to 0
3/10/2011	2:34:26 PM	Helium valve closed
3/10/2011	2:34:26 PM	H2 valve closed
3/10/2011	2:34:26 PM	BCl3 valve closed
3/10/2011	2:34:26 PM	PH3 valve closed
3/10/2011	2:34:26 PM	SiCl4 pre valve closed
3/10/2011	2:34:26 PM	SiCl4 post valve closed
3/10/2011	2:34:26 PM	Bubbler valve closed
3/10/2011	2:34:26 PM	Main Vac valve opened
3/10/2011	2:34:26 PM	Bypass valve opened
3/10/2011	2:34:26 PM	Helium MFC set to  0.000000
3/10/2011	2:34:26 PM	H2 MFC set to  0.000000
3/10/2011	2:34:26 PM	BCl3 MFC set to  0.000000
3/10/2011	2:34:26 PM	PHl3 MFC set to  0.000000
3/10/2011	2:34:26 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:34:26 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:34:26 PM	Tube furnace set to 0
3/10/2011	2:34:26 PM	Run finished at 2:34 PM
3/10/2011	2:34:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2011	2:34:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	2:34:46 PM	Recipe started at 2:34 PM
3/10/2011	2:34:46 PM	Helium valve closed
3/10/2011	2:34:46 PM	H2 valve closed
3/10/2011	2:34:46 PM	BCl3 valve closed
3/10/2011	2:34:46 PM	PH3 valve closed
3/10/2011	2:34:46 PM	SiCl4 pre valve closed
3/10/2011	2:34:46 PM	SiCl4 post valve closed
3/10/2011	2:34:46 PM	Main Vac valve closed
3/10/2011	2:34:46 PM	Bubbler valve closed
3/10/2011	2:34:46 PM	Bypass valve opened
3/10/2011	2:34:46 PM	Helium MFC set to  0.000000
3/10/2011	2:34:46 PM	H2 MFC set to  0.000000
3/10/2011	2:34:46 PM	BCl3 MFC set to  0.000000
3/10/2011	2:34:46 PM	PHl3 MFC set to  0.000000
3/10/2011	2:34:46 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:34:46 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:34:46 PM	Tube furnace set to 0
3/10/2011	2:34:46 PM	Helium valve closed
3/10/2011	2:34:46 PM	H2 valve closed
3/10/2011	2:34:46 PM	BCl3 valve closed
3/10/2011	2:34:46 PM	PH3 valve closed
3/10/2011	2:34:46 PM	SiCl4 pre valve closed
3/10/2011	2:34:46 PM	SiCl4 post valve closed
3/10/2011	2:34:46 PM	Bubbler valve closed
3/10/2011	2:34:46 PM	Main Vac valve opened
3/10/2011	2:34:46 PM	Bypass valve opened
3/10/2011	2:34:46 PM	Helium MFC set to  0.000000
3/10/2011	2:34:46 PM	H2 MFC set to  0.000000
3/10/2011	2:34:46 PM	BCl3 MFC set to  0.000000
3/10/2011	2:34:46 PM	PHl3 MFC set to  0.000000
3/10/2011	2:34:46 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:34:46 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:34:46 PM	Tube furnace set to 0
3/10/2011	2:35:46 PM	H2 valve closed
3/10/2011	2:35:46 PM	BCl3 valve closed
3/10/2011	2:35:46 PM	PH3 valve closed
3/10/2011	2:35:46 PM	SiCl4 pre valve closed
3/10/2011	2:35:46 PM	SiCl4 post valve closed
3/10/2011	2:35:46 PM	Bubbler valve closed
3/10/2011	2:35:46 PM	Helium valve opened
3/10/2011	2:35:46 PM	Main Vac valve opened
3/10/2011	2:35:46 PM	Bypass valve opened
3/10/2011	2:35:46 PM	Helium MFC set to  100.000000
3/10/2011	2:35:46 PM	H2 MFC set to  0.000000
3/10/2011	2:35:46 PM	BCl3 MFC set to  0.000000
3/10/2011	2:35:46 PM	PHl3 MFC set to  0.000000
3/10/2011	2:35:46 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:35:46 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:35:46 PM	Tube furnace set to 0
3/10/2011	2:36:46 PM	Helium valve closed
3/10/2011	2:36:46 PM	H2 valve closed
3/10/2011	2:36:46 PM	BCl3 valve closed
3/10/2011	2:36:46 PM	PH3 valve closed
3/10/2011	2:36:46 PM	SiCl4 pre valve closed
3/10/2011	2:36:46 PM	SiCl4 post valve closed
3/10/2011	2:36:46 PM	Bubbler valve closed
3/10/2011	2:36:46 PM	Main Vac valve opened
3/10/2011	2:36:46 PM	Bypass valve opened
3/10/2011	2:36:46 PM	Helium MFC set to  0.000000
3/10/2011	2:36:46 PM	H2 MFC set to  0.000000
3/10/2011	2:36:46 PM	BCl3 MFC set to  0.000000
3/10/2011	2:36:46 PM	PHl3 MFC set to  0.000000
3/10/2011	2:36:46 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:36:46 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:36:47 PM	Tube furnace set to 0
3/10/2011	2:37:47 PM	H2 valve closed
3/10/2011	2:37:47 PM	BCl3 valve closed
3/10/2011	2:37:47 PM	PH3 valve closed
3/10/2011	2:37:47 PM	SiCl4 pre valve closed
3/10/2011	2:37:47 PM	SiCl4 post valve closed
3/10/2011	2:37:47 PM	Bubbler valve closed
3/10/2011	2:37:47 PM	Helium valve opened
3/10/2011	2:37:47 PM	Main Vac valve opened
3/10/2011	2:37:47 PM	Bypass valve opened
3/10/2011	2:37:47 PM	Helium MFC set to  100.000000
3/10/2011	2:37:47 PM	H2 MFC set to  0.000000
3/10/2011	2:37:47 PM	BCl3 MFC set to  0.000000
3/10/2011	2:37:47 PM	PHl3 MFC set to  0.000000
3/10/2011	2:37:47 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:37:47 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:37:47 PM	Tube furnace set to 0
3/10/2011	2:38:47 PM	Helium valve closed
3/10/2011	2:38:47 PM	H2 valve closed
3/10/2011	2:38:47 PM	BCl3 valve closed
3/10/2011	2:38:47 PM	PH3 valve closed
3/10/2011	2:38:47 PM	SiCl4 pre valve closed
3/10/2011	2:38:47 PM	SiCl4 post valve closed
3/10/2011	2:38:47 PM	Bubbler valve closed
3/10/2011	2:38:47 PM	Main Vac valve opened
3/10/2011	2:38:47 PM	Bypass valve opened
3/10/2011	2:38:47 PM	Helium MFC set to  0.000000
3/10/2011	2:38:47 PM	H2 MFC set to  0.000000
3/10/2011	2:38:47 PM	BCl3 MFC set to  0.000000
3/10/2011	2:38:47 PM	PHl3 MFC set to  0.000000
3/10/2011	2:38:47 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:38:47 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:38:47 PM	Tube furnace set to 0
3/10/2011	2:39:47 PM	H2 valve closed
3/10/2011	2:39:47 PM	BCl3 valve closed
3/10/2011	2:39:47 PM	PH3 valve closed
3/10/2011	2:39:47 PM	SiCl4 pre valve closed
3/10/2011	2:39:47 PM	SiCl4 post valve closed
3/10/2011	2:39:47 PM	Bubbler valve closed
3/10/2011	2:39:47 PM	Helium valve opened
3/10/2011	2:39:47 PM	Main Vac valve opened
3/10/2011	2:39:47 PM	Bypass valve opened
3/10/2011	2:39:47 PM	Helium MFC set to  100.000000
3/10/2011	2:39:47 PM	H2 MFC set to  0.000000
3/10/2011	2:39:47 PM	BCl3 MFC set to  0.000000
3/10/2011	2:39:47 PM	PHl3 MFC set to  0.000000
3/10/2011	2:39:47 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:39:47 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:39:47 PM	Tube furnace set to 0
3/10/2011	2:40:47 PM	Helium valve closed
3/10/2011	2:40:47 PM	H2 valve closed
3/10/2011	2:40:47 PM	BCl3 valve closed
3/10/2011	2:40:47 PM	PH3 valve closed
3/10/2011	2:40:47 PM	SiCl4 pre valve closed
3/10/2011	2:40:47 PM	SiCl4 post valve closed
3/10/2011	2:40:47 PM	Bubbler valve closed
3/10/2011	2:40:47 PM	Main Vac valve opened
3/10/2011	2:40:47 PM	Bypass valve opened
3/10/2011	2:40:47 PM	Helium MFC set to  0.000000
3/10/2011	2:40:47 PM	H2 MFC set to  0.000000
3/10/2011	2:40:47 PM	BCl3 MFC set to  0.000000
3/10/2011	2:40:47 PM	PHl3 MFC set to  0.000000
3/10/2011	2:40:47 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:40:47 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:40:47 PM	Tube furnace set to 0
3/10/2011	2:41:47 PM	H2 valve closed
3/10/2011	2:41:47 PM	BCl3 valve closed
3/10/2011	2:41:47 PM	PH3 valve closed
3/10/2011	2:41:47 PM	SiCl4 pre valve closed
3/10/2011	2:41:47 PM	SiCl4 post valve closed
3/10/2011	2:41:47 PM	Bubbler valve closed
3/10/2011	2:41:47 PM	Helium valve opened
3/10/2011	2:41:47 PM	Main Vac valve opened
3/10/2011	2:41:47 PM	Bypass valve opened
3/10/2011	2:41:47 PM	Helium MFC set to  100.000000
3/10/2011	2:41:47 PM	H2 MFC set to  0.000000
3/10/2011	2:41:47 PM	BCl3 MFC set to  0.000000
3/10/2011	2:41:47 PM	PHl3 MFC set to  0.000000
3/10/2011	2:41:47 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:41:47 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:41:48 PM	Tube furnace set to 0
3/10/2011	2:42:48 PM	Helium valve closed
3/10/2011	2:42:48 PM	H2 valve closed
3/10/2011	2:42:48 PM	BCl3 valve closed
3/10/2011	2:42:48 PM	PH3 valve closed
3/10/2011	2:42:48 PM	SiCl4 pre valve closed
3/10/2011	2:42:48 PM	SiCl4 post valve closed
3/10/2011	2:42:48 PM	Bubbler valve closed
3/10/2011	2:42:48 PM	Main Vac valve opened
3/10/2011	2:42:48 PM	Bypass valve opened
3/10/2011	2:42:48 PM	Helium MFC set to  0.000000
3/10/2011	2:42:48 PM	H2 MFC set to  0.000000
3/10/2011	2:42:48 PM	BCl3 MFC set to  0.000000
3/10/2011	2:42:48 PM	PHl3 MFC set to  0.000000
3/10/2011	2:42:48 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:42:48 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:42:48 PM	Tube furnace set to 0
3/10/2011	2:43:48 PM	H2 valve closed
3/10/2011	2:43:48 PM	BCl3 valve closed
3/10/2011	2:43:48 PM	PH3 valve closed
3/10/2011	2:43:48 PM	SiCl4 pre valve closed
3/10/2011	2:43:48 PM	SiCl4 post valve closed
3/10/2011	2:43:48 PM	Bubbler valve closed
3/10/2011	2:43:48 PM	Helium valve opened
3/10/2011	2:43:48 PM	Main Vac valve opened
3/10/2011	2:43:48 PM	Bypass valve opened
3/10/2011	2:43:48 PM	Helium MFC set to  100.000000
3/10/2011	2:43:48 PM	H2 MFC set to  0.000000
3/10/2011	2:43:48 PM	BCl3 MFC set to  0.000000
3/10/2011	2:43:48 PM	PHl3 MFC set to  0.000000
3/10/2011	2:43:48 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:43:48 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:43:48 PM	Tube furnace set to 0
3/10/2011	2:44:48 PM	Helium valve closed
3/10/2011	2:44:48 PM	H2 valve closed
3/10/2011	2:44:48 PM	BCl3 valve closed
3/10/2011	2:44:48 PM	PH3 valve closed
3/10/2011	2:44:48 PM	SiCl4 pre valve closed
3/10/2011	2:44:48 PM	SiCl4 post valve closed
3/10/2011	2:44:48 PM	Bubbler valve closed
3/10/2011	2:44:48 PM	Main Vac valve opened
3/10/2011	2:44:48 PM	Bypass valve opened
3/10/2011	2:44:48 PM	Helium MFC set to  0.000000
3/10/2011	2:44:48 PM	H2 MFC set to  0.000000
3/10/2011	2:44:48 PM	BCl3 MFC set to  0.000000
3/10/2011	2:44:48 PM	PHl3 MFC set to  0.000000
3/10/2011	2:44:48 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:44:48 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:44:48 PM	Tube furnace set to 0
3/10/2011	2:45:48 PM	H2 valve closed
3/10/2011	2:45:48 PM	BCl3 valve closed
3/10/2011	2:45:48 PM	PH3 valve closed
3/10/2011	2:45:48 PM	SiCl4 pre valve closed
3/10/2011	2:45:48 PM	SiCl4 post valve closed
3/10/2011	2:45:48 PM	Bubbler valve closed
3/10/2011	2:45:48 PM	Helium valve opened
3/10/2011	2:45:48 PM	Main Vac valve opened
3/10/2011	2:45:48 PM	Bypass valve opened
3/10/2011	2:45:48 PM	Helium MFC set to  100.000000
3/10/2011	2:45:48 PM	H2 MFC set to  0.000000
3/10/2011	2:45:48 PM	BCl3 MFC set to  0.000000
3/10/2011	2:45:48 PM	PHl3 MFC set to  0.000000
3/10/2011	2:45:48 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:45:48 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:45:48 PM	Tube furnace set to 0
3/10/2011	2:46:48 PM	Helium valve closed
3/10/2011	2:46:48 PM	H2 valve closed
3/10/2011	2:46:48 PM	BCl3 valve closed
3/10/2011	2:46:48 PM	PH3 valve closed
3/10/2011	2:46:48 PM	SiCl4 pre valve closed
3/10/2011	2:46:48 PM	SiCl4 post valve closed
3/10/2011	2:46:48 PM	Bubbler valve closed
3/10/2011	2:46:48 PM	Main Vac valve opened
3/10/2011	2:46:48 PM	Bypass valve opened
3/10/2011	2:46:48 PM	Helium MFC set to  0.000000
3/10/2011	2:46:48 PM	H2 MFC set to  0.000000
3/10/2011	2:46:48 PM	BCl3 MFC set to  0.000000
3/10/2011	2:46:48 PM	PHl3 MFC set to  0.000000
3/10/2011	2:46:48 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:46:48 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:46:49 PM	Tube furnace set to 0
3/10/2011	2:47:49 PM	H2 valve closed
3/10/2011	2:47:49 PM	BCl3 valve closed
3/10/2011	2:47:49 PM	PH3 valve closed
3/10/2011	2:47:49 PM	SiCl4 pre valve closed
3/10/2011	2:47:49 PM	SiCl4 post valve closed
3/10/2011	2:47:49 PM	Bubbler valve closed
3/10/2011	2:47:49 PM	Helium valve opened
3/10/2011	2:47:49 PM	Main Vac valve opened
3/10/2011	2:47:49 PM	Bypass valve opened
3/10/2011	2:47:49 PM	Helium MFC set to  100.000000
3/10/2011	2:47:49 PM	H2 MFC set to  0.000000
3/10/2011	2:47:49 PM	BCl3 MFC set to  0.000000
3/10/2011	2:47:49 PM	PHl3 MFC set to  0.000000
3/10/2011	2:47:49 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:47:49 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:47:49 PM	Tube furnace set to 0
3/10/2011	2:48:49 PM	Helium valve closed
3/10/2011	2:48:49 PM	H2 valve closed
3/10/2011	2:48:49 PM	BCl3 valve closed
3/10/2011	2:48:49 PM	PH3 valve closed
3/10/2011	2:48:49 PM	SiCl4 pre valve closed
3/10/2011	2:48:49 PM	SiCl4 post valve closed
3/10/2011	2:48:49 PM	Bubbler valve closed
3/10/2011	2:48:49 PM	Main Vac valve opened
3/10/2011	2:48:49 PM	Bypass valve opened
3/10/2011	2:48:49 PM	Helium MFC set to  0.000000
3/10/2011	2:48:49 PM	H2 MFC set to  0.000000
3/10/2011	2:48:49 PM	BCl3 MFC set to  0.000000
3/10/2011	2:48:49 PM	PHl3 MFC set to  0.000000
3/10/2011	2:48:49 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:48:49 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:48:49 PM	Tube furnace set to 0
3/10/2011	2:49:49 PM	H2 valve closed
3/10/2011	2:49:49 PM	BCl3 valve closed
3/10/2011	2:49:49 PM	PH3 valve closed
3/10/2011	2:49:49 PM	SiCl4 pre valve closed
3/10/2011	2:49:49 PM	SiCl4 post valve closed
3/10/2011	2:49:49 PM	Bubbler valve closed
3/10/2011	2:49:49 PM	Helium valve opened
3/10/2011	2:49:49 PM	Main Vac valve opened
3/10/2011	2:49:49 PM	Bypass valve opened
3/10/2011	2:49:49 PM	Helium MFC set to  100.000000
3/10/2011	2:49:49 PM	H2 MFC set to  0.000000
3/10/2011	2:49:49 PM	BCl3 MFC set to  0.000000
3/10/2011	2:49:49 PM	PHl3 MFC set to  0.000000
3/10/2011	2:49:49 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:49:49 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:49:49 PM	Tube furnace set to 0
3/10/2011	2:50:49 PM	Helium valve closed
3/10/2011	2:50:49 PM	H2 valve closed
3/10/2011	2:50:49 PM	BCl3 valve closed
3/10/2011	2:50:49 PM	PH3 valve closed
3/10/2011	2:50:49 PM	SiCl4 pre valve closed
3/10/2011	2:50:49 PM	SiCl4 post valve closed
3/10/2011	2:50:49 PM	Bubbler valve closed
3/10/2011	2:50:49 PM	Main Vac valve opened
3/10/2011	2:50:49 PM	Bypass valve opened
3/10/2011	2:50:49 PM	Helium MFC set to  0.000000
3/10/2011	2:50:49 PM	H2 MFC set to  0.000000
3/10/2011	2:50:49 PM	BCl3 MFC set to  0.000000
3/10/2011	2:50:49 PM	PHl3 MFC set to  0.000000
3/10/2011	2:50:49 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:50:49 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:50:49 PM	Tube furnace set to 0
3/10/2011	2:51:49 PM	H2 valve closed
3/10/2011	2:51:49 PM	BCl3 valve closed
3/10/2011	2:51:49 PM	PH3 valve closed
3/10/2011	2:51:49 PM	SiCl4 pre valve closed
3/10/2011	2:51:49 PM	SiCl4 post valve closed
3/10/2011	2:51:49 PM	Bubbler valve closed
3/10/2011	2:51:49 PM	Helium valve opened
3/10/2011	2:51:49 PM	Main Vac valve opened
3/10/2011	2:51:49 PM	Bypass valve opened
3/10/2011	2:51:49 PM	Helium MFC set to  100.000000
3/10/2011	2:51:49 PM	H2 MFC set to  0.000000
3/10/2011	2:51:49 PM	BCl3 MFC set to  0.000000
3/10/2011	2:51:49 PM	PHl3 MFC set to  0.000000
3/10/2011	2:51:49 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:51:49 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:51:50 PM	Tube furnace set to 0
3/10/2011	2:52:50 PM	Helium valve closed
3/10/2011	2:52:50 PM	H2 valve closed
3/10/2011	2:52:50 PM	BCl3 valve closed
3/10/2011	2:52:50 PM	PH3 valve closed
3/10/2011	2:52:50 PM	SiCl4 pre valve closed
3/10/2011	2:52:50 PM	SiCl4 post valve closed
3/10/2011	2:52:50 PM	Bubbler valve closed
3/10/2011	2:52:50 PM	Main Vac valve opened
3/10/2011	2:52:50 PM	Bypass valve opened
3/10/2011	2:52:50 PM	Helium MFC set to  0.000000
3/10/2011	2:52:50 PM	H2 MFC set to  0.000000
3/10/2011	2:52:50 PM	BCl3 MFC set to  0.000000
3/10/2011	2:52:50 PM	PHl3 MFC set to  0.000000
3/10/2011	2:52:50 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:52:50 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:52:50 PM	Tube furnace set to 0
3/10/2011	2:53:50 PM	H2 valve closed
3/10/2011	2:53:50 PM	BCl3 valve closed
3/10/2011	2:53:50 PM	PH3 valve closed
3/10/2011	2:53:50 PM	SiCl4 pre valve closed
3/10/2011	2:53:50 PM	SiCl4 post valve closed
3/10/2011	2:53:50 PM	Bubbler valve closed
3/10/2011	2:53:50 PM	Helium valve opened
3/10/2011	2:53:50 PM	Main Vac valve opened
3/10/2011	2:53:50 PM	Bypass valve opened
3/10/2011	2:53:50 PM	Helium MFC set to  100.000000
3/10/2011	2:53:50 PM	H2 MFC set to  0.000000
3/10/2011	2:53:50 PM	BCl3 MFC set to  0.000000
3/10/2011	2:53:50 PM	PHl3 MFC set to  0.000000
3/10/2011	2:53:50 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:53:50 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:53:50 PM	Tube furnace set to 0
3/10/2011	2:54:50 PM	Helium valve closed
3/10/2011	2:54:50 PM	H2 valve closed
3/10/2011	2:54:50 PM	BCl3 valve closed
3/10/2011	2:54:50 PM	PH3 valve closed
3/10/2011	2:54:50 PM	SiCl4 pre valve closed
3/10/2011	2:54:50 PM	SiCl4 post valve closed
3/10/2011	2:54:50 PM	Bubbler valve closed
3/10/2011	2:54:50 PM	Main Vac valve opened
3/10/2011	2:54:50 PM	Bypass valve opened
3/10/2011	2:54:50 PM	Helium MFC set to  0.000000
3/10/2011	2:54:50 PM	H2 MFC set to  0.000000
3/10/2011	2:54:50 PM	BCl3 MFC set to  0.000000
3/10/2011	2:54:50 PM	PHl3 MFC set to  0.000000
3/10/2011	2:54:50 PM	SiCl4 MFC set to  0.000000
3/10/2011	2:54:50 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	2:54:50 PM	Tube furnace set to 0
3/10/2011	2:54:51 PM	Run finished at 2:54 PM
3/10/2011	2:54:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	3:00:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	3:01:02 PM	Recipe started at 3:00 PM
3/10/2011	3:01:02 PM	Helium valve closed
3/10/2011	3:01:02 PM	H2 valve closed
3/10/2011	3:01:02 PM	BCl3 valve closed
3/10/2011	3:01:02 PM	PH3 valve closed
3/10/2011	3:01:02 PM	SiCl4 pre valve closed
3/10/2011	3:01:02 PM	SiCl4 post valve closed
3/10/2011	3:01:02 PM	Main Vac valve closed
3/10/2011	3:01:02 PM	Bubbler valve closed
3/10/2011	3:01:02 PM	Bypass valve opened
3/10/2011	3:01:02 PM	Helium MFC set to  0.000000
3/10/2011	3:01:02 PM	H2 MFC set to  0.000000
3/10/2011	3:01:02 PM	BCl3 MFC set to  0.000000
3/10/2011	3:01:02 PM	PHl3 MFC set to  0.000000
3/10/2011	3:01:02 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:01:02 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:01:03 PM	Tube furnace set to 0
3/10/2011	3:01:03 PM	Helium valve closed
3/10/2011	3:01:03 PM	H2 valve closed
3/10/2011	3:01:03 PM	BCl3 valve closed
3/10/2011	3:01:03 PM	PH3 valve closed
3/10/2011	3:01:03 PM	SiCl4 pre valve closed
3/10/2011	3:01:03 PM	SiCl4 post valve closed
3/10/2011	3:01:03 PM	Bubbler valve closed
3/10/2011	3:01:03 PM	Main Vac valve opened
3/10/2011	3:01:03 PM	Bypass valve opened
3/10/2011	3:01:03 PM	Helium MFC set to  0.000000
3/10/2011	3:01:03 PM	H2 MFC set to  0.000000
3/10/2011	3:01:03 PM	BCl3 MFC set to  0.000000
3/10/2011	3:01:03 PM	PHl3 MFC set to  0.000000
3/10/2011	3:01:03 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:01:03 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:01:03 PM	Tube furnace set to 0
3/10/2011	3:02:03 PM	H2 valve closed
3/10/2011	3:02:03 PM	BCl3 valve closed
3/10/2011	3:02:03 PM	PH3 valve closed
3/10/2011	3:02:03 PM	SiCl4 pre valve closed
3/10/2011	3:02:03 PM	SiCl4 post valve closed
3/10/2011	3:02:03 PM	Bubbler valve closed
3/10/2011	3:02:03 PM	Helium valve opened
3/10/2011	3:02:03 PM	Main Vac valve opened
3/10/2011	3:02:03 PM	Bypass valve opened
3/10/2011	3:02:03 PM	Helium MFC set to  100.000000
3/10/2011	3:02:03 PM	H2 MFC set to  0.000000
3/10/2011	3:02:03 PM	BCl3 MFC set to  0.000000
3/10/2011	3:02:03 PM	PHl3 MFC set to  0.000000
3/10/2011	3:02:03 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:02:03 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:02:03 PM	Tube furnace set to 0
3/10/2011	3:03:03 PM	Helium valve closed
3/10/2011	3:03:03 PM	H2 valve closed
3/10/2011	3:03:03 PM	BCl3 valve closed
3/10/2011	3:03:03 PM	PH3 valve closed
3/10/2011	3:03:03 PM	SiCl4 pre valve closed
3/10/2011	3:03:03 PM	SiCl4 post valve closed
3/10/2011	3:03:03 PM	Bubbler valve closed
3/10/2011	3:03:03 PM	Main Vac valve opened
3/10/2011	3:03:03 PM	Bypass valve opened
3/10/2011	3:03:03 PM	Helium MFC set to  0.000000
3/10/2011	3:03:03 PM	H2 MFC set to  0.000000
3/10/2011	3:03:03 PM	BCl3 MFC set to  0.000000
3/10/2011	3:03:03 PM	PHl3 MFC set to  0.000000
3/10/2011	3:03:03 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:03:03 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:03:03 PM	Tube furnace set to 0
3/10/2011	3:04:03 PM	H2 valve closed
3/10/2011	3:04:03 PM	BCl3 valve closed
3/10/2011	3:04:03 PM	PH3 valve closed
3/10/2011	3:04:03 PM	SiCl4 pre valve closed
3/10/2011	3:04:03 PM	SiCl4 post valve closed
3/10/2011	3:04:03 PM	Bubbler valve closed
3/10/2011	3:04:03 PM	Helium valve opened
3/10/2011	3:04:03 PM	Main Vac valve opened
3/10/2011	3:04:03 PM	Bypass valve opened
3/10/2011	3:04:03 PM	Helium MFC set to  100.000000
3/10/2011	3:04:03 PM	H2 MFC set to  0.000000
3/10/2011	3:04:03 PM	BCl3 MFC set to  0.000000
3/10/2011	3:04:03 PM	PHl3 MFC set to  0.000000
3/10/2011	3:04:03 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:04:03 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:04:04 PM	Tube furnace set to 0
3/10/2011	3:05:04 PM	Helium valve closed
3/10/2011	3:05:04 PM	H2 valve closed
3/10/2011	3:05:04 PM	BCl3 valve closed
3/10/2011	3:05:04 PM	PH3 valve closed
3/10/2011	3:05:04 PM	SiCl4 pre valve closed
3/10/2011	3:05:04 PM	SiCl4 post valve closed
3/10/2011	3:05:04 PM	Bubbler valve closed
3/10/2011	3:05:04 PM	Main Vac valve opened
3/10/2011	3:05:04 PM	Bypass valve opened
3/10/2011	3:05:04 PM	Helium MFC set to  0.000000
3/10/2011	3:05:04 PM	H2 MFC set to  0.000000
3/10/2011	3:05:04 PM	BCl3 MFC set to  0.000000
3/10/2011	3:05:04 PM	PHl3 MFC set to  0.000000
3/10/2011	3:05:04 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:05:04 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:05:04 PM	Tube furnace set to 0
3/10/2011	3:06:04 PM	H2 valve closed
3/10/2011	3:06:04 PM	BCl3 valve closed
3/10/2011	3:06:04 PM	PH3 valve closed
3/10/2011	3:06:04 PM	SiCl4 pre valve closed
3/10/2011	3:06:04 PM	SiCl4 post valve closed
3/10/2011	3:06:04 PM	Bubbler valve closed
3/10/2011	3:06:04 PM	Helium valve opened
3/10/2011	3:06:04 PM	Main Vac valve opened
3/10/2011	3:06:04 PM	Bypass valve opened
3/10/2011	3:06:04 PM	Helium MFC set to  100.000000
3/10/2011	3:06:04 PM	H2 MFC set to  0.000000
3/10/2011	3:06:04 PM	BCl3 MFC set to  0.000000
3/10/2011	3:06:04 PM	PHl3 MFC set to  0.000000
3/10/2011	3:06:04 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:06:04 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:06:04 PM	Tube furnace set to 0
3/10/2011	3:07:04 PM	Helium valve closed
3/10/2011	3:07:04 PM	H2 valve closed
3/10/2011	3:07:04 PM	BCl3 valve closed
3/10/2011	3:07:04 PM	PH3 valve closed
3/10/2011	3:07:04 PM	SiCl4 pre valve closed
3/10/2011	3:07:04 PM	SiCl4 post valve closed
3/10/2011	3:07:04 PM	Bubbler valve closed
3/10/2011	3:07:04 PM	Main Vac valve opened
3/10/2011	3:07:04 PM	Bypass valve opened
3/10/2011	3:07:04 PM	Helium MFC set to  0.000000
3/10/2011	3:07:04 PM	H2 MFC set to  0.000000
3/10/2011	3:07:04 PM	BCl3 MFC set to  0.000000
3/10/2011	3:07:04 PM	PHl3 MFC set to  0.000000
3/10/2011	3:07:04 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:07:04 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:07:04 PM	Tube furnace set to 0
3/10/2011	3:08:04 PM	H2 valve closed
3/10/2011	3:08:04 PM	BCl3 valve closed
3/10/2011	3:08:04 PM	PH3 valve closed
3/10/2011	3:08:04 PM	SiCl4 pre valve closed
3/10/2011	3:08:04 PM	SiCl4 post valve closed
3/10/2011	3:08:04 PM	Bubbler valve closed
3/10/2011	3:08:04 PM	Helium valve opened
3/10/2011	3:08:04 PM	Main Vac valve opened
3/10/2011	3:08:04 PM	Bypass valve opened
3/10/2011	3:08:04 PM	Helium MFC set to  100.000000
3/10/2011	3:08:04 PM	H2 MFC set to  0.000000
3/10/2011	3:08:04 PM	BCl3 MFC set to  0.000000
3/10/2011	3:08:04 PM	PHl3 MFC set to  0.000000
3/10/2011	3:08:04 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:08:04 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:08:04 PM	Tube furnace set to 0
3/10/2011	3:09:04 PM	Helium valve closed
3/10/2011	3:09:04 PM	H2 valve closed
3/10/2011	3:09:04 PM	BCl3 valve closed
3/10/2011	3:09:04 PM	PH3 valve closed
3/10/2011	3:09:04 PM	SiCl4 pre valve closed
3/10/2011	3:09:04 PM	SiCl4 post valve closed
3/10/2011	3:09:04 PM	Bubbler valve closed
3/10/2011	3:09:04 PM	Main Vac valve opened
3/10/2011	3:09:04 PM	Bypass valve opened
3/10/2011	3:09:04 PM	Helium MFC set to  0.000000
3/10/2011	3:09:04 PM	H2 MFC set to  0.000000
3/10/2011	3:09:04 PM	BCl3 MFC set to  0.000000
3/10/2011	3:09:04 PM	PHl3 MFC set to  0.000000
3/10/2011	3:09:04 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:09:04 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:09:05 PM	Tube furnace set to 0
3/10/2011	3:10:05 PM	H2 valve closed
3/10/2011	3:10:05 PM	BCl3 valve closed
3/10/2011	3:10:05 PM	PH3 valve closed
3/10/2011	3:10:05 PM	SiCl4 pre valve closed
3/10/2011	3:10:05 PM	SiCl4 post valve closed
3/10/2011	3:10:05 PM	Bubbler valve closed
3/10/2011	3:10:05 PM	Helium valve opened
3/10/2011	3:10:05 PM	Main Vac valve opened
3/10/2011	3:10:05 PM	Bypass valve opened
3/10/2011	3:10:05 PM	Helium MFC set to  100.000000
3/10/2011	3:10:05 PM	H2 MFC set to  0.000000
3/10/2011	3:10:05 PM	BCl3 MFC set to  0.000000
3/10/2011	3:10:05 PM	PHl3 MFC set to  0.000000
3/10/2011	3:10:05 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:10:05 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:10:05 PM	Tube furnace set to 0
3/10/2011	3:11:05 PM	Helium valve closed
3/10/2011	3:11:05 PM	H2 valve closed
3/10/2011	3:11:05 PM	BCl3 valve closed
3/10/2011	3:11:05 PM	PH3 valve closed
3/10/2011	3:11:05 PM	SiCl4 pre valve closed
3/10/2011	3:11:05 PM	SiCl4 post valve closed
3/10/2011	3:11:05 PM	Bubbler valve closed
3/10/2011	3:11:05 PM	Main Vac valve opened
3/10/2011	3:11:05 PM	Bypass valve opened
3/10/2011	3:11:05 PM	Helium MFC set to  0.000000
3/10/2011	3:11:05 PM	H2 MFC set to  0.000000
3/10/2011	3:11:05 PM	BCl3 MFC set to  0.000000
3/10/2011	3:11:05 PM	PHl3 MFC set to  0.000000
3/10/2011	3:11:05 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:11:05 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:11:05 PM	Tube furnace set to 0
3/10/2011	3:12:05 PM	H2 valve closed
3/10/2011	3:12:05 PM	BCl3 valve closed
3/10/2011	3:12:05 PM	PH3 valve closed
3/10/2011	3:12:05 PM	SiCl4 pre valve closed
3/10/2011	3:12:05 PM	SiCl4 post valve closed
3/10/2011	3:12:05 PM	Bubbler valve closed
3/10/2011	3:12:05 PM	Helium valve opened
3/10/2011	3:12:05 PM	Main Vac valve opened
3/10/2011	3:12:05 PM	Bypass valve opened
3/10/2011	3:12:05 PM	Helium MFC set to  100.000000
3/10/2011	3:12:05 PM	H2 MFC set to  0.000000
3/10/2011	3:12:05 PM	BCl3 MFC set to  0.000000
3/10/2011	3:12:05 PM	PHl3 MFC set to  0.000000
3/10/2011	3:12:05 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:12:05 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:12:05 PM	Tube furnace set to 0
3/10/2011	3:13:05 PM	Helium valve closed
3/10/2011	3:13:05 PM	H2 valve closed
3/10/2011	3:13:05 PM	BCl3 valve closed
3/10/2011	3:13:05 PM	PH3 valve closed
3/10/2011	3:13:05 PM	SiCl4 pre valve closed
3/10/2011	3:13:05 PM	SiCl4 post valve closed
3/10/2011	3:13:05 PM	Bubbler valve closed
3/10/2011	3:13:05 PM	Main Vac valve opened
3/10/2011	3:13:05 PM	Bypass valve opened
3/10/2011	3:13:05 PM	Helium MFC set to  0.000000
3/10/2011	3:13:05 PM	H2 MFC set to  0.000000
3/10/2011	3:13:05 PM	BCl3 MFC set to  0.000000
3/10/2011	3:13:05 PM	PHl3 MFC set to  0.000000
3/10/2011	3:13:05 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:13:05 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:13:05 PM	Tube furnace set to 0
3/10/2011	3:14:05 PM	H2 valve closed
3/10/2011	3:14:05 PM	BCl3 valve closed
3/10/2011	3:14:05 PM	PH3 valve closed
3/10/2011	3:14:05 PM	SiCl4 pre valve closed
3/10/2011	3:14:05 PM	SiCl4 post valve closed
3/10/2011	3:14:05 PM	Bubbler valve closed
3/10/2011	3:14:05 PM	Helium valve opened
3/10/2011	3:14:05 PM	Main Vac valve opened
3/10/2011	3:14:05 PM	Bypass valve opened
3/10/2011	3:14:05 PM	Helium MFC set to  100.000000
3/10/2011	3:14:05 PM	H2 MFC set to  0.000000
3/10/2011	3:14:05 PM	BCl3 MFC set to  0.000000
3/10/2011	3:14:05 PM	PHl3 MFC set to  0.000000
3/10/2011	3:14:05 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:14:05 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:14:06 PM	Tube furnace set to 0
3/10/2011	3:15:06 PM	Helium valve closed
3/10/2011	3:15:06 PM	H2 valve closed
3/10/2011	3:15:06 PM	BCl3 valve closed
3/10/2011	3:15:06 PM	PH3 valve closed
3/10/2011	3:15:06 PM	SiCl4 pre valve closed
3/10/2011	3:15:06 PM	SiCl4 post valve closed
3/10/2011	3:15:06 PM	Bubbler valve closed
3/10/2011	3:15:06 PM	Main Vac valve opened
3/10/2011	3:15:06 PM	Bypass valve opened
3/10/2011	3:15:06 PM	Helium MFC set to  0.000000
3/10/2011	3:15:06 PM	H2 MFC set to  0.000000
3/10/2011	3:15:06 PM	BCl3 MFC set to  0.000000
3/10/2011	3:15:06 PM	PHl3 MFC set to  0.000000
3/10/2011	3:15:06 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:15:06 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:15:06 PM	Tube furnace set to 0
3/10/2011	3:16:06 PM	H2 valve closed
3/10/2011	3:16:06 PM	BCl3 valve closed
3/10/2011	3:16:06 PM	PH3 valve closed
3/10/2011	3:16:06 PM	SiCl4 pre valve closed
3/10/2011	3:16:06 PM	SiCl4 post valve closed
3/10/2011	3:16:06 PM	Bubbler valve closed
3/10/2011	3:16:06 PM	Helium valve opened
3/10/2011	3:16:06 PM	Main Vac valve opened
3/10/2011	3:16:06 PM	Bypass valve opened
3/10/2011	3:16:06 PM	Helium MFC set to  100.000000
3/10/2011	3:16:06 PM	H2 MFC set to  0.000000
3/10/2011	3:16:06 PM	BCl3 MFC set to  0.000000
3/10/2011	3:16:06 PM	PHl3 MFC set to  0.000000
3/10/2011	3:16:06 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:16:06 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:16:06 PM	Tube furnace set to 0
3/10/2011	3:17:06 PM	Helium valve closed
3/10/2011	3:17:06 PM	H2 valve closed
3/10/2011	3:17:06 PM	BCl3 valve closed
3/10/2011	3:17:06 PM	PH3 valve closed
3/10/2011	3:17:06 PM	SiCl4 pre valve closed
3/10/2011	3:17:06 PM	SiCl4 post valve closed
3/10/2011	3:17:06 PM	Bubbler valve closed
3/10/2011	3:17:06 PM	Main Vac valve opened
3/10/2011	3:17:06 PM	Bypass valve opened
3/10/2011	3:17:06 PM	Helium MFC set to  0.000000
3/10/2011	3:17:06 PM	H2 MFC set to  0.000000
3/10/2011	3:17:06 PM	BCl3 MFC set to  0.000000
3/10/2011	3:17:06 PM	PHl3 MFC set to  0.000000
3/10/2011	3:17:06 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:17:06 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:17:06 PM	Tube furnace set to 0
3/10/2011	3:18:06 PM	H2 valve closed
3/10/2011	3:18:06 PM	BCl3 valve closed
3/10/2011	3:18:06 PM	PH3 valve closed
3/10/2011	3:18:06 PM	SiCl4 pre valve closed
3/10/2011	3:18:06 PM	SiCl4 post valve closed
3/10/2011	3:18:06 PM	Bubbler valve closed
3/10/2011	3:18:06 PM	Helium valve opened
3/10/2011	3:18:06 PM	Main Vac valve opened
3/10/2011	3:18:06 PM	Bypass valve opened
3/10/2011	3:18:06 PM	Helium MFC set to  100.000000
3/10/2011	3:18:06 PM	H2 MFC set to  0.000000
3/10/2011	3:18:06 PM	BCl3 MFC set to  0.000000
3/10/2011	3:18:06 PM	PHl3 MFC set to  0.000000
3/10/2011	3:18:06 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:18:06 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:18:06 PM	Tube furnace set to 0
3/10/2011	3:19:06 PM	Helium valve closed
3/10/2011	3:19:06 PM	H2 valve closed
3/10/2011	3:19:06 PM	BCl3 valve closed
3/10/2011	3:19:06 PM	PH3 valve closed
3/10/2011	3:19:06 PM	SiCl4 pre valve closed
3/10/2011	3:19:06 PM	SiCl4 post valve closed
3/10/2011	3:19:06 PM	Bubbler valve closed
3/10/2011	3:19:06 PM	Main Vac valve opened
3/10/2011	3:19:06 PM	Bypass valve opened
3/10/2011	3:19:06 PM	Helium MFC set to  0.000000
3/10/2011	3:19:06 PM	H2 MFC set to  0.000000
3/10/2011	3:19:06 PM	BCl3 MFC set to  0.000000
3/10/2011	3:19:06 PM	PHl3 MFC set to  0.000000
3/10/2011	3:19:06 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:19:06 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:19:07 PM	Tube furnace set to 0
3/10/2011	3:20:07 PM	H2 valve closed
3/10/2011	3:20:07 PM	BCl3 valve closed
3/10/2011	3:20:07 PM	PH3 valve closed
3/10/2011	3:20:07 PM	SiCl4 pre valve closed
3/10/2011	3:20:07 PM	SiCl4 post valve closed
3/10/2011	3:20:07 PM	Bubbler valve closed
3/10/2011	3:20:07 PM	Helium valve opened
3/10/2011	3:20:07 PM	Main Vac valve opened
3/10/2011	3:20:07 PM	Bypass valve opened
3/10/2011	3:20:07 PM	Helium MFC set to  100.000000
3/10/2011	3:20:07 PM	H2 MFC set to  0.000000
3/10/2011	3:20:07 PM	BCl3 MFC set to  0.000000
3/10/2011	3:20:07 PM	PHl3 MFC set to  0.000000
3/10/2011	3:20:07 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:20:07 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:20:07 PM	Tube furnace set to 0
3/10/2011	3:20:37 PM	Helium valve closed
3/10/2011	3:20:37 PM	H2 valve closed
3/10/2011	3:20:37 PM	BCl3 valve closed
3/10/2011	3:20:37 PM	PH3 valve closed
3/10/2011	3:20:37 PM	SiCl4 pre valve closed
3/10/2011	3:20:37 PM	SiCl4 post valve closed
3/10/2011	3:20:37 PM	Bubbler valve closed
3/10/2011	3:20:37 PM	Main Vac valve opened
3/10/2011	3:20:37 PM	Bypass valve opened
3/10/2011	3:20:37 PM	Helium MFC set to  0.000000
3/10/2011	3:20:37 PM	H2 MFC set to  0.000000
3/10/2011	3:20:37 PM	BCl3 MFC set to  0.000000
3/10/2011	3:20:37 PM	PHl3 MFC set to  0.000000
3/10/2011	3:20:37 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:20:37 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:20:37 PM	Tube furnace set to 0
3/10/2011	3:20:38 PM	Run finished at 3:20 PM
3/10/2011	3:20:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	3:21:58 PM	Bypass valve closed
3/10/2011	3:21:59 PM	Main Vac valve closed
3/10/2011	3:22:18 PM	Bypass valve opened
3/10/2011	3:22:18 PM	Main Vac valve opened
3/10/2011	3:22:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	3:22:54 PM	Recipe started at 3:22 PM
3/10/2011	3:22:54 PM	Helium valve closed
3/10/2011	3:22:54 PM	H2 valve closed
3/10/2011	3:22:54 PM	BCl3 valve closed
3/10/2011	3:22:54 PM	PH3 valve closed
3/10/2011	3:22:54 PM	SiCl4 pre valve closed
3/10/2011	3:22:54 PM	SiCl4 post valve closed
3/10/2011	3:22:54 PM	Main Vac valve closed
3/10/2011	3:22:54 PM	Bubbler valve closed
3/10/2011	3:22:54 PM	Bypass valve opened
3/10/2011	3:22:54 PM	Helium MFC set to  0.000000
3/10/2011	3:22:54 PM	H2 MFC set to  0.000000
3/10/2011	3:22:54 PM	BCl3 MFC set to  0.000000
3/10/2011	3:22:54 PM	PHl3 MFC set to  0.000000
3/10/2011	3:22:54 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:22:54 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:22:54 PM	Tube furnace set to 0
3/10/2011	3:22:54 PM	Helium valve closed
3/10/2011	3:22:54 PM	H2 valve closed
3/10/2011	3:22:54 PM	BCl3 valve closed
3/10/2011	3:22:54 PM	PH3 valve closed
3/10/2011	3:22:54 PM	SiCl4 pre valve closed
3/10/2011	3:22:54 PM	SiCl4 post valve closed
3/10/2011	3:22:54 PM	Bubbler valve closed
3/10/2011	3:22:54 PM	Main Vac valve opened
3/10/2011	3:22:54 PM	Bypass valve opened
3/10/2011	3:22:54 PM	Helium MFC set to  0.000000
3/10/2011	3:22:54 PM	H2 MFC set to  0.000000
3/10/2011	3:22:54 PM	BCl3 MFC set to  0.000000
3/10/2011	3:22:54 PM	PHl3 MFC set to  0.000000
3/10/2011	3:22:54 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:22:54 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:22:55 PM	Tube furnace set to 0
3/10/2011	3:23:03 PM	H2 valve closed
3/10/2011	3:23:03 PM	BCl3 valve closed
3/10/2011	3:23:03 PM	PH3 valve closed
3/10/2011	3:23:03 PM	SiCl4 pre valve closed
3/10/2011	3:23:03 PM	SiCl4 post valve closed
3/10/2011	3:23:03 PM	Bubbler valve closed
3/10/2011	3:23:03 PM	Helium valve opened
3/10/2011	3:23:03 PM	Main Vac valve opened
3/10/2011	3:23:03 PM	Bypass valve opened
3/10/2011	3:23:03 PM	Helium MFC set to  100.000000
3/10/2011	3:23:03 PM	H2 MFC set to  0.000000
3/10/2011	3:23:03 PM	BCl3 MFC set to  0.000000
3/10/2011	3:23:03 PM	PHl3 MFC set to  0.000000
3/10/2011	3:23:03 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:23:03 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:23:03 PM	Tube furnace set to 0
3/10/2011	3:23:03 PM	Helium valve closed
3/10/2011	3:23:03 PM	H2 valve closed
3/10/2011	3:23:03 PM	BCl3 valve closed
3/10/2011	3:23:03 PM	PH3 valve closed
3/10/2011	3:23:03 PM	SiCl4 pre valve closed
3/10/2011	3:23:03 PM	SiCl4 post valve closed
3/10/2011	3:23:03 PM	Bubbler valve closed
3/10/2011	3:23:03 PM	Main Vac valve opened
3/10/2011	3:23:03 PM	Bypass valve opened
3/10/2011	3:23:03 PM	Helium MFC set to  0.000000
3/10/2011	3:23:03 PM	H2 MFC set to  0.000000
3/10/2011	3:23:03 PM	BCl3 MFC set to  0.000000
3/10/2011	3:23:03 PM	PHl3 MFC set to  0.000000
3/10/2011	3:23:03 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:23:03 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:23:03 PM	Tube furnace set to 0
3/10/2011	3:23:05 PM	H2 valve closed
3/10/2011	3:23:05 PM	BCl3 valve closed
3/10/2011	3:23:05 PM	PH3 valve closed
3/10/2011	3:23:05 PM	SiCl4 pre valve closed
3/10/2011	3:23:05 PM	SiCl4 post valve closed
3/10/2011	3:23:05 PM	Bubbler valve closed
3/10/2011	3:23:05 PM	Helium valve opened
3/10/2011	3:23:05 PM	Main Vac valve opened
3/10/2011	3:23:05 PM	Bypass valve opened
3/10/2011	3:23:05 PM	Helium MFC set to  100.000000
3/10/2011	3:23:05 PM	H2 MFC set to  0.000000
3/10/2011	3:23:05 PM	BCl3 MFC set to  0.000000
3/10/2011	3:23:05 PM	PHl3 MFC set to  0.000000
3/10/2011	3:23:05 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:23:05 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:23:05 PM	Tube furnace set to 0
3/10/2011	3:23:05 PM	Helium valve closed
3/10/2011	3:23:05 PM	H2 valve closed
3/10/2011	3:23:05 PM	BCl3 valve closed
3/10/2011	3:23:05 PM	PH3 valve closed
3/10/2011	3:23:05 PM	SiCl4 pre valve closed
3/10/2011	3:23:05 PM	SiCl4 post valve closed
3/10/2011	3:23:05 PM	Bubbler valve closed
3/10/2011	3:23:05 PM	Main Vac valve opened
3/10/2011	3:23:05 PM	Bypass valve opened
3/10/2011	3:23:05 PM	Helium MFC set to  0.000000
3/10/2011	3:23:05 PM	H2 MFC set to  0.000000
3/10/2011	3:23:05 PM	BCl3 MFC set to  0.000000
3/10/2011	3:23:05 PM	PHl3 MFC set to  0.000000
3/10/2011	3:23:05 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:23:05 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:23:05 PM	Tube furnace set to 0
3/10/2011	3:23:08 PM	H2 valve closed
3/10/2011	3:23:08 PM	BCl3 valve closed
3/10/2011	3:23:08 PM	PH3 valve closed
3/10/2011	3:23:08 PM	SiCl4 pre valve closed
3/10/2011	3:23:08 PM	SiCl4 post valve closed
3/10/2011	3:23:08 PM	Bubbler valve closed
3/10/2011	3:23:08 PM	Helium valve opened
3/10/2011	3:23:08 PM	Main Vac valve opened
3/10/2011	3:23:08 PM	Bypass valve opened
3/10/2011	3:23:08 PM	Helium MFC set to  100.000000
3/10/2011	3:23:08 PM	H2 MFC set to  0.000000
3/10/2011	3:23:08 PM	BCl3 MFC set to  0.000000
3/10/2011	3:23:08 PM	PHl3 MFC set to  0.000000
3/10/2011	3:23:08 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:23:08 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:23:08 PM	Tube furnace set to 0
3/10/2011	3:23:09 PM	Helium valve closed
3/10/2011	3:23:09 PM	H2 valve closed
3/10/2011	3:23:09 PM	BCl3 valve closed
3/10/2011	3:23:09 PM	PH3 valve closed
3/10/2011	3:23:09 PM	SiCl4 pre valve closed
3/10/2011	3:23:09 PM	SiCl4 post valve closed
3/10/2011	3:23:09 PM	Bubbler valve closed
3/10/2011	3:23:09 PM	Main Vac valve opened
3/10/2011	3:23:09 PM	Bypass valve opened
3/10/2011	3:23:09 PM	Helium MFC set to  0.000000
3/10/2011	3:23:09 PM	H2 MFC set to  0.000000
3/10/2011	3:23:09 PM	BCl3 MFC set to  0.000000
3/10/2011	3:23:09 PM	PHl3 MFC set to  0.000000
3/10/2011	3:23:09 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:23:09 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:23:09 PM	Tube furnace set to 0
3/10/2011	3:23:12 PM	H2 valve closed
3/10/2011	3:23:12 PM	BCl3 valve closed
3/10/2011	3:23:12 PM	PH3 valve closed
3/10/2011	3:23:12 PM	SiCl4 pre valve closed
3/10/2011	3:23:12 PM	SiCl4 post valve closed
3/10/2011	3:23:12 PM	Bubbler valve closed
3/10/2011	3:23:12 PM	Helium valve opened
3/10/2011	3:23:12 PM	Main Vac valve opened
3/10/2011	3:23:12 PM	Bypass valve opened
3/10/2011	3:23:12 PM	Helium MFC set to  100.000000
3/10/2011	3:23:12 PM	H2 MFC set to  0.000000
3/10/2011	3:23:12 PM	BCl3 MFC set to  0.000000
3/10/2011	3:23:12 PM	PHl3 MFC set to  0.000000
3/10/2011	3:23:12 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:23:12 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:23:12 PM	Tube furnace set to 0
3/10/2011	3:23:12 PM	Helium valve closed
3/10/2011	3:23:12 PM	H2 valve closed
3/10/2011	3:23:12 PM	BCl3 valve closed
3/10/2011	3:23:12 PM	PH3 valve closed
3/10/2011	3:23:12 PM	SiCl4 pre valve closed
3/10/2011	3:23:12 PM	SiCl4 post valve closed
3/10/2011	3:23:12 PM	Bubbler valve closed
3/10/2011	3:23:12 PM	Main Vac valve opened
3/10/2011	3:23:12 PM	Bypass valve opened
3/10/2011	3:23:12 PM	Helium MFC set to  0.000000
3/10/2011	3:23:12 PM	H2 MFC set to  0.000000
3/10/2011	3:23:12 PM	BCl3 MFC set to  0.000000
3/10/2011	3:23:12 PM	PHl3 MFC set to  0.000000
3/10/2011	3:23:12 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:23:12 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:23:13 PM	Tube furnace set to 0
3/10/2011	3:23:13 PM	H2 valve closed
3/10/2011	3:23:13 PM	BCl3 valve closed
3/10/2011	3:23:13 PM	PH3 valve closed
3/10/2011	3:23:13 PM	SiCl4 pre valve closed
3/10/2011	3:23:13 PM	SiCl4 post valve closed
3/10/2011	3:23:13 PM	Bubbler valve closed
3/10/2011	3:23:13 PM	Helium valve opened
3/10/2011	3:23:13 PM	Main Vac valve opened
3/10/2011	3:23:13 PM	Bypass valve opened
3/10/2011	3:23:13 PM	Helium MFC set to  100.000000
3/10/2011	3:23:13 PM	H2 MFC set to  0.000000
3/10/2011	3:23:13 PM	BCl3 MFC set to  0.000000
3/10/2011	3:23:13 PM	PHl3 MFC set to  0.000000
3/10/2011	3:23:13 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:23:13 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:23:13 PM	Tube furnace set to 0
3/10/2011	3:23:14 PM	Helium valve closed
3/10/2011	3:23:14 PM	H2 valve closed
3/10/2011	3:23:14 PM	BCl3 valve closed
3/10/2011	3:23:14 PM	PH3 valve closed
3/10/2011	3:23:14 PM	SiCl4 pre valve closed
3/10/2011	3:23:14 PM	SiCl4 post valve closed
3/10/2011	3:23:14 PM	Bubbler valve closed
3/10/2011	3:23:14 PM	Main Vac valve opened
3/10/2011	3:23:14 PM	Bypass valve opened
3/10/2011	3:23:14 PM	Helium MFC set to  0.000000
3/10/2011	3:23:14 PM	H2 MFC set to  0.000000
3/10/2011	3:23:14 PM	BCl3 MFC set to  0.000000
3/10/2011	3:23:14 PM	PHl3 MFC set to  0.000000
3/10/2011	3:23:14 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:23:14 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:23:14 PM	Tube furnace set to 0
3/10/2011	3:24:14 PM	H2 valve closed
3/10/2011	3:24:14 PM	BCl3 valve closed
3/10/2011	3:24:14 PM	PH3 valve closed
3/10/2011	3:24:14 PM	SiCl4 pre valve closed
3/10/2011	3:24:14 PM	SiCl4 post valve closed
3/10/2011	3:24:14 PM	Bubbler valve closed
3/10/2011	3:24:14 PM	Helium valve opened
3/10/2011	3:24:14 PM	Main Vac valve opened
3/10/2011	3:24:14 PM	Bypass valve opened
3/10/2011	3:24:14 PM	Helium MFC set to  100.000000
3/10/2011	3:24:14 PM	H2 MFC set to  0.000000
3/10/2011	3:24:14 PM	BCl3 MFC set to  0.000000
3/10/2011	3:24:14 PM	PHl3 MFC set to  0.000000
3/10/2011	3:24:14 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:24:14 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:24:14 PM	Tube furnace set to 0
3/10/2011	3:25:14 PM	Helium valve closed
3/10/2011	3:25:14 PM	H2 valve closed
3/10/2011	3:25:14 PM	BCl3 valve closed
3/10/2011	3:25:14 PM	PH3 valve closed
3/10/2011	3:25:14 PM	SiCl4 pre valve closed
3/10/2011	3:25:14 PM	SiCl4 post valve closed
3/10/2011	3:25:14 PM	Bubbler valve closed
3/10/2011	3:25:14 PM	Main Vac valve opened
3/10/2011	3:25:14 PM	Bypass valve opened
3/10/2011	3:25:14 PM	Helium MFC set to  0.000000
3/10/2011	3:25:14 PM	H2 MFC set to  0.000000
3/10/2011	3:25:14 PM	BCl3 MFC set to  0.000000
3/10/2011	3:25:14 PM	PHl3 MFC set to  0.000000
3/10/2011	3:25:14 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:25:14 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:25:15 PM	Tube furnace set to 0
3/10/2011	3:26:15 PM	H2 valve closed
3/10/2011	3:26:15 PM	BCl3 valve closed
3/10/2011	3:26:15 PM	PH3 valve closed
3/10/2011	3:26:15 PM	SiCl4 pre valve closed
3/10/2011	3:26:15 PM	SiCl4 post valve closed
3/10/2011	3:26:15 PM	Bubbler valve closed
3/10/2011	3:26:15 PM	Helium valve opened
3/10/2011	3:26:15 PM	Main Vac valve opened
3/10/2011	3:26:15 PM	Bypass valve opened
3/10/2011	3:26:15 PM	Helium MFC set to  100.000000
3/10/2011	3:26:15 PM	H2 MFC set to  0.000000
3/10/2011	3:26:15 PM	BCl3 MFC set to  0.000000
3/10/2011	3:26:15 PM	PHl3 MFC set to  0.000000
3/10/2011	3:26:15 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:26:15 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:26:15 PM	Tube furnace set to 0
3/10/2011	3:27:15 PM	Helium valve closed
3/10/2011	3:27:15 PM	H2 valve closed
3/10/2011	3:27:15 PM	BCl3 valve closed
3/10/2011	3:27:15 PM	PH3 valve closed
3/10/2011	3:27:15 PM	SiCl4 pre valve closed
3/10/2011	3:27:15 PM	SiCl4 post valve closed
3/10/2011	3:27:15 PM	Bubbler valve closed
3/10/2011	3:27:15 PM	Main Vac valve opened
3/10/2011	3:27:15 PM	Bypass valve opened
3/10/2011	3:27:15 PM	Helium MFC set to  0.000000
3/10/2011	3:27:15 PM	H2 MFC set to  0.000000
3/10/2011	3:27:15 PM	BCl3 MFC set to  0.000000
3/10/2011	3:27:15 PM	PHl3 MFC set to  0.000000
3/10/2011	3:27:15 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:27:15 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:27:15 PM	Tube furnace set to 0
3/10/2011	3:28:15 PM	H2 valve closed
3/10/2011	3:28:15 PM	BCl3 valve closed
3/10/2011	3:28:15 PM	PH3 valve closed
3/10/2011	3:28:15 PM	SiCl4 pre valve closed
3/10/2011	3:28:15 PM	SiCl4 post valve closed
3/10/2011	3:28:15 PM	Bubbler valve closed
3/10/2011	3:28:15 PM	Helium valve opened
3/10/2011	3:28:15 PM	Main Vac valve opened
3/10/2011	3:28:15 PM	Bypass valve opened
3/10/2011	3:28:15 PM	Helium MFC set to  100.000000
3/10/2011	3:28:15 PM	H2 MFC set to  0.000000
3/10/2011	3:28:15 PM	BCl3 MFC set to  0.000000
3/10/2011	3:28:15 PM	PHl3 MFC set to  0.000000
3/10/2011	3:28:15 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:28:15 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:28:15 PM	Tube furnace set to 0
3/10/2011	3:29:15 PM	Helium valve closed
3/10/2011	3:29:15 PM	H2 valve closed
3/10/2011	3:29:15 PM	BCl3 valve closed
3/10/2011	3:29:15 PM	PH3 valve closed
3/10/2011	3:29:15 PM	SiCl4 pre valve closed
3/10/2011	3:29:15 PM	SiCl4 post valve closed
3/10/2011	3:29:15 PM	Bubbler valve closed
3/10/2011	3:29:15 PM	Main Vac valve opened
3/10/2011	3:29:15 PM	Bypass valve opened
3/10/2011	3:29:15 PM	Helium MFC set to  0.000000
3/10/2011	3:29:15 PM	H2 MFC set to  0.000000
3/10/2011	3:29:15 PM	BCl3 MFC set to  0.000000
3/10/2011	3:29:15 PM	PHl3 MFC set to  0.000000
3/10/2011	3:29:15 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:29:15 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:29:15 PM	Tube furnace set to 0
3/10/2011	3:30:15 PM	H2 valve closed
3/10/2011	3:30:15 PM	BCl3 valve closed
3/10/2011	3:30:15 PM	PH3 valve closed
3/10/2011	3:30:15 PM	SiCl4 pre valve closed
3/10/2011	3:30:15 PM	SiCl4 post valve closed
3/10/2011	3:30:15 PM	Bubbler valve closed
3/10/2011	3:30:15 PM	Helium valve opened
3/10/2011	3:30:15 PM	Main Vac valve opened
3/10/2011	3:30:15 PM	Bypass valve opened
3/10/2011	3:30:15 PM	Helium MFC set to  100.000000
3/10/2011	3:30:15 PM	H2 MFC set to  0.000000
3/10/2011	3:30:15 PM	BCl3 MFC set to  0.000000
3/10/2011	3:30:15 PM	PHl3 MFC set to  0.000000
3/10/2011	3:30:15 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:30:15 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:30:16 PM	Tube furnace set to 0
3/10/2011	3:31:16 PM	Helium valve closed
3/10/2011	3:31:16 PM	H2 valve closed
3/10/2011	3:31:16 PM	BCl3 valve closed
3/10/2011	3:31:16 PM	PH3 valve closed
3/10/2011	3:31:16 PM	SiCl4 pre valve closed
3/10/2011	3:31:16 PM	SiCl4 post valve closed
3/10/2011	3:31:16 PM	Bubbler valve closed
3/10/2011	3:31:16 PM	Main Vac valve opened
3/10/2011	3:31:16 PM	Bypass valve opened
3/10/2011	3:31:16 PM	Helium MFC set to  0.000000
3/10/2011	3:31:16 PM	H2 MFC set to  0.000000
3/10/2011	3:31:16 PM	BCl3 MFC set to  0.000000
3/10/2011	3:31:16 PM	PHl3 MFC set to  0.000000
3/10/2011	3:31:16 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:31:16 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:31:16 PM	Tube furnace set to 0
3/10/2011	3:32:16 PM	H2 valve closed
3/10/2011	3:32:16 PM	BCl3 valve closed
3/10/2011	3:32:16 PM	PH3 valve closed
3/10/2011	3:32:16 PM	SiCl4 pre valve closed
3/10/2011	3:32:16 PM	SiCl4 post valve closed
3/10/2011	3:32:16 PM	Bubbler valve closed
3/10/2011	3:32:16 PM	Helium valve opened
3/10/2011	3:32:16 PM	Main Vac valve opened
3/10/2011	3:32:16 PM	Bypass valve opened
3/10/2011	3:32:16 PM	Helium MFC set to  100.000000
3/10/2011	3:32:16 PM	H2 MFC set to  0.000000
3/10/2011	3:32:16 PM	BCl3 MFC set to  0.000000
3/10/2011	3:32:16 PM	PHl3 MFC set to  0.000000
3/10/2011	3:32:16 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:32:16 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:32:16 PM	Tube furnace set to 0
3/10/2011	3:33:16 PM	Helium valve closed
3/10/2011	3:33:16 PM	H2 valve closed
3/10/2011	3:33:16 PM	BCl3 valve closed
3/10/2011	3:33:16 PM	PH3 valve closed
3/10/2011	3:33:16 PM	SiCl4 pre valve closed
3/10/2011	3:33:16 PM	SiCl4 post valve closed
3/10/2011	3:33:16 PM	Bubbler valve closed
3/10/2011	3:33:16 PM	Main Vac valve opened
3/10/2011	3:33:16 PM	Bypass valve opened
3/10/2011	3:33:16 PM	Helium MFC set to  0.000000
3/10/2011	3:33:16 PM	H2 MFC set to  0.000000
3/10/2011	3:33:16 PM	BCl3 MFC set to  0.000000
3/10/2011	3:33:16 PM	PHl3 MFC set to  0.000000
3/10/2011	3:33:16 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:33:16 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:33:16 PM	Tube furnace set to 0
3/10/2011	3:33:17 PM	Run finished at 3:33 PM
3/10/2011	3:33:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	3:39:03 PM	Recipe started at 3:39 PM
3/10/2011	3:39:03 PM	Helium valve closed
3/10/2011	3:39:03 PM	BCl3 valve closed
3/10/2011	3:39:03 PM	PH3 valve closed
3/10/2011	3:39:03 PM	SiCl4 pre valve closed
3/10/2011	3:39:03 PM	SiCl4 post valve closed
3/10/2011	3:39:03 PM	Main Vac valve closed
3/10/2011	3:39:03 PM	Bypass valve closed
3/10/2011	3:39:03 PM	Bubbler valve closed
3/10/2011	3:39:03 PM	H2 valve opened
3/10/2011	3:39:03 PM	Helium MFC set to  0.000000
3/10/2011	3:39:03 PM	H2 MFC set to  500.000000
3/10/2011	3:39:03 PM	BCl3 MFC set to  0.000000
3/10/2011	3:39:03 PM	PHl3 MFC set to  0.000000
3/10/2011	3:39:03 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:39:03 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:39:03 PM	Tube furnace set to 0
3/10/2011	3:40:22 PM	Helium valve closed
3/10/2011	3:40:22 PM	BCl3 valve closed
3/10/2011	3:40:22 PM	PH3 valve closed
3/10/2011	3:40:22 PM	SiCl4 pre valve closed
3/10/2011	3:40:22 PM	SiCl4 post valve closed
3/10/2011	3:40:22 PM	Main Vac valve closed
3/10/2011	3:40:22 PM	Bypass valve closed
3/10/2011	3:40:22 PM	H2 valve opened
3/10/2011	3:40:22 PM	Bubbler valve opened
3/10/2011	3:40:22 PM	Helium MFC set to  0.000000
3/10/2011	3:40:22 PM	H2 MFC set to  500.000000
3/10/2011	3:40:22 PM	BCl3 MFC set to  0.000000
3/10/2011	3:40:22 PM	PHl3 MFC set to  0.000000
3/10/2011	3:40:22 PM	SiCl4 MFC set to  0.000000
3/10/2011	3:40:22 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	3:40:22 PM	Tube furnace set to 1000
3/10/2011	4:00:22 PM	Helium valve closed
3/10/2011	4:00:22 PM	BCl3 valve closed
3/10/2011	4:00:22 PM	Main Vac valve closed
3/10/2011	4:00:22 PM	Bypass valve closed
3/10/2011	4:00:22 PM	H2 valve opened
3/10/2011	4:00:22 PM	PH3 valve opened
3/10/2011	4:00:22 PM	SiCl4 pre valve opened
3/10/2011	4:00:22 PM	SiCl4 post valve opened
3/10/2011	4:00:22 PM	Bubbler valve opened
3/10/2011	4:00:22 PM	Helium MFC set to  0.000000
3/10/2011	4:00:22 PM	H2 MFC set to  500.000000
3/10/2011	4:00:22 PM	BCl3 MFC set to  0.000000
3/10/2011	4:00:22 PM	PHl3 MFC set to  1.000000
3/10/2011	4:00:22 PM	SiCl4 MFC set to  50.000000
3/10/2011	4:00:22 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	4:00:22 PM	Tube furnace set to 1000
3/10/2011	4:17:22 PM	H2 valve closed
3/10/2011	4:17:22 PM	BCl3 valve closed
3/10/2011	4:17:22 PM	PH3 valve closed
3/10/2011	4:17:22 PM	SiCl4 pre valve closed
3/10/2011	4:17:22 PM	SiCl4 post valve closed
3/10/2011	4:17:22 PM	Main Vac valve closed
3/10/2011	4:17:22 PM	Bypass valve closed
3/10/2011	4:17:22 PM	Helium valve opened
3/10/2011	4:17:22 PM	Bubbler valve opened
3/10/2011	4:17:22 PM	Helium MFC set to  500.000000
3/10/2011	4:17:22 PM	H2 MFC set to  0.000000
3/10/2011	4:17:22 PM	BCl3 MFC set to  0.000000
3/10/2011	4:17:22 PM	PHl3 MFC set to  0.000000
3/10/2011	4:17:22 PM	SiCl4 MFC set to  0.000000
3/10/2011	4:17:22 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	4:17:23 PM	Tube furnace set to 0
3/10/2011	4:37:23 PM	Helium valve closed
3/10/2011	4:37:23 PM	H2 valve closed
3/10/2011	4:37:23 PM	BCl3 valve closed
3/10/2011	4:37:23 PM	PH3 valve closed
3/10/2011	4:37:23 PM	SiCl4 pre valve closed
3/10/2011	4:37:23 PM	SiCl4 post valve closed
3/10/2011	4:37:23 PM	Main Vac valve closed
3/10/2011	4:37:23 PM	Bypass valve closed
3/10/2011	4:37:23 PM	Bubbler valve closed
3/10/2011	4:37:23 PM	Helium MFC set to  0.000000
3/10/2011	4:37:23 PM	H2 MFC set to  0.000000
3/10/2011	4:37:23 PM	BCl3 MFC set to  0.000000
3/10/2011	4:37:23 PM	PHl3 MFC set to  0.000000
3/10/2011	4:37:23 PM	SiCl4 MFC set to  0.000000
3/10/2011	4:37:23 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	4:37:23 PM	Tube furnace set to 0
3/10/2011	4:37:23 PM	Run finished at 4:37 PM
3/10/2011	4:47:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2011	4:47:31 PM	Recipe started at 4:47 PM
3/10/2011	4:47:31 PM	H2 valve closed
3/10/2011	4:47:31 PM	BCl3 valve closed
3/10/2011	4:47:31 PM	PH3 valve closed
3/10/2011	4:47:31 PM	SiCl4 pre valve closed
3/10/2011	4:47:31 PM	SiCl4 post valve closed
3/10/2011	4:47:31 PM	Main Vac valve closed
3/10/2011	4:47:31 PM	Bypass valve closed
3/10/2011	4:47:31 PM	Bubbler valve closed
3/10/2011	4:47:31 PM	Helium valve opened
3/10/2011	4:47:31 PM	Helium MFC set to  500.000000
3/10/2011	4:47:31 PM	H2 MFC set to  0.000000
3/10/2011	4:47:31 PM	BCl3 MFC set to  0.000000
3/10/2011	4:47:31 PM	PHl3 MFC set to  0.000000
3/10/2011	4:47:31 PM	SiCl4 MFC set to  0.000000
3/10/2011	4:47:31 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	4:47:31 PM	Tube furnace set to 0
3/10/2011	4:47:36 PM	Helium valve closed
3/10/2011	4:47:36 PM	H2 valve closed
3/10/2011	4:47:36 PM	BCl3 valve closed
3/10/2011	4:47:36 PM	PH3 valve closed
3/10/2011	4:47:36 PM	SiCl4 pre valve closed
3/10/2011	4:47:36 PM	SiCl4 post valve closed
3/10/2011	4:47:36 PM	Main Vac valve closed
3/10/2011	4:47:36 PM	Bypass valve closed
3/10/2011	4:47:36 PM	Bubbler valve closed
3/10/2011	4:47:36 PM	Helium MFC set to  0.000000
3/10/2011	4:47:36 PM	H2 MFC set to  0.000000
3/10/2011	4:47:36 PM	BCl3 MFC set to  0.000000
3/10/2011	4:47:36 PM	PHl3 MFC set to  0.000000
3/10/2011	4:47:36 PM	SiCl4 MFC set to  0.000000
3/10/2011	4:47:36 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	4:47:36 PM	Tube furnace set to 0
3/10/2011	4:47:36 PM	Run finished at 4:47 PM
3/10/2011	4:47:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2011	4:56:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2011	4:56:08 PM	Recipe started at 4:56 PM
3/10/2011	4:56:08 PM	Helium valve closed
3/10/2011	4:56:08 PM	H2 valve closed
3/10/2011	4:56:08 PM	BCl3 valve closed
3/10/2011	4:56:08 PM	PH3 valve closed
3/10/2011	4:56:08 PM	SiCl4 pre valve closed
3/10/2011	4:56:08 PM	SiCl4 post valve closed
3/10/2011	4:56:08 PM	Main Vac valve closed
3/10/2011	4:56:08 PM	Bubbler valve closed
3/10/2011	4:56:08 PM	Bypass valve opened
3/10/2011	4:56:08 PM	Helium MFC set to  0.000000
3/10/2011	4:56:08 PM	H2 MFC set to  0.000000
3/10/2011	4:56:08 PM	BCl3 MFC set to  0.000000
3/10/2011	4:56:08 PM	PHl3 MFC set to  0.000000
3/10/2011	4:56:08 PM	SiCl4 MFC set to  0.000000
3/10/2011	4:56:08 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	4:56:08 PM	Tube furnace set to 0
3/10/2011	4:56:39 PM	Helium valve closed
3/10/2011	4:56:39 PM	H2 valve closed
3/10/2011	4:56:39 PM	BCl3 valve closed
3/10/2011	4:56:39 PM	PH3 valve closed
3/10/2011	4:56:39 PM	SiCl4 pre valve closed
3/10/2011	4:56:39 PM	SiCl4 post valve closed
3/10/2011	4:56:39 PM	Bubbler valve closed
3/10/2011	4:56:39 PM	Main Vac valve opened
3/10/2011	4:56:39 PM	Bypass valve opened
3/10/2011	4:56:39 PM	Helium MFC set to  0.000000
3/10/2011	4:56:39 PM	H2 MFC set to  0.000000
3/10/2011	4:56:39 PM	BCl3 MFC set to  0.000000
3/10/2011	4:56:39 PM	PHl3 MFC set to  0.000000
3/10/2011	4:56:39 PM	SiCl4 MFC set to  0.000000
3/10/2011	4:56:39 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	4:56:39 PM	Tube furnace set to 0
3/10/2011	4:56:39 PM	Run finished at 4:56 PM
3/10/2011	4:56:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2011	4:57:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	4:57:35 PM	Recipe started at 4:57 PM
3/10/2011	4:57:35 PM	Helium valve closed
3/10/2011	4:57:35 PM	H2 valve closed
3/10/2011	4:57:35 PM	BCl3 valve closed
3/10/2011	4:57:35 PM	PH3 valve closed
3/10/2011	4:57:35 PM	SiCl4 pre valve closed
3/10/2011	4:57:35 PM	SiCl4 post valve closed
3/10/2011	4:57:35 PM	Main Vac valve closed
3/10/2011	4:57:35 PM	Bubbler valve closed
3/10/2011	4:57:35 PM	Bypass valve opened
3/10/2011	4:57:35 PM	Helium MFC set to  0.000000
3/10/2011	4:57:35 PM	H2 MFC set to  0.000000
3/10/2011	4:57:35 PM	BCl3 MFC set to  0.000000
3/10/2011	4:57:35 PM	PHl3 MFC set to  0.000000
3/10/2011	4:57:35 PM	SiCl4 MFC set to  0.000000
3/10/2011	4:57:35 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	4:57:35 PM	Tube furnace set to 0
3/10/2011	4:57:35 PM	Helium valve closed
3/10/2011	4:57:35 PM	H2 valve closed
3/10/2011	4:57:35 PM	BCl3 valve closed
3/10/2011	4:57:35 PM	PH3 valve closed
3/10/2011	4:57:35 PM	SiCl4 pre valve closed
3/10/2011	4:57:35 PM	SiCl4 post valve closed
3/10/2011	4:57:35 PM	Bubbler valve closed
3/10/2011	4:57:35 PM	Main Vac valve opened
3/10/2011	4:57:35 PM	Bypass valve opened
3/10/2011	4:57:35 PM	Helium MFC set to  0.000000
3/10/2011	4:57:35 PM	H2 MFC set to  0.000000
3/10/2011	4:57:35 PM	BCl3 MFC set to  0.000000
3/10/2011	4:57:35 PM	PHl3 MFC set to  0.000000
3/10/2011	4:57:35 PM	SiCl4 MFC set to  0.000000
3/10/2011	4:57:35 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	4:57:35 PM	Tube furnace set to 0
3/10/2011	4:58:35 PM	H2 valve closed
3/10/2011	4:58:35 PM	BCl3 valve closed
3/10/2011	4:58:35 PM	PH3 valve closed
3/10/2011	4:58:35 PM	SiCl4 pre valve closed
3/10/2011	4:58:35 PM	SiCl4 post valve closed
3/10/2011	4:58:35 PM	Bubbler valve closed
3/10/2011	4:58:35 PM	Helium valve opened
3/10/2011	4:58:35 PM	Main Vac valve opened
3/10/2011	4:58:35 PM	Bypass valve opened
3/10/2011	4:58:35 PM	Helium MFC set to  100.000000
3/10/2011	4:58:35 PM	H2 MFC set to  0.000000
3/10/2011	4:58:35 PM	BCl3 MFC set to  0.000000
3/10/2011	4:58:35 PM	PHl3 MFC set to  0.000000
3/10/2011	4:58:35 PM	SiCl4 MFC set to  0.000000
3/10/2011	4:58:35 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	4:58:35 PM	Tube furnace set to 0
3/10/2011	4:59:35 PM	Helium valve closed
3/10/2011	4:59:35 PM	H2 valve closed
3/10/2011	4:59:35 PM	BCl3 valve closed
3/10/2011	4:59:35 PM	PH3 valve closed
3/10/2011	4:59:35 PM	SiCl4 pre valve closed
3/10/2011	4:59:35 PM	SiCl4 post valve closed
3/10/2011	4:59:35 PM	Bubbler valve closed
3/10/2011	4:59:35 PM	Main Vac valve opened
3/10/2011	4:59:35 PM	Bypass valve opened
3/10/2011	4:59:35 PM	Helium MFC set to  0.000000
3/10/2011	4:59:35 PM	H2 MFC set to  0.000000
3/10/2011	4:59:35 PM	BCl3 MFC set to  0.000000
3/10/2011	4:59:35 PM	PHl3 MFC set to  0.000000
3/10/2011	4:59:35 PM	SiCl4 MFC set to  0.000000
3/10/2011	4:59:35 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	4:59:36 PM	Tube furnace set to 0
3/10/2011	5:00:36 PM	H2 valve closed
3/10/2011	5:00:36 PM	BCl3 valve closed
3/10/2011	5:00:36 PM	PH3 valve closed
3/10/2011	5:00:36 PM	SiCl4 pre valve closed
3/10/2011	5:00:36 PM	SiCl4 post valve closed
3/10/2011	5:00:36 PM	Bubbler valve closed
3/10/2011	5:00:36 PM	Helium valve opened
3/10/2011	5:00:36 PM	Main Vac valve opened
3/10/2011	5:00:36 PM	Bypass valve opened
3/10/2011	5:00:36 PM	Helium MFC set to  100.000000
3/10/2011	5:00:36 PM	H2 MFC set to  0.000000
3/10/2011	5:00:36 PM	BCl3 MFC set to  0.000000
3/10/2011	5:00:36 PM	PHl3 MFC set to  0.000000
3/10/2011	5:00:36 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:00:36 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:00:36 PM	Tube furnace set to 0
3/10/2011	5:01:36 PM	Helium valve closed
3/10/2011	5:01:36 PM	H2 valve closed
3/10/2011	5:01:36 PM	BCl3 valve closed
3/10/2011	5:01:36 PM	PH3 valve closed
3/10/2011	5:01:36 PM	SiCl4 pre valve closed
3/10/2011	5:01:36 PM	SiCl4 post valve closed
3/10/2011	5:01:36 PM	Bubbler valve closed
3/10/2011	5:01:36 PM	Main Vac valve opened
3/10/2011	5:01:36 PM	Bypass valve opened
3/10/2011	5:01:36 PM	Helium MFC set to  0.000000
3/10/2011	5:01:36 PM	H2 MFC set to  0.000000
3/10/2011	5:01:36 PM	BCl3 MFC set to  0.000000
3/10/2011	5:01:36 PM	PHl3 MFC set to  0.000000
3/10/2011	5:01:36 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:01:36 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:01:36 PM	Tube furnace set to 0
3/10/2011	5:02:36 PM	H2 valve closed
3/10/2011	5:02:36 PM	BCl3 valve closed
3/10/2011	5:02:36 PM	PH3 valve closed
3/10/2011	5:02:36 PM	SiCl4 pre valve closed
3/10/2011	5:02:36 PM	SiCl4 post valve closed
3/10/2011	5:02:36 PM	Bubbler valve closed
3/10/2011	5:02:36 PM	Helium valve opened
3/10/2011	5:02:36 PM	Main Vac valve opened
3/10/2011	5:02:36 PM	Bypass valve opened
3/10/2011	5:02:36 PM	Helium MFC set to  100.000000
3/10/2011	5:02:36 PM	H2 MFC set to  0.000000
3/10/2011	5:02:36 PM	BCl3 MFC set to  0.000000
3/10/2011	5:02:36 PM	PHl3 MFC set to  0.000000
3/10/2011	5:02:36 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:02:36 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:02:36 PM	Tube furnace set to 0
3/10/2011	5:03:36 PM	Helium valve closed
3/10/2011	5:03:36 PM	H2 valve closed
3/10/2011	5:03:36 PM	BCl3 valve closed
3/10/2011	5:03:36 PM	PH3 valve closed
3/10/2011	5:03:36 PM	SiCl4 pre valve closed
3/10/2011	5:03:36 PM	SiCl4 post valve closed
3/10/2011	5:03:36 PM	Bubbler valve closed
3/10/2011	5:03:36 PM	Main Vac valve opened
3/10/2011	5:03:36 PM	Bypass valve opened
3/10/2011	5:03:36 PM	Helium MFC set to  0.000000
3/10/2011	5:03:36 PM	H2 MFC set to  0.000000
3/10/2011	5:03:36 PM	BCl3 MFC set to  0.000000
3/10/2011	5:03:36 PM	PHl3 MFC set to  0.000000
3/10/2011	5:03:36 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:03:36 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:03:36 PM	Tube furnace set to 0
3/10/2011	5:04:36 PM	H2 valve closed
3/10/2011	5:04:36 PM	BCl3 valve closed
3/10/2011	5:04:36 PM	PH3 valve closed
3/10/2011	5:04:36 PM	SiCl4 pre valve closed
3/10/2011	5:04:36 PM	SiCl4 post valve closed
3/10/2011	5:04:36 PM	Bubbler valve closed
3/10/2011	5:04:36 PM	Helium valve opened
3/10/2011	5:04:36 PM	Main Vac valve opened
3/10/2011	5:04:36 PM	Bypass valve opened
3/10/2011	5:04:36 PM	Helium MFC set to  100.000000
3/10/2011	5:04:36 PM	H2 MFC set to  0.000000
3/10/2011	5:04:36 PM	BCl3 MFC set to  0.000000
3/10/2011	5:04:36 PM	PHl3 MFC set to  0.000000
3/10/2011	5:04:36 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:04:36 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:04:37 PM	Tube furnace set to 0
3/10/2011	5:05:37 PM	Helium valve closed
3/10/2011	5:05:37 PM	H2 valve closed
3/10/2011	5:05:37 PM	BCl3 valve closed
3/10/2011	5:05:37 PM	PH3 valve closed
3/10/2011	5:05:37 PM	SiCl4 pre valve closed
3/10/2011	5:05:37 PM	SiCl4 post valve closed
3/10/2011	5:05:37 PM	Bubbler valve closed
3/10/2011	5:05:37 PM	Main Vac valve opened
3/10/2011	5:05:37 PM	Bypass valve opened
3/10/2011	5:05:37 PM	Helium MFC set to  0.000000
3/10/2011	5:05:37 PM	H2 MFC set to  0.000000
3/10/2011	5:05:37 PM	BCl3 MFC set to  0.000000
3/10/2011	5:05:37 PM	PHl3 MFC set to  0.000000
3/10/2011	5:05:37 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:05:37 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:05:37 PM	Tube furnace set to 0
3/10/2011	5:06:37 PM	H2 valve closed
3/10/2011	5:06:37 PM	BCl3 valve closed
3/10/2011	5:06:37 PM	PH3 valve closed
3/10/2011	5:06:37 PM	SiCl4 pre valve closed
3/10/2011	5:06:37 PM	SiCl4 post valve closed
3/10/2011	5:06:37 PM	Bubbler valve closed
3/10/2011	5:06:37 PM	Helium valve opened
3/10/2011	5:06:37 PM	Main Vac valve opened
3/10/2011	5:06:37 PM	Bypass valve opened
3/10/2011	5:06:37 PM	Helium MFC set to  100.000000
3/10/2011	5:06:37 PM	H2 MFC set to  0.000000
3/10/2011	5:06:37 PM	BCl3 MFC set to  0.000000
3/10/2011	5:06:37 PM	PHl3 MFC set to  0.000000
3/10/2011	5:06:37 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:06:37 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:06:37 PM	Tube furnace set to 0
3/10/2011	5:07:37 PM	Helium valve closed
3/10/2011	5:07:37 PM	H2 valve closed
3/10/2011	5:07:37 PM	BCl3 valve closed
3/10/2011	5:07:37 PM	PH3 valve closed
3/10/2011	5:07:37 PM	SiCl4 pre valve closed
3/10/2011	5:07:37 PM	SiCl4 post valve closed
3/10/2011	5:07:37 PM	Bubbler valve closed
3/10/2011	5:07:37 PM	Main Vac valve opened
3/10/2011	5:07:37 PM	Bypass valve opened
3/10/2011	5:07:37 PM	Helium MFC set to  0.000000
3/10/2011	5:07:37 PM	H2 MFC set to  0.000000
3/10/2011	5:07:37 PM	BCl3 MFC set to  0.000000
3/10/2011	5:07:37 PM	PHl3 MFC set to  0.000000
3/10/2011	5:07:37 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:07:37 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:07:37 PM	Tube furnace set to 0
3/10/2011	5:08:37 PM	H2 valve closed
3/10/2011	5:08:37 PM	BCl3 valve closed
3/10/2011	5:08:37 PM	PH3 valve closed
3/10/2011	5:08:37 PM	SiCl4 pre valve closed
3/10/2011	5:08:37 PM	SiCl4 post valve closed
3/10/2011	5:08:37 PM	Bubbler valve closed
3/10/2011	5:08:37 PM	Helium valve opened
3/10/2011	5:08:37 PM	Main Vac valve opened
3/10/2011	5:08:37 PM	Bypass valve opened
3/10/2011	5:08:37 PM	Helium MFC set to  100.000000
3/10/2011	5:08:37 PM	H2 MFC set to  0.000000
3/10/2011	5:08:37 PM	BCl3 MFC set to  0.000000
3/10/2011	5:08:37 PM	PHl3 MFC set to  0.000000
3/10/2011	5:08:37 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:08:37 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:08:37 PM	Tube furnace set to 0
3/10/2011	5:09:37 PM	Helium valve closed
3/10/2011	5:09:37 PM	H2 valve closed
3/10/2011	5:09:37 PM	BCl3 valve closed
3/10/2011	5:09:37 PM	PH3 valve closed
3/10/2011	5:09:37 PM	SiCl4 pre valve closed
3/10/2011	5:09:37 PM	SiCl4 post valve closed
3/10/2011	5:09:37 PM	Bubbler valve closed
3/10/2011	5:09:37 PM	Main Vac valve opened
3/10/2011	5:09:37 PM	Bypass valve opened
3/10/2011	5:09:37 PM	Helium MFC set to  0.000000
3/10/2011	5:09:37 PM	H2 MFC set to  0.000000
3/10/2011	5:09:37 PM	BCl3 MFC set to  0.000000
3/10/2011	5:09:37 PM	PHl3 MFC set to  0.000000
3/10/2011	5:09:37 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:09:37 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:09:38 PM	Tube furnace set to 0
3/10/2011	5:10:38 PM	H2 valve closed
3/10/2011	5:10:38 PM	BCl3 valve closed
3/10/2011	5:10:38 PM	PH3 valve closed
3/10/2011	5:10:38 PM	SiCl4 pre valve closed
3/10/2011	5:10:38 PM	SiCl4 post valve closed
3/10/2011	5:10:38 PM	Bubbler valve closed
3/10/2011	5:10:38 PM	Helium valve opened
3/10/2011	5:10:38 PM	Main Vac valve opened
3/10/2011	5:10:38 PM	Bypass valve opened
3/10/2011	5:10:38 PM	Helium MFC set to  100.000000
3/10/2011	5:10:38 PM	H2 MFC set to  0.000000
3/10/2011	5:10:38 PM	BCl3 MFC set to  0.000000
3/10/2011	5:10:38 PM	PHl3 MFC set to  0.000000
3/10/2011	5:10:38 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:10:38 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:10:38 PM	Tube furnace set to 0
3/10/2011	5:11:38 PM	Helium valve closed
3/10/2011	5:11:38 PM	H2 valve closed
3/10/2011	5:11:38 PM	BCl3 valve closed
3/10/2011	5:11:38 PM	PH3 valve closed
3/10/2011	5:11:38 PM	SiCl4 pre valve closed
3/10/2011	5:11:38 PM	SiCl4 post valve closed
3/10/2011	5:11:38 PM	Bubbler valve closed
3/10/2011	5:11:38 PM	Main Vac valve opened
3/10/2011	5:11:38 PM	Bypass valve opened
3/10/2011	5:11:38 PM	Helium MFC set to  0.000000
3/10/2011	5:11:38 PM	H2 MFC set to  0.000000
3/10/2011	5:11:38 PM	BCl3 MFC set to  0.000000
3/10/2011	5:11:38 PM	PHl3 MFC set to  0.000000
3/10/2011	5:11:38 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:11:38 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:11:38 PM	Tube furnace set to 0
3/10/2011	5:12:38 PM	H2 valve closed
3/10/2011	5:12:38 PM	BCl3 valve closed
3/10/2011	5:12:38 PM	PH3 valve closed
3/10/2011	5:12:38 PM	SiCl4 pre valve closed
3/10/2011	5:12:38 PM	SiCl4 post valve closed
3/10/2011	5:12:38 PM	Bubbler valve closed
3/10/2011	5:12:38 PM	Helium valve opened
3/10/2011	5:12:38 PM	Main Vac valve opened
3/10/2011	5:12:38 PM	Bypass valve opened
3/10/2011	5:12:38 PM	Helium MFC set to  100.000000
3/10/2011	5:12:38 PM	H2 MFC set to  0.000000
3/10/2011	5:12:38 PM	BCl3 MFC set to  0.000000
3/10/2011	5:12:38 PM	PHl3 MFC set to  0.000000
3/10/2011	5:12:38 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:12:38 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:12:38 PM	Tube furnace set to 0
3/10/2011	5:13:38 PM	Helium valve closed
3/10/2011	5:13:38 PM	H2 valve closed
3/10/2011	5:13:38 PM	BCl3 valve closed
3/10/2011	5:13:38 PM	PH3 valve closed
3/10/2011	5:13:38 PM	SiCl4 pre valve closed
3/10/2011	5:13:38 PM	SiCl4 post valve closed
3/10/2011	5:13:38 PM	Bubbler valve closed
3/10/2011	5:13:38 PM	Main Vac valve opened
3/10/2011	5:13:38 PM	Bypass valve opened
3/10/2011	5:13:38 PM	Helium MFC set to  0.000000
3/10/2011	5:13:38 PM	H2 MFC set to  0.000000
3/10/2011	5:13:38 PM	BCl3 MFC set to  0.000000
3/10/2011	5:13:38 PM	PHl3 MFC set to  0.000000
3/10/2011	5:13:38 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:13:38 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:13:38 PM	Tube furnace set to 0
3/10/2011	5:14:38 PM	H2 valve closed
3/10/2011	5:14:38 PM	BCl3 valve closed
3/10/2011	5:14:38 PM	PH3 valve closed
3/10/2011	5:14:38 PM	SiCl4 pre valve closed
3/10/2011	5:14:38 PM	SiCl4 post valve closed
3/10/2011	5:14:38 PM	Bubbler valve closed
3/10/2011	5:14:38 PM	Helium valve opened
3/10/2011	5:14:38 PM	Main Vac valve opened
3/10/2011	5:14:38 PM	Bypass valve opened
3/10/2011	5:14:38 PM	Helium MFC set to  100.000000
3/10/2011	5:14:38 PM	H2 MFC set to  0.000000
3/10/2011	5:14:38 PM	BCl3 MFC set to  0.000000
3/10/2011	5:14:38 PM	PHl3 MFC set to  0.000000
3/10/2011	5:14:38 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:14:38 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:14:39 PM	Tube furnace set to 0
3/10/2011	5:15:39 PM	Helium valve closed
3/10/2011	5:15:39 PM	H2 valve closed
3/10/2011	5:15:39 PM	BCl3 valve closed
3/10/2011	5:15:39 PM	PH3 valve closed
3/10/2011	5:15:39 PM	SiCl4 pre valve closed
3/10/2011	5:15:39 PM	SiCl4 post valve closed
3/10/2011	5:15:39 PM	Bubbler valve closed
3/10/2011	5:15:39 PM	Main Vac valve opened
3/10/2011	5:15:39 PM	Bypass valve opened
3/10/2011	5:15:39 PM	Helium MFC set to  0.000000
3/10/2011	5:15:39 PM	H2 MFC set to  0.000000
3/10/2011	5:15:39 PM	BCl3 MFC set to  0.000000
3/10/2011	5:15:39 PM	PHl3 MFC set to  0.000000
3/10/2011	5:15:39 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:15:39 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:15:39 PM	Tube furnace set to 0
3/10/2011	5:16:39 PM	H2 valve closed
3/10/2011	5:16:39 PM	BCl3 valve closed
3/10/2011	5:16:39 PM	PH3 valve closed
3/10/2011	5:16:39 PM	SiCl4 pre valve closed
3/10/2011	5:16:39 PM	SiCl4 post valve closed
3/10/2011	5:16:39 PM	Bubbler valve closed
3/10/2011	5:16:39 PM	Helium valve opened
3/10/2011	5:16:39 PM	Main Vac valve opened
3/10/2011	5:16:39 PM	Bypass valve opened
3/10/2011	5:16:39 PM	Helium MFC set to  100.000000
3/10/2011	5:16:39 PM	H2 MFC set to  0.000000
3/10/2011	5:16:39 PM	BCl3 MFC set to  0.000000
3/10/2011	5:16:39 PM	PHl3 MFC set to  0.000000
3/10/2011	5:16:39 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:16:39 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:16:39 PM	Tube furnace set to 0
3/10/2011	5:17:39 PM	Helium valve closed
3/10/2011	5:17:39 PM	H2 valve closed
3/10/2011	5:17:39 PM	BCl3 valve closed
3/10/2011	5:17:39 PM	PH3 valve closed
3/10/2011	5:17:39 PM	SiCl4 pre valve closed
3/10/2011	5:17:39 PM	SiCl4 post valve closed
3/10/2011	5:17:39 PM	Bubbler valve closed
3/10/2011	5:17:39 PM	Main Vac valve opened
3/10/2011	5:17:39 PM	Bypass valve opened
3/10/2011	5:17:39 PM	Helium MFC set to  0.000000
3/10/2011	5:17:39 PM	H2 MFC set to  0.000000
3/10/2011	5:17:39 PM	BCl3 MFC set to  0.000000
3/10/2011	5:17:39 PM	PHl3 MFC set to  0.000000
3/10/2011	5:17:39 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:17:39 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:17:39 PM	Tube furnace set to 0
3/10/2011	5:17:40 PM	Run finished at 5:17 PM
3/10/2011	5:17:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	5:19:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	5:19:48 PM	Recipe started at 5:19 PM
3/10/2011	5:19:48 PM	Helium valve closed
3/10/2011	5:19:48 PM	H2 valve closed
3/10/2011	5:19:48 PM	BCl3 valve closed
3/10/2011	5:19:48 PM	PH3 valve closed
3/10/2011	5:19:48 PM	SiCl4 pre valve closed
3/10/2011	5:19:48 PM	SiCl4 post valve closed
3/10/2011	5:19:48 PM	Main Vac valve closed
3/10/2011	5:19:48 PM	Bubbler valve closed
3/10/2011	5:19:48 PM	Bypass valve opened
3/10/2011	5:19:48 PM	Helium MFC set to  0.000000
3/10/2011	5:19:48 PM	H2 MFC set to  0.000000
3/10/2011	5:19:48 PM	BCl3 MFC set to  0.000000
3/10/2011	5:19:48 PM	PHl3 MFC set to  0.000000
3/10/2011	5:19:48 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:19:48 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:19:48 PM	Tube furnace set to 0
3/10/2011	5:19:49 PM	Helium valve closed
3/10/2011	5:19:49 PM	H2 valve closed
3/10/2011	5:19:49 PM	BCl3 valve closed
3/10/2011	5:19:49 PM	PH3 valve closed
3/10/2011	5:19:49 PM	SiCl4 pre valve closed
3/10/2011	5:19:49 PM	SiCl4 post valve closed
3/10/2011	5:19:49 PM	Bubbler valve closed
3/10/2011	5:19:49 PM	Main Vac valve opened
3/10/2011	5:19:49 PM	Bypass valve opened
3/10/2011	5:19:49 PM	Helium MFC set to  0.000000
3/10/2011	5:19:49 PM	H2 MFC set to  0.000000
3/10/2011	5:19:49 PM	BCl3 MFC set to  0.000000
3/10/2011	5:19:49 PM	PHl3 MFC set to  0.000000
3/10/2011	5:19:49 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:19:49 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:19:49 PM	Tube furnace set to 0
3/10/2011	5:20:49 PM	H2 valve closed
3/10/2011	5:20:49 PM	BCl3 valve closed
3/10/2011	5:20:49 PM	PH3 valve closed
3/10/2011	5:20:49 PM	SiCl4 pre valve closed
3/10/2011	5:20:49 PM	SiCl4 post valve closed
3/10/2011	5:20:49 PM	Bubbler valve closed
3/10/2011	5:20:49 PM	Helium valve opened
3/10/2011	5:20:49 PM	Main Vac valve opened
3/10/2011	5:20:49 PM	Bypass valve opened
3/10/2011	5:20:49 PM	Helium MFC set to  100.000000
3/10/2011	5:20:49 PM	H2 MFC set to  0.000000
3/10/2011	5:20:49 PM	BCl3 MFC set to  0.000000
3/10/2011	5:20:49 PM	PHl3 MFC set to  0.000000
3/10/2011	5:20:49 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:20:49 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:20:49 PM	Tube furnace set to 0
3/10/2011	5:21:49 PM	Helium valve closed
3/10/2011	5:21:49 PM	H2 valve closed
3/10/2011	5:21:49 PM	BCl3 valve closed
3/10/2011	5:21:49 PM	PH3 valve closed
3/10/2011	5:21:49 PM	SiCl4 pre valve closed
3/10/2011	5:21:49 PM	SiCl4 post valve closed
3/10/2011	5:21:49 PM	Bubbler valve closed
3/10/2011	5:21:49 PM	Main Vac valve opened
3/10/2011	5:21:49 PM	Bypass valve opened
3/10/2011	5:21:49 PM	Helium MFC set to  0.000000
3/10/2011	5:21:49 PM	H2 MFC set to  0.000000
3/10/2011	5:21:49 PM	BCl3 MFC set to  0.000000
3/10/2011	5:21:49 PM	PHl3 MFC set to  0.000000
3/10/2011	5:21:49 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:21:49 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:21:49 PM	Tube furnace set to 0
3/10/2011	5:22:49 PM	H2 valve closed
3/10/2011	5:22:49 PM	BCl3 valve closed
3/10/2011	5:22:49 PM	PH3 valve closed
3/10/2011	5:22:49 PM	SiCl4 pre valve closed
3/10/2011	5:22:49 PM	SiCl4 post valve closed
3/10/2011	5:22:49 PM	Bubbler valve closed
3/10/2011	5:22:49 PM	Helium valve opened
3/10/2011	5:22:49 PM	Main Vac valve opened
3/10/2011	5:22:49 PM	Bypass valve opened
3/10/2011	5:22:49 PM	Helium MFC set to  100.000000
3/10/2011	5:22:49 PM	H2 MFC set to  0.000000
3/10/2011	5:22:49 PM	BCl3 MFC set to  0.000000
3/10/2011	5:22:49 PM	PHl3 MFC set to  0.000000
3/10/2011	5:22:49 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:22:49 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:22:50 PM	Tube furnace set to 0
3/10/2011	5:23:50 PM	Helium valve closed
3/10/2011	5:23:50 PM	H2 valve closed
3/10/2011	5:23:50 PM	BCl3 valve closed
3/10/2011	5:23:50 PM	PH3 valve closed
3/10/2011	5:23:50 PM	SiCl4 pre valve closed
3/10/2011	5:23:50 PM	SiCl4 post valve closed
3/10/2011	5:23:50 PM	Bubbler valve closed
3/10/2011	5:23:50 PM	Main Vac valve opened
3/10/2011	5:23:50 PM	Bypass valve opened
3/10/2011	5:23:50 PM	Helium MFC set to  0.000000
3/10/2011	5:23:50 PM	H2 MFC set to  0.000000
3/10/2011	5:23:50 PM	BCl3 MFC set to  0.000000
3/10/2011	5:23:50 PM	PHl3 MFC set to  0.000000
3/10/2011	5:23:50 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:23:50 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:23:50 PM	Tube furnace set to 0
3/10/2011	5:24:50 PM	H2 valve closed
3/10/2011	5:24:50 PM	BCl3 valve closed
3/10/2011	5:24:50 PM	PH3 valve closed
3/10/2011	5:24:50 PM	SiCl4 pre valve closed
3/10/2011	5:24:50 PM	SiCl4 post valve closed
3/10/2011	5:24:50 PM	Bubbler valve closed
3/10/2011	5:24:50 PM	Helium valve opened
3/10/2011	5:24:50 PM	Main Vac valve opened
3/10/2011	5:24:50 PM	Bypass valve opened
3/10/2011	5:24:50 PM	Helium MFC set to  100.000000
3/10/2011	5:24:50 PM	H2 MFC set to  0.000000
3/10/2011	5:24:50 PM	BCl3 MFC set to  0.000000
3/10/2011	5:24:50 PM	PHl3 MFC set to  0.000000
3/10/2011	5:24:50 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:24:50 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:24:50 PM	Tube furnace set to 0
3/10/2011	5:25:50 PM	Helium valve closed
3/10/2011	5:25:50 PM	H2 valve closed
3/10/2011	5:25:50 PM	BCl3 valve closed
3/10/2011	5:25:50 PM	PH3 valve closed
3/10/2011	5:25:50 PM	SiCl4 pre valve closed
3/10/2011	5:25:50 PM	SiCl4 post valve closed
3/10/2011	5:25:50 PM	Bubbler valve closed
3/10/2011	5:25:50 PM	Main Vac valve opened
3/10/2011	5:25:50 PM	Bypass valve opened
3/10/2011	5:25:50 PM	Helium MFC set to  0.000000
3/10/2011	5:25:50 PM	H2 MFC set to  0.000000
3/10/2011	5:25:50 PM	BCl3 MFC set to  0.000000
3/10/2011	5:25:50 PM	PHl3 MFC set to  0.000000
3/10/2011	5:25:50 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:25:50 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:25:50 PM	Tube furnace set to 0
3/10/2011	5:26:50 PM	H2 valve closed
3/10/2011	5:26:50 PM	BCl3 valve closed
3/10/2011	5:26:50 PM	PH3 valve closed
3/10/2011	5:26:50 PM	SiCl4 pre valve closed
3/10/2011	5:26:50 PM	SiCl4 post valve closed
3/10/2011	5:26:50 PM	Bubbler valve closed
3/10/2011	5:26:50 PM	Helium valve opened
3/10/2011	5:26:50 PM	Main Vac valve opened
3/10/2011	5:26:50 PM	Bypass valve opened
3/10/2011	5:26:50 PM	Helium MFC set to  100.000000
3/10/2011	5:26:50 PM	H2 MFC set to  0.000000
3/10/2011	5:26:50 PM	BCl3 MFC set to  0.000000
3/10/2011	5:26:50 PM	PHl3 MFC set to  0.000000
3/10/2011	5:26:50 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:26:50 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:26:50 PM	Tube furnace set to 0
3/10/2011	5:27:50 PM	Helium valve closed
3/10/2011	5:27:50 PM	H2 valve closed
3/10/2011	5:27:50 PM	BCl3 valve closed
3/10/2011	5:27:50 PM	PH3 valve closed
3/10/2011	5:27:50 PM	SiCl4 pre valve closed
3/10/2011	5:27:50 PM	SiCl4 post valve closed
3/10/2011	5:27:50 PM	Bubbler valve closed
3/10/2011	5:27:50 PM	Main Vac valve opened
3/10/2011	5:27:50 PM	Bypass valve opened
3/10/2011	5:27:50 PM	Helium MFC set to  0.000000
3/10/2011	5:27:50 PM	H2 MFC set to  0.000000
3/10/2011	5:27:50 PM	BCl3 MFC set to  0.000000
3/10/2011	5:27:50 PM	PHl3 MFC set to  0.000000
3/10/2011	5:27:50 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:27:50 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:27:51 PM	Tube furnace set to 0
3/10/2011	5:28:51 PM	H2 valve closed
3/10/2011	5:28:51 PM	BCl3 valve closed
3/10/2011	5:28:51 PM	PH3 valve closed
3/10/2011	5:28:51 PM	SiCl4 pre valve closed
3/10/2011	5:28:51 PM	SiCl4 post valve closed
3/10/2011	5:28:51 PM	Bubbler valve closed
3/10/2011	5:28:51 PM	Helium valve opened
3/10/2011	5:28:51 PM	Main Vac valve opened
3/10/2011	5:28:51 PM	Bypass valve opened
3/10/2011	5:28:51 PM	Helium MFC set to  100.000000
3/10/2011	5:28:51 PM	H2 MFC set to  0.000000
3/10/2011	5:28:51 PM	BCl3 MFC set to  0.000000
3/10/2011	5:28:51 PM	PHl3 MFC set to  0.000000
3/10/2011	5:28:51 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:28:51 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:28:51 PM	Tube furnace set to 0
3/10/2011	5:29:51 PM	Helium valve closed
3/10/2011	5:29:51 PM	H2 valve closed
3/10/2011	5:29:51 PM	BCl3 valve closed
3/10/2011	5:29:51 PM	PH3 valve closed
3/10/2011	5:29:51 PM	SiCl4 pre valve closed
3/10/2011	5:29:51 PM	SiCl4 post valve closed
3/10/2011	5:29:51 PM	Bubbler valve closed
3/10/2011	5:29:51 PM	Main Vac valve opened
3/10/2011	5:29:51 PM	Bypass valve opened
3/10/2011	5:29:51 PM	Helium MFC set to  0.000000
3/10/2011	5:29:51 PM	H2 MFC set to  0.000000
3/10/2011	5:29:51 PM	BCl3 MFC set to  0.000000
3/10/2011	5:29:51 PM	PHl3 MFC set to  0.000000
3/10/2011	5:29:51 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:29:51 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:29:51 PM	Tube furnace set to 0
3/10/2011	5:30:51 PM	H2 valve closed
3/10/2011	5:30:51 PM	BCl3 valve closed
3/10/2011	5:30:51 PM	PH3 valve closed
3/10/2011	5:30:51 PM	SiCl4 pre valve closed
3/10/2011	5:30:51 PM	SiCl4 post valve closed
3/10/2011	5:30:51 PM	Bubbler valve closed
3/10/2011	5:30:51 PM	Helium valve opened
3/10/2011	5:30:51 PM	Main Vac valve opened
3/10/2011	5:30:51 PM	Bypass valve opened
3/10/2011	5:30:51 PM	Helium MFC set to  100.000000
3/10/2011	5:30:51 PM	H2 MFC set to  0.000000
3/10/2011	5:30:51 PM	BCl3 MFC set to  0.000000
3/10/2011	5:30:51 PM	PHl3 MFC set to  0.000000
3/10/2011	5:30:51 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:30:51 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:30:51 PM	Tube furnace set to 0
3/10/2011	5:31:51 PM	Helium valve closed
3/10/2011	5:31:51 PM	H2 valve closed
3/10/2011	5:31:51 PM	BCl3 valve closed
3/10/2011	5:31:51 PM	PH3 valve closed
3/10/2011	5:31:51 PM	SiCl4 pre valve closed
3/10/2011	5:31:51 PM	SiCl4 post valve closed
3/10/2011	5:31:51 PM	Bubbler valve closed
3/10/2011	5:31:51 PM	Main Vac valve opened
3/10/2011	5:31:51 PM	Bypass valve opened
3/10/2011	5:31:51 PM	Helium MFC set to  0.000000
3/10/2011	5:31:51 PM	H2 MFC set to  0.000000
3/10/2011	5:31:51 PM	BCl3 MFC set to  0.000000
3/10/2011	5:31:51 PM	PHl3 MFC set to  0.000000
3/10/2011	5:31:51 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:31:51 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:31:51 PM	Tube furnace set to 0
3/10/2011	5:32:51 PM	H2 valve closed
3/10/2011	5:32:51 PM	BCl3 valve closed
3/10/2011	5:32:51 PM	PH3 valve closed
3/10/2011	5:32:51 PM	SiCl4 pre valve closed
3/10/2011	5:32:51 PM	SiCl4 post valve closed
3/10/2011	5:32:51 PM	Bubbler valve closed
3/10/2011	5:32:51 PM	Helium valve opened
3/10/2011	5:32:51 PM	Main Vac valve opened
3/10/2011	5:32:51 PM	Bypass valve opened
3/10/2011	5:32:51 PM	Helium MFC set to  100.000000
3/10/2011	5:32:51 PM	H2 MFC set to  0.000000
3/10/2011	5:32:51 PM	BCl3 MFC set to  0.000000
3/10/2011	5:32:51 PM	PHl3 MFC set to  0.000000
3/10/2011	5:32:51 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:32:51 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:32:51 PM	Tube furnace set to 0
3/10/2011	5:33:52 PM	Helium valve closed
3/10/2011	5:33:52 PM	H2 valve closed
3/10/2011	5:33:52 PM	BCl3 valve closed
3/10/2011	5:33:52 PM	PH3 valve closed
3/10/2011	5:33:52 PM	SiCl4 pre valve closed
3/10/2011	5:33:52 PM	SiCl4 post valve closed
3/10/2011	5:33:52 PM	Bubbler valve closed
3/10/2011	5:33:52 PM	Main Vac valve opened
3/10/2011	5:33:52 PM	Bypass valve opened
3/10/2011	5:33:52 PM	Helium MFC set to  0.000000
3/10/2011	5:33:52 PM	H2 MFC set to  0.000000
3/10/2011	5:33:52 PM	BCl3 MFC set to  0.000000
3/10/2011	5:33:52 PM	PHl3 MFC set to  0.000000
3/10/2011	5:33:52 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:33:52 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:33:52 PM	Tube furnace set to 0
3/10/2011	5:34:52 PM	H2 valve closed
3/10/2011	5:34:52 PM	BCl3 valve closed
3/10/2011	5:34:52 PM	PH3 valve closed
3/10/2011	5:34:52 PM	SiCl4 pre valve closed
3/10/2011	5:34:52 PM	SiCl4 post valve closed
3/10/2011	5:34:52 PM	Bubbler valve closed
3/10/2011	5:34:52 PM	Helium valve opened
3/10/2011	5:34:52 PM	Main Vac valve opened
3/10/2011	5:34:52 PM	Bypass valve opened
3/10/2011	5:34:52 PM	Helium MFC set to  100.000000
3/10/2011	5:34:52 PM	H2 MFC set to  0.000000
3/10/2011	5:34:52 PM	BCl3 MFC set to  0.000000
3/10/2011	5:34:52 PM	PHl3 MFC set to  0.000000
3/10/2011	5:34:52 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:34:52 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:34:52 PM	Tube furnace set to 0
3/10/2011	5:35:52 PM	Helium valve closed
3/10/2011	5:35:52 PM	H2 valve closed
3/10/2011	5:35:52 PM	BCl3 valve closed
3/10/2011	5:35:52 PM	PH3 valve closed
3/10/2011	5:35:52 PM	SiCl4 pre valve closed
3/10/2011	5:35:52 PM	SiCl4 post valve closed
3/10/2011	5:35:52 PM	Bubbler valve closed
3/10/2011	5:35:52 PM	Main Vac valve opened
3/10/2011	5:35:52 PM	Bypass valve opened
3/10/2011	5:35:52 PM	Helium MFC set to  0.000000
3/10/2011	5:35:52 PM	H2 MFC set to  0.000000
3/10/2011	5:35:52 PM	BCl3 MFC set to  0.000000
3/10/2011	5:35:52 PM	PHl3 MFC set to  0.000000
3/10/2011	5:35:52 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:35:52 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:35:52 PM	Tube furnace set to 0
3/10/2011	5:36:52 PM	H2 valve closed
3/10/2011	5:36:52 PM	BCl3 valve closed
3/10/2011	5:36:52 PM	PH3 valve closed
3/10/2011	5:36:52 PM	SiCl4 pre valve closed
3/10/2011	5:36:52 PM	SiCl4 post valve closed
3/10/2011	5:36:52 PM	Bubbler valve closed
3/10/2011	5:36:52 PM	Helium valve opened
3/10/2011	5:36:52 PM	Main Vac valve opened
3/10/2011	5:36:52 PM	Bypass valve opened
3/10/2011	5:36:52 PM	Helium MFC set to  100.000000
3/10/2011	5:36:52 PM	H2 MFC set to  0.000000
3/10/2011	5:36:52 PM	BCl3 MFC set to  0.000000
3/10/2011	5:36:52 PM	PHl3 MFC set to  0.000000
3/10/2011	5:36:52 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:36:52 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:36:52 PM	Tube furnace set to 0
3/10/2011	5:37:52 PM	Helium valve closed
3/10/2011	5:37:52 PM	H2 valve closed
3/10/2011	5:37:52 PM	BCl3 valve closed
3/10/2011	5:37:52 PM	PH3 valve closed
3/10/2011	5:37:52 PM	SiCl4 pre valve closed
3/10/2011	5:37:52 PM	SiCl4 post valve closed
3/10/2011	5:37:52 PM	Bubbler valve closed
3/10/2011	5:37:52 PM	Main Vac valve opened
3/10/2011	5:37:52 PM	Bypass valve opened
3/10/2011	5:37:52 PM	Helium MFC set to  0.000000
3/10/2011	5:37:52 PM	H2 MFC set to  0.000000
3/10/2011	5:37:52 PM	BCl3 MFC set to  0.000000
3/10/2011	5:37:52 PM	PHl3 MFC set to  0.000000
3/10/2011	5:37:52 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:37:52 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:37:52 PM	Tube furnace set to 0
3/10/2011	5:38:53 PM	H2 valve closed
3/10/2011	5:38:53 PM	BCl3 valve closed
3/10/2011	5:38:53 PM	PH3 valve closed
3/10/2011	5:38:53 PM	SiCl4 pre valve closed
3/10/2011	5:38:53 PM	SiCl4 post valve closed
3/10/2011	5:38:53 PM	Bubbler valve closed
3/10/2011	5:38:53 PM	Helium valve opened
3/10/2011	5:38:53 PM	Main Vac valve opened
3/10/2011	5:38:53 PM	Bypass valve opened
3/10/2011	5:38:53 PM	Helium MFC set to  100.000000
3/10/2011	5:38:53 PM	H2 MFC set to  0.000000
3/10/2011	5:38:53 PM	BCl3 MFC set to  0.000000
3/10/2011	5:38:53 PM	PHl3 MFC set to  0.000000
3/10/2011	5:38:53 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:38:53 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:38:53 PM	Tube furnace set to 0
3/10/2011	5:39:53 PM	Helium valve closed
3/10/2011	5:39:53 PM	H2 valve closed
3/10/2011	5:39:53 PM	BCl3 valve closed
3/10/2011	5:39:53 PM	PH3 valve closed
3/10/2011	5:39:53 PM	SiCl4 pre valve closed
3/10/2011	5:39:53 PM	SiCl4 post valve closed
3/10/2011	5:39:53 PM	Bubbler valve closed
3/10/2011	5:39:53 PM	Main Vac valve opened
3/10/2011	5:39:53 PM	Bypass valve opened
3/10/2011	5:39:53 PM	Helium MFC set to  0.000000
3/10/2011	5:39:53 PM	H2 MFC set to  0.000000
3/10/2011	5:39:53 PM	BCl3 MFC set to  0.000000
3/10/2011	5:39:53 PM	PHl3 MFC set to  0.000000
3/10/2011	5:39:53 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:39:53 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:39:53 PM	Tube furnace set to 0
3/10/2011	5:39:54 PM	Run finished at 5:39 PM
3/10/2011	5:39:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	5:47:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	5:47:58 PM	Recipe started at 5:47 PM
3/10/2011	5:47:58 PM	Helium valve closed
3/10/2011	5:47:58 PM	H2 valve closed
3/10/2011	5:47:58 PM	BCl3 valve closed
3/10/2011	5:47:58 PM	PH3 valve closed
3/10/2011	5:47:58 PM	SiCl4 pre valve closed
3/10/2011	5:47:58 PM	SiCl4 post valve closed
3/10/2011	5:47:58 PM	Main Vac valve closed
3/10/2011	5:47:58 PM	Bubbler valve closed
3/10/2011	5:47:58 PM	Bypass valve opened
3/10/2011	5:47:58 PM	Helium MFC set to  0.000000
3/10/2011	5:47:58 PM	H2 MFC set to  0.000000
3/10/2011	5:47:58 PM	BCl3 MFC set to  0.000000
3/10/2011	5:47:58 PM	PHl3 MFC set to  0.000000
3/10/2011	5:47:58 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:47:58 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:47:58 PM	Tube furnace set to 0
3/10/2011	5:47:58 PM	Helium valve closed
3/10/2011	5:47:58 PM	H2 valve closed
3/10/2011	5:47:58 PM	BCl3 valve closed
3/10/2011	5:47:58 PM	PH3 valve closed
3/10/2011	5:47:58 PM	SiCl4 pre valve closed
3/10/2011	5:47:58 PM	SiCl4 post valve closed
3/10/2011	5:47:58 PM	Bubbler valve closed
3/10/2011	5:47:58 PM	Main Vac valve opened
3/10/2011	5:47:58 PM	Bypass valve opened
3/10/2011	5:47:58 PM	Helium MFC set to  0.000000
3/10/2011	5:47:58 PM	H2 MFC set to  0.000000
3/10/2011	5:47:58 PM	BCl3 MFC set to  0.000000
3/10/2011	5:47:58 PM	PHl3 MFC set to  0.000000
3/10/2011	5:47:58 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:47:58 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:47:58 PM	Tube furnace set to 0
3/10/2011	5:48:58 PM	H2 valve closed
3/10/2011	5:48:58 PM	BCl3 valve closed
3/10/2011	5:48:58 PM	PH3 valve closed
3/10/2011	5:48:58 PM	SiCl4 pre valve closed
3/10/2011	5:48:58 PM	SiCl4 post valve closed
3/10/2011	5:48:58 PM	Bubbler valve closed
3/10/2011	5:48:58 PM	Helium valve opened
3/10/2011	5:48:58 PM	Main Vac valve opened
3/10/2011	5:48:58 PM	Bypass valve opened
3/10/2011	5:48:58 PM	Helium MFC set to  100.000000
3/10/2011	5:48:58 PM	H2 MFC set to  0.000000
3/10/2011	5:48:58 PM	BCl3 MFC set to  0.000000
3/10/2011	5:48:58 PM	PHl3 MFC set to  0.000000
3/10/2011	5:48:58 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:48:58 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:48:58 PM	Tube furnace set to 0
3/10/2011	5:49:58 PM	Helium valve closed
3/10/2011	5:49:58 PM	H2 valve closed
3/10/2011	5:49:58 PM	BCl3 valve closed
3/10/2011	5:49:58 PM	PH3 valve closed
3/10/2011	5:49:58 PM	SiCl4 pre valve closed
3/10/2011	5:49:58 PM	SiCl4 post valve closed
3/10/2011	5:49:58 PM	Bubbler valve closed
3/10/2011	5:49:58 PM	Main Vac valve opened
3/10/2011	5:49:58 PM	Bypass valve opened
3/10/2011	5:49:58 PM	Helium MFC set to  0.000000
3/10/2011	5:49:58 PM	H2 MFC set to  0.000000
3/10/2011	5:49:58 PM	BCl3 MFC set to  0.000000
3/10/2011	5:49:58 PM	PHl3 MFC set to  0.000000
3/10/2011	5:49:59 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:49:59 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:49:59 PM	Tube furnace set to 0
3/10/2011	5:50:59 PM	H2 valve closed
3/10/2011	5:50:59 PM	BCl3 valve closed
3/10/2011	5:50:59 PM	PH3 valve closed
3/10/2011	5:50:59 PM	SiCl4 pre valve closed
3/10/2011	5:50:59 PM	SiCl4 post valve closed
3/10/2011	5:50:59 PM	Bubbler valve closed
3/10/2011	5:50:59 PM	Helium valve opened
3/10/2011	5:50:59 PM	Main Vac valve opened
3/10/2011	5:50:59 PM	Bypass valve opened
3/10/2011	5:50:59 PM	Helium MFC set to  100.000000
3/10/2011	5:50:59 PM	H2 MFC set to  0.000000
3/10/2011	5:50:59 PM	BCl3 MFC set to  0.000000
3/10/2011	5:50:59 PM	PHl3 MFC set to  0.000000
3/10/2011	5:50:59 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:50:59 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:50:59 PM	Tube furnace set to 0
3/10/2011	5:51:59 PM	Helium valve closed
3/10/2011	5:51:59 PM	H2 valve closed
3/10/2011	5:51:59 PM	BCl3 valve closed
3/10/2011	5:51:59 PM	PH3 valve closed
3/10/2011	5:51:59 PM	SiCl4 pre valve closed
3/10/2011	5:51:59 PM	SiCl4 post valve closed
3/10/2011	5:51:59 PM	Bubbler valve closed
3/10/2011	5:51:59 PM	Main Vac valve opened
3/10/2011	5:51:59 PM	Bypass valve opened
3/10/2011	5:51:59 PM	Helium MFC set to  0.000000
3/10/2011	5:51:59 PM	H2 MFC set to  0.000000
3/10/2011	5:51:59 PM	BCl3 MFC set to  0.000000
3/10/2011	5:51:59 PM	PHl3 MFC set to  0.000000
3/10/2011	5:51:59 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:51:59 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:51:59 PM	Tube furnace set to 0
3/10/2011	5:52:59 PM	H2 valve closed
3/10/2011	5:52:59 PM	BCl3 valve closed
3/10/2011	5:52:59 PM	PH3 valve closed
3/10/2011	5:52:59 PM	SiCl4 pre valve closed
3/10/2011	5:52:59 PM	SiCl4 post valve closed
3/10/2011	5:52:59 PM	Bubbler valve closed
3/10/2011	5:52:59 PM	Helium valve opened
3/10/2011	5:52:59 PM	Main Vac valve opened
3/10/2011	5:52:59 PM	Bypass valve opened
3/10/2011	5:52:59 PM	Helium MFC set to  100.000000
3/10/2011	5:52:59 PM	H2 MFC set to  0.000000
3/10/2011	5:52:59 PM	BCl3 MFC set to  0.000000
3/10/2011	5:52:59 PM	PHl3 MFC set to  0.000000
3/10/2011	5:52:59 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:52:59 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:52:59 PM	Tube furnace set to 0
3/10/2011	5:53:59 PM	Helium valve closed
3/10/2011	5:53:59 PM	H2 valve closed
3/10/2011	5:53:59 PM	BCl3 valve closed
3/10/2011	5:53:59 PM	PH3 valve closed
3/10/2011	5:53:59 PM	SiCl4 pre valve closed
3/10/2011	5:53:59 PM	SiCl4 post valve closed
3/10/2011	5:53:59 PM	Bubbler valve closed
3/10/2011	5:53:59 PM	Main Vac valve opened
3/10/2011	5:53:59 PM	Bypass valve opened
3/10/2011	5:53:59 PM	Helium MFC set to  0.000000
3/10/2011	5:53:59 PM	H2 MFC set to  0.000000
3/10/2011	5:53:59 PM	BCl3 MFC set to  0.000000
3/10/2011	5:53:59 PM	PHl3 MFC set to  0.000000
3/10/2011	5:53:59 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:53:59 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:53:59 PM	Tube furnace set to 0
3/10/2011	5:54:59 PM	H2 valve closed
3/10/2011	5:54:59 PM	BCl3 valve closed
3/10/2011	5:54:59 PM	PH3 valve closed
3/10/2011	5:54:59 PM	SiCl4 pre valve closed
3/10/2011	5:54:59 PM	SiCl4 post valve closed
3/10/2011	5:54:59 PM	Bubbler valve closed
3/10/2011	5:54:59 PM	Helium valve opened
3/10/2011	5:54:59 PM	Main Vac valve opened
3/10/2011	5:54:59 PM	Bypass valve opened
3/10/2011	5:54:59 PM	Helium MFC set to  100.000000
3/10/2011	5:54:59 PM	H2 MFC set to  0.000000
3/10/2011	5:54:59 PM	BCl3 MFC set to  0.000000
3/10/2011	5:54:59 PM	PHl3 MFC set to  0.000000
3/10/2011	5:54:59 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:54:59 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:55:00 PM	Tube furnace set to 0
3/10/2011	5:56:00 PM	Helium valve closed
3/10/2011	5:56:00 PM	H2 valve closed
3/10/2011	5:56:00 PM	BCl3 valve closed
3/10/2011	5:56:00 PM	PH3 valve closed
3/10/2011	5:56:00 PM	SiCl4 pre valve closed
3/10/2011	5:56:00 PM	SiCl4 post valve closed
3/10/2011	5:56:00 PM	Bubbler valve closed
3/10/2011	5:56:00 PM	Main Vac valve opened
3/10/2011	5:56:00 PM	Bypass valve opened
3/10/2011	5:56:00 PM	Helium MFC set to  0.000000
3/10/2011	5:56:00 PM	H2 MFC set to  0.000000
3/10/2011	5:56:00 PM	BCl3 MFC set to  0.000000
3/10/2011	5:56:00 PM	PHl3 MFC set to  0.000000
3/10/2011	5:56:00 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:56:00 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:56:00 PM	Tube furnace set to 0
3/10/2011	5:57:00 PM	H2 valve closed
3/10/2011	5:57:00 PM	BCl3 valve closed
3/10/2011	5:57:00 PM	PH3 valve closed
3/10/2011	5:57:00 PM	SiCl4 pre valve closed
3/10/2011	5:57:00 PM	SiCl4 post valve closed
3/10/2011	5:57:00 PM	Bubbler valve closed
3/10/2011	5:57:00 PM	Helium valve opened
3/10/2011	5:57:00 PM	Main Vac valve opened
3/10/2011	5:57:00 PM	Bypass valve opened
3/10/2011	5:57:00 PM	Helium MFC set to  100.000000
3/10/2011	5:57:00 PM	H2 MFC set to  0.000000
3/10/2011	5:57:00 PM	BCl3 MFC set to  0.000000
3/10/2011	5:57:00 PM	PHl3 MFC set to  0.000000
3/10/2011	5:57:00 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:57:00 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:57:00 PM	Tube furnace set to 0
3/10/2011	5:58:00 PM	Helium valve closed
3/10/2011	5:58:00 PM	H2 valve closed
3/10/2011	5:58:00 PM	BCl3 valve closed
3/10/2011	5:58:00 PM	PH3 valve closed
3/10/2011	5:58:00 PM	SiCl4 pre valve closed
3/10/2011	5:58:00 PM	SiCl4 post valve closed
3/10/2011	5:58:00 PM	Bubbler valve closed
3/10/2011	5:58:00 PM	Main Vac valve opened
3/10/2011	5:58:00 PM	Bypass valve opened
3/10/2011	5:58:00 PM	Helium MFC set to  0.000000
3/10/2011	5:58:00 PM	H2 MFC set to  0.000000
3/10/2011	5:58:00 PM	BCl3 MFC set to  0.000000
3/10/2011	5:58:00 PM	PHl3 MFC set to  0.000000
3/10/2011	5:58:00 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:58:00 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:58:00 PM	Tube furnace set to 0
3/10/2011	5:59:00 PM	H2 valve closed
3/10/2011	5:59:00 PM	BCl3 valve closed
3/10/2011	5:59:00 PM	PH3 valve closed
3/10/2011	5:59:00 PM	SiCl4 pre valve closed
3/10/2011	5:59:00 PM	SiCl4 post valve closed
3/10/2011	5:59:00 PM	Bubbler valve closed
3/10/2011	5:59:00 PM	Helium valve opened
3/10/2011	5:59:00 PM	Main Vac valve opened
3/10/2011	5:59:00 PM	Bypass valve opened
3/10/2011	5:59:00 PM	Helium MFC set to  100.000000
3/10/2011	5:59:00 PM	H2 MFC set to  0.000000
3/10/2011	5:59:00 PM	BCl3 MFC set to  0.000000
3/10/2011	5:59:00 PM	PHl3 MFC set to  0.000000
3/10/2011	5:59:00 PM	SiCl4 MFC set to  0.000000
3/10/2011	5:59:00 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	5:59:00 PM	Tube furnace set to 0
3/10/2011	6:00:00 PM	Helium valve closed
3/10/2011	6:00:00 PM	H2 valve closed
3/10/2011	6:00:00 PM	BCl3 valve closed
3/10/2011	6:00:00 PM	PH3 valve closed
3/10/2011	6:00:00 PM	SiCl4 pre valve closed
3/10/2011	6:00:00 PM	SiCl4 post valve closed
3/10/2011	6:00:00 PM	Bubbler valve closed
3/10/2011	6:00:00 PM	Main Vac valve opened
3/10/2011	6:00:00 PM	Bypass valve opened
3/10/2011	6:00:00 PM	Helium MFC set to  0.000000
3/10/2011	6:00:00 PM	H2 MFC set to  0.000000
3/10/2011	6:00:00 PM	BCl3 MFC set to  0.000000
3/10/2011	6:00:00 PM	PHl3 MFC set to  0.000000
3/10/2011	6:00:00 PM	SiCl4 MFC set to  0.000000
3/10/2011	6:00:00 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	6:00:01 PM	Tube furnace set to 0
3/10/2011	6:01:01 PM	H2 valve closed
3/10/2011	6:01:01 PM	BCl3 valve closed
3/10/2011	6:01:01 PM	PH3 valve closed
3/10/2011	6:01:01 PM	SiCl4 pre valve closed
3/10/2011	6:01:01 PM	SiCl4 post valve closed
3/10/2011	6:01:01 PM	Bubbler valve closed
3/10/2011	6:01:01 PM	Helium valve opened
3/10/2011	6:01:01 PM	Main Vac valve opened
3/10/2011	6:01:01 PM	Bypass valve opened
3/10/2011	6:01:01 PM	Helium MFC set to  100.000000
3/10/2011	6:01:01 PM	H2 MFC set to  0.000000
3/10/2011	6:01:01 PM	BCl3 MFC set to  0.000000
3/10/2011	6:01:01 PM	PHl3 MFC set to  0.000000
3/10/2011	6:01:01 PM	SiCl4 MFC set to  0.000000
3/10/2011	6:01:01 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	6:01:01 PM	Tube furnace set to 0
3/10/2011	6:02:01 PM	Helium valve closed
3/10/2011	6:02:01 PM	H2 valve closed
3/10/2011	6:02:01 PM	BCl3 valve closed
3/10/2011	6:02:01 PM	PH3 valve closed
3/10/2011	6:02:01 PM	SiCl4 pre valve closed
3/10/2011	6:02:01 PM	SiCl4 post valve closed
3/10/2011	6:02:01 PM	Bubbler valve closed
3/10/2011	6:02:01 PM	Main Vac valve opened
3/10/2011	6:02:01 PM	Bypass valve opened
3/10/2011	6:02:01 PM	Helium MFC set to  0.000000
3/10/2011	6:02:01 PM	H2 MFC set to  0.000000
3/10/2011	6:02:01 PM	BCl3 MFC set to  0.000000
3/10/2011	6:02:01 PM	PHl3 MFC set to  0.000000
3/10/2011	6:02:01 PM	SiCl4 MFC set to  0.000000
3/10/2011	6:02:01 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	6:02:01 PM	Tube furnace set to 0
3/10/2011	6:03:01 PM	H2 valve closed
3/10/2011	6:03:01 PM	BCl3 valve closed
3/10/2011	6:03:01 PM	PH3 valve closed
3/10/2011	6:03:01 PM	SiCl4 pre valve closed
3/10/2011	6:03:01 PM	SiCl4 post valve closed
3/10/2011	6:03:01 PM	Bubbler valve closed
3/10/2011	6:03:01 PM	Helium valve opened
3/10/2011	6:03:01 PM	Main Vac valve opened
3/10/2011	6:03:01 PM	Bypass valve opened
3/10/2011	6:03:01 PM	Helium MFC set to  100.000000
3/10/2011	6:03:01 PM	H2 MFC set to  0.000000
3/10/2011	6:03:01 PM	BCl3 MFC set to  0.000000
3/10/2011	6:03:01 PM	PHl3 MFC set to  0.000000
3/10/2011	6:03:01 PM	SiCl4 MFC set to  0.000000
3/10/2011	6:03:01 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	6:03:01 PM	Tube furnace set to 0
3/10/2011	6:04:01 PM	Helium valve closed
3/10/2011	6:04:01 PM	H2 valve closed
3/10/2011	6:04:01 PM	BCl3 valve closed
3/10/2011	6:04:01 PM	PH3 valve closed
3/10/2011	6:04:01 PM	SiCl4 pre valve closed
3/10/2011	6:04:01 PM	SiCl4 post valve closed
3/10/2011	6:04:01 PM	Bubbler valve closed
3/10/2011	6:04:01 PM	Main Vac valve opened
3/10/2011	6:04:01 PM	Bypass valve opened
3/10/2011	6:04:01 PM	Helium MFC set to  0.000000
3/10/2011	6:04:01 PM	H2 MFC set to  0.000000
3/10/2011	6:04:01 PM	BCl3 MFC set to  0.000000
3/10/2011	6:04:01 PM	PHl3 MFC set to  0.000000
3/10/2011	6:04:01 PM	SiCl4 MFC set to  0.000000
3/10/2011	6:04:01 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	6:04:01 PM	Tube furnace set to 0
3/10/2011	6:05:01 PM	H2 valve closed
3/10/2011	6:05:01 PM	BCl3 valve closed
3/10/2011	6:05:01 PM	PH3 valve closed
3/10/2011	6:05:01 PM	SiCl4 pre valve closed
3/10/2011	6:05:01 PM	SiCl4 post valve closed
3/10/2011	6:05:01 PM	Bubbler valve closed
3/10/2011	6:05:01 PM	Helium valve opened
3/10/2011	6:05:01 PM	Main Vac valve opened
3/10/2011	6:05:01 PM	Bypass valve opened
3/10/2011	6:05:01 PM	Helium MFC set to  100.000000
3/10/2011	6:05:01 PM	H2 MFC set to  0.000000
3/10/2011	6:05:01 PM	BCl3 MFC set to  0.000000
3/10/2011	6:05:01 PM	PHl3 MFC set to  0.000000
3/10/2011	6:05:01 PM	SiCl4 MFC set to  0.000000
3/10/2011	6:05:01 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	6:05:02 PM	Tube furnace set to 0
3/10/2011	6:06:02 PM	Helium valve closed
3/10/2011	6:06:02 PM	H2 valve closed
3/10/2011	6:06:02 PM	BCl3 valve closed
3/10/2011	6:06:02 PM	PH3 valve closed
3/10/2011	6:06:02 PM	SiCl4 pre valve closed
3/10/2011	6:06:02 PM	SiCl4 post valve closed
3/10/2011	6:06:02 PM	Bubbler valve closed
3/10/2011	6:06:02 PM	Main Vac valve opened
3/10/2011	6:06:02 PM	Bypass valve opened
3/10/2011	6:06:02 PM	Helium MFC set to  0.000000
3/10/2011	6:06:02 PM	H2 MFC set to  0.000000
3/10/2011	6:06:02 PM	BCl3 MFC set to  0.000000
3/10/2011	6:06:02 PM	PHl3 MFC set to  0.000000
3/10/2011	6:06:02 PM	SiCl4 MFC set to  0.000000
3/10/2011	6:06:02 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	6:06:02 PM	Tube furnace set to 0
3/10/2011	6:07:02 PM	H2 valve closed
3/10/2011	6:07:02 PM	BCl3 valve closed
3/10/2011	6:07:02 PM	PH3 valve closed
3/10/2011	6:07:02 PM	SiCl4 pre valve closed
3/10/2011	6:07:02 PM	SiCl4 post valve closed
3/10/2011	6:07:02 PM	Bubbler valve closed
3/10/2011	6:07:02 PM	Helium valve opened
3/10/2011	6:07:02 PM	Main Vac valve opened
3/10/2011	6:07:02 PM	Bypass valve opened
3/10/2011	6:07:02 PM	Helium MFC set to  100.000000
3/10/2011	6:07:02 PM	H2 MFC set to  0.000000
3/10/2011	6:07:02 PM	BCl3 MFC set to  0.000000
3/10/2011	6:07:02 PM	PHl3 MFC set to  0.000000
3/10/2011	6:07:02 PM	SiCl4 MFC set to  0.000000
3/10/2011	6:07:02 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	6:07:02 PM	Tube furnace set to 0
3/10/2011	6:08:02 PM	Helium valve closed
3/10/2011	6:08:02 PM	H2 valve closed
3/10/2011	6:08:02 PM	BCl3 valve closed
3/10/2011	6:08:02 PM	PH3 valve closed
3/10/2011	6:08:02 PM	SiCl4 pre valve closed
3/10/2011	6:08:02 PM	SiCl4 post valve closed
3/10/2011	6:08:02 PM	Bubbler valve closed
3/10/2011	6:08:02 PM	Main Vac valve opened
3/10/2011	6:08:02 PM	Bypass valve opened
3/10/2011	6:08:02 PM	Helium MFC set to  0.000000
3/10/2011	6:08:02 PM	H2 MFC set to  0.000000
3/10/2011	6:08:02 PM	BCl3 MFC set to  0.000000
3/10/2011	6:08:02 PM	PHl3 MFC set to  0.000000
3/10/2011	6:08:02 PM	SiCl4 MFC set to  0.000000
3/10/2011	6:08:02 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	6:08:02 PM	Tube furnace set to 0
3/10/2011	6:08:03 PM	Run finished at 6:08 PM
3/10/2011	6:08:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	6:11:06 PM	Bypass valve closed
3/10/2011	6:11:07 PM	Main Vac valve closed
3/10/2011	6:11:33 PM	Main Vac valve opened
3/10/2011	6:11:34 PM	Bypass valve opened
3/10/2011	6:12:18 PM	Recipe started at 6:12 PM
3/10/2011	6:12:18 PM	Helium valve closed
3/10/2011	6:12:18 PM	BCl3 valve closed
3/10/2011	6:12:18 PM	PH3 valve closed
3/10/2011	6:12:18 PM	SiCl4 pre valve closed
3/10/2011	6:12:18 PM	SiCl4 post valve closed
3/10/2011	6:12:18 PM	Main Vac valve closed
3/10/2011	6:12:18 PM	Bypass valve closed
3/10/2011	6:12:18 PM	Bubbler valve closed
3/10/2011	6:12:18 PM	H2 valve opened
3/10/2011	6:12:18 PM	Helium MFC set to  0.000000
3/10/2011	6:12:18 PM	H2 MFC set to  500.000000
3/10/2011	6:12:18 PM	BCl3 MFC set to  0.000000
3/10/2011	6:12:18 PM	PHl3 MFC set to  0.000000
3/10/2011	6:12:18 PM	SiCl4 MFC set to  0.000000
3/10/2011	6:12:18 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	6:12:18 PM	Tube furnace set to 0
3/10/2011	6:13:35 PM	Helium valve closed
3/10/2011	6:13:35 PM	BCl3 valve closed
3/10/2011	6:13:35 PM	PH3 valve closed
3/10/2011	6:13:35 PM	SiCl4 pre valve closed
3/10/2011	6:13:35 PM	SiCl4 post valve closed
3/10/2011	6:13:35 PM	Main Vac valve closed
3/10/2011	6:13:35 PM	Bypass valve closed
3/10/2011	6:13:35 PM	H2 valve opened
3/10/2011	6:13:35 PM	Bubbler valve opened
3/10/2011	6:13:35 PM	Helium MFC set to  0.000000
3/10/2011	6:13:35 PM	H2 MFC set to  500.000000
3/10/2011	6:13:35 PM	BCl3 MFC set to  0.000000
3/10/2011	6:13:35 PM	PHl3 MFC set to  0.000000
3/10/2011	6:13:35 PM	SiCl4 MFC set to  0.000000
3/10/2011	6:13:35 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	6:13:35 PM	Tube furnace set to 1000
3/10/2011	6:33:35 PM	Helium valve closed
3/10/2011	6:33:35 PM	BCl3 valve closed
3/10/2011	6:33:35 PM	Main Vac valve closed
3/10/2011	6:33:35 PM	Bypass valve closed
3/10/2011	6:33:35 PM	H2 valve opened
3/10/2011	6:33:35 PM	PH3 valve opened
3/10/2011	6:33:35 PM	SiCl4 pre valve opened
3/10/2011	6:33:35 PM	SiCl4 post valve opened
3/10/2011	6:33:35 PM	Bubbler valve opened
3/10/2011	6:33:35 PM	Helium MFC set to  0.000000
3/10/2011	6:33:35 PM	H2 MFC set to  500.000000
3/10/2011	6:33:35 PM	BCl3 MFC set to  0.000000
3/10/2011	6:33:35 PM	PHl3 MFC set to  1.000000
3/10/2011	6:33:35 PM	SiCl4 MFC set to  50.000000
3/10/2011	6:33:35 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	6:33:35 PM	Tube furnace set to 1000
3/10/2011	6:50:35 PM	H2 valve closed
3/10/2011	6:50:35 PM	BCl3 valve closed
3/10/2011	6:50:35 PM	PH3 valve closed
3/10/2011	6:50:35 PM	SiCl4 pre valve closed
3/10/2011	6:50:35 PM	SiCl4 post valve closed
3/10/2011	6:50:35 PM	Main Vac valve closed
3/10/2011	6:50:35 PM	Bypass valve closed
3/10/2011	6:50:35 PM	Helium valve opened
3/10/2011	6:50:35 PM	Bubbler valve opened
3/10/2011	6:50:35 PM	Helium MFC set to  500.000000
3/10/2011	6:50:35 PM	H2 MFC set to  0.000000
3/10/2011	6:50:35 PM	BCl3 MFC set to  0.000000
3/10/2011	6:50:35 PM	PHl3 MFC set to  0.000000
3/10/2011	6:50:35 PM	SiCl4 MFC set to  0.000000
3/10/2011	6:50:35 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	6:50:36 PM	Tube furnace set to 0
3/10/2011	7:10:36 PM	Helium valve closed
3/10/2011	7:10:36 PM	H2 valve closed
3/10/2011	7:10:36 PM	BCl3 valve closed
3/10/2011	7:10:36 PM	PH3 valve closed
3/10/2011	7:10:36 PM	SiCl4 pre valve closed
3/10/2011	7:10:36 PM	SiCl4 post valve closed
3/10/2011	7:10:36 PM	Main Vac valve closed
3/10/2011	7:10:36 PM	Bypass valve closed
3/10/2011	7:10:36 PM	Bubbler valve closed
3/10/2011	7:10:36 PM	Helium MFC set to  0.000000
3/10/2011	7:10:36 PM	H2 MFC set to  0.000000
3/10/2011	7:10:36 PM	BCl3 MFC set to  0.000000
3/10/2011	7:10:36 PM	PHl3 MFC set to  0.000000
3/10/2011	7:10:36 PM	SiCl4 MFC set to  0.000000
3/10/2011	7:10:36 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	7:10:36 PM	Tube furnace set to 0
3/10/2011	7:10:36 PM	Run finished at 7:10 PM
3/10/2011	10:37:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2011	10:37:59 PM	Recipe started at 10:37 PM
3/10/2011	10:37:59 PM	H2 valve closed
3/10/2011	10:37:59 PM	BCl3 valve closed
3/10/2011	10:37:59 PM	PH3 valve closed
3/10/2011	10:37:59 PM	SiCl4 pre valve closed
3/10/2011	10:37:59 PM	SiCl4 post valve closed
3/10/2011	10:37:59 PM	Main Vac valve closed
3/10/2011	10:37:59 PM	Bypass valve closed
3/10/2011	10:37:59 PM	Bubbler valve closed
3/10/2011	10:37:59 PM	Helium valve opened
3/10/2011	10:37:59 PM	Helium MFC set to  500.000000
3/10/2011	10:37:59 PM	H2 MFC set to  0.000000
3/10/2011	10:37:59 PM	BCl3 MFC set to  0.000000
3/10/2011	10:37:59 PM	PHl3 MFC set to  0.000000
3/10/2011	10:37:59 PM	SiCl4 MFC set to  0.000000
3/10/2011	10:37:59 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:37:59 PM	Tube furnace set to 0
3/10/2011	10:38:04 PM	Helium valve closed
3/10/2011	10:38:04 PM	H2 valve closed
3/10/2011	10:38:04 PM	BCl3 valve closed
3/10/2011	10:38:04 PM	PH3 valve closed
3/10/2011	10:38:04 PM	SiCl4 pre valve closed
3/10/2011	10:38:04 PM	SiCl4 post valve closed
3/10/2011	10:38:04 PM	Main Vac valve closed
3/10/2011	10:38:04 PM	Bypass valve closed
3/10/2011	10:38:05 PM	Bubbler valve closed
3/10/2011	10:38:05 PM	Helium MFC set to  0.000000
3/10/2011	10:38:05 PM	H2 MFC set to  0.000000
3/10/2011	10:38:05 PM	BCl3 MFC set to  0.000000
3/10/2011	10:38:05 PM	PHl3 MFC set to  0.000000
3/10/2011	10:38:05 PM	SiCl4 MFC set to  0.000000
3/10/2011	10:38:05 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:38:05 PM	Tube furnace set to 0
3/10/2011	10:38:05 PM	Run finished at 10:38 PM
3/10/2011	10:38:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/10/2011	10:45:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2011	10:45:37 PM	Recipe started at 10:45 PM
3/10/2011	10:45:37 PM	Helium valve closed
3/10/2011	10:45:37 PM	H2 valve closed
3/10/2011	10:45:37 PM	BCl3 valve closed
3/10/2011	10:45:37 PM	PH3 valve closed
3/10/2011	10:45:37 PM	SiCl4 pre valve closed
3/10/2011	10:45:37 PM	SiCl4 post valve closed
3/10/2011	10:45:37 PM	Main Vac valve closed
3/10/2011	10:45:37 PM	Bubbler valve closed
3/10/2011	10:45:37 PM	Bypass valve opened
3/10/2011	10:45:37 PM	Helium MFC set to  0.000000
3/10/2011	10:45:37 PM	H2 MFC set to  0.000000
3/10/2011	10:45:37 PM	BCl3 MFC set to  0.000000
3/10/2011	10:45:37 PM	PHl3 MFC set to  0.000000
3/10/2011	10:45:37 PM	SiCl4 MFC set to  0.000000
3/10/2011	10:45:37 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:45:37 PM	Tube furnace set to 0
3/10/2011	10:46:08 PM	Helium valve closed
3/10/2011	10:46:08 PM	H2 valve closed
3/10/2011	10:46:08 PM	BCl3 valve closed
3/10/2011	10:46:08 PM	PH3 valve closed
3/10/2011	10:46:08 PM	SiCl4 pre valve closed
3/10/2011	10:46:08 PM	SiCl4 post valve closed
3/10/2011	10:46:08 PM	Bubbler valve closed
3/10/2011	10:46:08 PM	Main Vac valve opened
3/10/2011	10:46:08 PM	Bypass valve opened
3/10/2011	10:46:08 PM	Helium MFC set to  0.000000
3/10/2011	10:46:08 PM	H2 MFC set to  0.000000
3/10/2011	10:46:08 PM	BCl3 MFC set to  0.000000
3/10/2011	10:46:08 PM	PHl3 MFC set to  0.000000
3/10/2011	10:46:08 PM	SiCl4 MFC set to  0.000000
3/10/2011	10:46:08 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:46:08 PM	Tube furnace set to 0
3/10/2011	10:46:08 PM	Run finished at 10:46 PM
3/10/2011	10:46:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/10/2011	10:46:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	10:46:40 PM	Recipe started at 10:46 PM
3/10/2011	10:46:40 PM	Helium valve closed
3/10/2011	10:46:40 PM	H2 valve closed
3/10/2011	10:46:40 PM	BCl3 valve closed
3/10/2011	10:46:40 PM	PH3 valve closed
3/10/2011	10:46:40 PM	SiCl4 pre valve closed
3/10/2011	10:46:40 PM	SiCl4 post valve closed
3/10/2011	10:46:40 PM	Main Vac valve closed
3/10/2011	10:46:40 PM	Bubbler valve closed
3/10/2011	10:46:40 PM	Bypass valve opened
3/10/2011	10:46:40 PM	Helium MFC set to  0.000000
3/10/2011	10:46:40 PM	H2 MFC set to  0.000000
3/10/2011	10:46:40 PM	BCl3 MFC set to  0.000000
3/10/2011	10:46:40 PM	PHl3 MFC set to  0.000000
3/10/2011	10:46:40 PM	SiCl4 MFC set to  0.000000
3/10/2011	10:46:40 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:46:40 PM	Tube furnace set to 0
3/10/2011	10:46:40 PM	Helium valve closed
3/10/2011	10:46:40 PM	H2 valve closed
3/10/2011	10:46:40 PM	BCl3 valve closed
3/10/2011	10:46:40 PM	PH3 valve closed
3/10/2011	10:46:40 PM	SiCl4 pre valve closed
3/10/2011	10:46:40 PM	SiCl4 post valve closed
3/10/2011	10:46:40 PM	Bubbler valve closed
3/10/2011	10:46:40 PM	Main Vac valve opened
3/10/2011	10:46:40 PM	Bypass valve opened
3/10/2011	10:46:40 PM	Helium MFC set to  0.000000
3/10/2011	10:46:40 PM	H2 MFC set to  0.000000
3/10/2011	10:46:40 PM	BCl3 MFC set to  0.000000
3/10/2011	10:46:40 PM	PHl3 MFC set to  0.000000
3/10/2011	10:46:40 PM	SiCl4 MFC set to  0.000000
3/10/2011	10:46:40 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:46:41 PM	Tube furnace set to 0
3/10/2011	10:47:41 PM	H2 valve closed
3/10/2011	10:47:41 PM	BCl3 valve closed
3/10/2011	10:47:41 PM	PH3 valve closed
3/10/2011	10:47:41 PM	SiCl4 pre valve closed
3/10/2011	10:47:41 PM	SiCl4 post valve closed
3/10/2011	10:47:41 PM	Bubbler valve closed
3/10/2011	10:47:41 PM	Helium valve opened
3/10/2011	10:47:41 PM	Main Vac valve opened
3/10/2011	10:47:41 PM	Bypass valve opened
3/10/2011	10:47:41 PM	Helium MFC set to  100.000000
3/10/2011	10:47:41 PM	H2 MFC set to  0.000000
3/10/2011	10:47:41 PM	BCl3 MFC set to  0.000000
3/10/2011	10:47:41 PM	PHl3 MFC set to  0.000000
3/10/2011	10:47:41 PM	SiCl4 MFC set to  0.000000
3/10/2011	10:47:41 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:47:41 PM	Tube furnace set to 0
3/10/2011	10:48:41 PM	Helium valve closed
3/10/2011	10:48:41 PM	H2 valve closed
3/10/2011	10:48:41 PM	BCl3 valve closed
3/10/2011	10:48:41 PM	PH3 valve closed
3/10/2011	10:48:41 PM	SiCl4 pre valve closed
3/10/2011	10:48:41 PM	SiCl4 post valve closed
3/10/2011	10:48:41 PM	Bubbler valve closed
3/10/2011	10:48:41 PM	Main Vac valve opened
3/10/2011	10:48:41 PM	Bypass valve opened
3/10/2011	10:48:41 PM	Helium MFC set to  0.000000
3/10/2011	10:48:41 PM	H2 MFC set to  0.000000
3/10/2011	10:48:41 PM	BCl3 MFC set to  0.000000
3/10/2011	10:48:41 PM	PHl3 MFC set to  0.000000
3/10/2011	10:48:41 PM	SiCl4 MFC set to  0.000000
3/10/2011	10:48:41 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:48:41 PM	Tube furnace set to 0
3/10/2011	10:49:41 PM	H2 valve closed
3/10/2011	10:49:41 PM	BCl3 valve closed
3/10/2011	10:49:41 PM	PH3 valve closed
3/10/2011	10:49:41 PM	SiCl4 pre valve closed
3/10/2011	10:49:41 PM	SiCl4 post valve closed
3/10/2011	10:49:41 PM	Bubbler valve closed
3/10/2011	10:49:41 PM	Helium valve opened
3/10/2011	10:49:41 PM	Main Vac valve opened
3/10/2011	10:49:41 PM	Bypass valve opened
3/10/2011	10:49:41 PM	Helium MFC set to  100.000000
3/10/2011	10:49:41 PM	H2 MFC set to  0.000000
3/10/2011	10:49:41 PM	BCl3 MFC set to  0.000000
3/10/2011	10:49:41 PM	PHl3 MFC set to  0.000000
3/10/2011	10:49:41 PM	SiCl4 MFC set to  0.000000
3/10/2011	10:49:41 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:49:41 PM	Tube furnace set to 0
3/10/2011	10:50:41 PM	Helium valve closed
3/10/2011	10:50:41 PM	H2 valve closed
3/10/2011	10:50:41 PM	BCl3 valve closed
3/10/2011	10:50:41 PM	PH3 valve closed
3/10/2011	10:50:41 PM	SiCl4 pre valve closed
3/10/2011	10:50:41 PM	SiCl4 post valve closed
3/10/2011	10:50:41 PM	Bubbler valve closed
3/10/2011	10:50:41 PM	Main Vac valve opened
3/10/2011	10:50:41 PM	Bypass valve opened
3/10/2011	10:50:41 PM	Helium MFC set to  0.000000
3/10/2011	10:50:41 PM	H2 MFC set to  0.000000
3/10/2011	10:50:41 PM	BCl3 MFC set to  0.000000
3/10/2011	10:50:41 PM	PHl3 MFC set to  0.000000
3/10/2011	10:50:41 PM	SiCl4 MFC set to  0.000000
3/10/2011	10:50:41 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:50:41 PM	Tube furnace set to 0
3/10/2011	10:51:41 PM	H2 valve closed
3/10/2011	10:51:41 PM	BCl3 valve closed
3/10/2011	10:51:41 PM	PH3 valve closed
3/10/2011	10:51:41 PM	SiCl4 pre valve closed
3/10/2011	10:51:41 PM	SiCl4 post valve closed
3/10/2011	10:51:41 PM	Bubbler valve closed
3/10/2011	10:51:41 PM	Helium valve opened
3/10/2011	10:51:41 PM	Main Vac valve opened
3/10/2011	10:51:41 PM	Bypass valve opened
3/10/2011	10:51:41 PM	Helium MFC set to  100.000000
3/10/2011	10:51:41 PM	H2 MFC set to  0.000000
3/10/2011	10:51:41 PM	BCl3 MFC set to  0.000000
3/10/2011	10:51:41 PM	PHl3 MFC set to  0.000000
3/10/2011	10:51:41 PM	SiCl4 MFC set to  0.000000
3/10/2011	10:51:41 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:51:42 PM	Tube furnace set to 0
3/10/2011	10:52:42 PM	Helium valve closed
3/10/2011	10:52:42 PM	H2 valve closed
3/10/2011	10:52:42 PM	BCl3 valve closed
3/10/2011	10:52:42 PM	PH3 valve closed
3/10/2011	10:52:42 PM	SiCl4 pre valve closed
3/10/2011	10:52:42 PM	SiCl4 post valve closed
3/10/2011	10:52:42 PM	Bubbler valve closed
3/10/2011	10:52:42 PM	Main Vac valve opened
3/10/2011	10:52:42 PM	Bypass valve opened
3/10/2011	10:52:42 PM	Helium MFC set to  0.000000
3/10/2011	10:52:42 PM	H2 MFC set to  0.000000
3/10/2011	10:52:42 PM	BCl3 MFC set to  0.000000
3/10/2011	10:52:42 PM	PHl3 MFC set to  0.000000
3/10/2011	10:52:42 PM	SiCl4 MFC set to  0.000000
3/10/2011	10:52:42 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:52:42 PM	Tube furnace set to 0
3/10/2011	10:53:42 PM	H2 valve closed
3/10/2011	10:53:42 PM	BCl3 valve closed
3/10/2011	10:53:42 PM	PH3 valve closed
3/10/2011	10:53:42 PM	SiCl4 pre valve closed
3/10/2011	10:53:42 PM	SiCl4 post valve closed
3/10/2011	10:53:42 PM	Bubbler valve closed
3/10/2011	10:53:42 PM	Helium valve opened
3/10/2011	10:53:42 PM	Main Vac valve opened
3/10/2011	10:53:42 PM	Bypass valve opened
3/10/2011	10:53:42 PM	Helium MFC set to  100.000000
3/10/2011	10:53:42 PM	H2 MFC set to  0.000000
3/10/2011	10:53:42 PM	BCl3 MFC set to  0.000000
3/10/2011	10:53:42 PM	PHl3 MFC set to  0.000000
3/10/2011	10:53:42 PM	SiCl4 MFC set to  0.000000
3/10/2011	10:53:42 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:53:42 PM	Tube furnace set to 0
3/10/2011	10:54:42 PM	Helium valve closed
3/10/2011	10:54:42 PM	H2 valve closed
3/10/2011	10:54:42 PM	BCl3 valve closed
3/10/2011	10:54:42 PM	PH3 valve closed
3/10/2011	10:54:42 PM	SiCl4 pre valve closed
3/10/2011	10:54:42 PM	SiCl4 post valve closed
3/10/2011	10:54:42 PM	Bubbler valve closed
3/10/2011	10:54:42 PM	Main Vac valve opened
3/10/2011	10:54:42 PM	Bypass valve opened
3/10/2011	10:54:42 PM	Helium MFC set to  0.000000
3/10/2011	10:54:42 PM	H2 MFC set to  0.000000
3/10/2011	10:54:42 PM	BCl3 MFC set to  0.000000
3/10/2011	10:54:42 PM	PHl3 MFC set to  0.000000
3/10/2011	10:54:42 PM	SiCl4 MFC set to  0.000000
3/10/2011	10:54:42 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:54:42 PM	Tube furnace set to 0
3/10/2011	10:55:42 PM	H2 valve closed
3/10/2011	10:55:42 PM	BCl3 valve closed
3/10/2011	10:55:42 PM	PH3 valve closed
3/10/2011	10:55:42 PM	SiCl4 pre valve closed
3/10/2011	10:55:42 PM	SiCl4 post valve closed
3/10/2011	10:55:42 PM	Bubbler valve closed
3/10/2011	10:55:42 PM	Helium valve opened
3/10/2011	10:55:42 PM	Main Vac valve opened
3/10/2011	10:55:42 PM	Bypass valve opened
3/10/2011	10:55:42 PM	Helium MFC set to  100.000000
3/10/2011	10:55:42 PM	H2 MFC set to  0.000000
3/10/2011	10:55:42 PM	BCl3 MFC set to  0.000000
3/10/2011	10:55:42 PM	PHl3 MFC set to  0.000000
3/10/2011	10:55:42 PM	SiCl4 MFC set to  0.000000
3/10/2011	10:55:42 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:55:42 PM	Tube furnace set to 0
3/10/2011	10:56:42 PM	Helium valve closed
3/10/2011	10:56:42 PM	H2 valve closed
3/10/2011	10:56:42 PM	BCl3 valve closed
3/10/2011	10:56:42 PM	PH3 valve closed
3/10/2011	10:56:42 PM	SiCl4 pre valve closed
3/10/2011	10:56:42 PM	SiCl4 post valve closed
3/10/2011	10:56:42 PM	Bubbler valve closed
3/10/2011	10:56:42 PM	Main Vac valve opened
3/10/2011	10:56:42 PM	Bypass valve opened
3/10/2011	10:56:42 PM	Helium MFC set to  0.000000
3/10/2011	10:56:42 PM	H2 MFC set to  0.000000
3/10/2011	10:56:42 PM	BCl3 MFC set to  0.000000
3/10/2011	10:56:42 PM	PHl3 MFC set to  0.000000
3/10/2011	10:56:42 PM	SiCl4 MFC set to  0.000000
3/10/2011	10:56:42 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:56:43 PM	Tube furnace set to 0
3/10/2011	10:57:43 PM	H2 valve closed
3/10/2011	10:57:43 PM	BCl3 valve closed
3/10/2011	10:57:43 PM	PH3 valve closed
3/10/2011	10:57:43 PM	SiCl4 pre valve closed
3/10/2011	10:57:43 PM	SiCl4 post valve closed
3/10/2011	10:57:43 PM	Bubbler valve closed
3/10/2011	10:57:43 PM	Helium valve opened
3/10/2011	10:57:43 PM	Main Vac valve opened
3/10/2011	10:57:43 PM	Bypass valve opened
3/10/2011	10:57:43 PM	Helium MFC set to  100.000000
3/10/2011	10:57:43 PM	H2 MFC set to  0.000000
3/10/2011	10:57:43 PM	BCl3 MFC set to  0.000000
3/10/2011	10:57:43 PM	PHl3 MFC set to  0.000000
3/10/2011	10:57:43 PM	SiCl4 MFC set to  0.000000
3/10/2011	10:57:43 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:57:43 PM	Tube furnace set to 0
3/10/2011	10:58:43 PM	Helium valve closed
3/10/2011	10:58:43 PM	H2 valve closed
3/10/2011	10:58:43 PM	BCl3 valve closed
3/10/2011	10:58:43 PM	PH3 valve closed
3/10/2011	10:58:43 PM	SiCl4 pre valve closed
3/10/2011	10:58:43 PM	SiCl4 post valve closed
3/10/2011	10:58:43 PM	Bubbler valve closed
3/10/2011	10:58:43 PM	Main Vac valve opened
3/10/2011	10:58:43 PM	Bypass valve opened
3/10/2011	10:58:43 PM	Helium MFC set to  0.000000
3/10/2011	10:58:43 PM	H2 MFC set to  0.000000
3/10/2011	10:58:43 PM	BCl3 MFC set to  0.000000
3/10/2011	10:58:43 PM	PHl3 MFC set to  0.000000
3/10/2011	10:58:43 PM	SiCl4 MFC set to  0.000000
3/10/2011	10:58:43 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:58:43 PM	Tube furnace set to 0
3/10/2011	10:59:43 PM	H2 valve closed
3/10/2011	10:59:43 PM	BCl3 valve closed
3/10/2011	10:59:43 PM	PH3 valve closed
3/10/2011	10:59:43 PM	SiCl4 pre valve closed
3/10/2011	10:59:43 PM	SiCl4 post valve closed
3/10/2011	10:59:43 PM	Bubbler valve closed
3/10/2011	10:59:43 PM	Helium valve opened
3/10/2011	10:59:43 PM	Main Vac valve opened
3/10/2011	10:59:43 PM	Bypass valve opened
3/10/2011	10:59:43 PM	Helium MFC set to  100.000000
3/10/2011	10:59:43 PM	H2 MFC set to  0.000000
3/10/2011	10:59:43 PM	BCl3 MFC set to  0.000000
3/10/2011	10:59:43 PM	PHl3 MFC set to  0.000000
3/10/2011	10:59:43 PM	SiCl4 MFC set to  0.000000
3/10/2011	10:59:43 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	10:59:43 PM	Tube furnace set to 0
3/10/2011	11:00:43 PM	Helium valve closed
3/10/2011	11:00:43 PM	H2 valve closed
3/10/2011	11:00:43 PM	BCl3 valve closed
3/10/2011	11:00:43 PM	PH3 valve closed
3/10/2011	11:00:43 PM	SiCl4 pre valve closed
3/10/2011	11:00:43 PM	SiCl4 post valve closed
3/10/2011	11:00:43 PM	Bubbler valve closed
3/10/2011	11:00:43 PM	Main Vac valve opened
3/10/2011	11:00:43 PM	Bypass valve opened
3/10/2011	11:00:43 PM	Helium MFC set to  0.000000
3/10/2011	11:00:43 PM	H2 MFC set to  0.000000
3/10/2011	11:00:43 PM	BCl3 MFC set to  0.000000
3/10/2011	11:00:43 PM	PHl3 MFC set to  0.000000
3/10/2011	11:00:43 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:00:43 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:00:43 PM	Tube furnace set to 0
3/10/2011	11:01:43 PM	H2 valve closed
3/10/2011	11:01:43 PM	BCl3 valve closed
3/10/2011	11:01:43 PM	PH3 valve closed
3/10/2011	11:01:43 PM	SiCl4 pre valve closed
3/10/2011	11:01:43 PM	SiCl4 post valve closed
3/10/2011	11:01:43 PM	Bubbler valve closed
3/10/2011	11:01:43 PM	Helium valve opened
3/10/2011	11:01:43 PM	Main Vac valve opened
3/10/2011	11:01:43 PM	Bypass valve opened
3/10/2011	11:01:43 PM	Helium MFC set to  100.000000
3/10/2011	11:01:43 PM	H2 MFC set to  0.000000
3/10/2011	11:01:43 PM	BCl3 MFC set to  0.000000
3/10/2011	11:01:43 PM	PHl3 MFC set to  0.000000
3/10/2011	11:01:43 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:01:43 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:01:44 PM	Tube furnace set to 0
3/10/2011	11:02:44 PM	Helium valve closed
3/10/2011	11:02:44 PM	H2 valve closed
3/10/2011	11:02:44 PM	BCl3 valve closed
3/10/2011	11:02:44 PM	PH3 valve closed
3/10/2011	11:02:44 PM	SiCl4 pre valve closed
3/10/2011	11:02:44 PM	SiCl4 post valve closed
3/10/2011	11:02:44 PM	Bubbler valve closed
3/10/2011	11:02:44 PM	Main Vac valve opened
3/10/2011	11:02:44 PM	Bypass valve opened
3/10/2011	11:02:44 PM	Helium MFC set to  0.000000
3/10/2011	11:02:44 PM	H2 MFC set to  0.000000
3/10/2011	11:02:44 PM	BCl3 MFC set to  0.000000
3/10/2011	11:02:44 PM	PHl3 MFC set to  0.000000
3/10/2011	11:02:44 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:02:44 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:02:44 PM	Tube furnace set to 0
3/10/2011	11:03:44 PM	H2 valve closed
3/10/2011	11:03:44 PM	BCl3 valve closed
3/10/2011	11:03:44 PM	PH3 valve closed
3/10/2011	11:03:44 PM	SiCl4 pre valve closed
3/10/2011	11:03:44 PM	SiCl4 post valve closed
3/10/2011	11:03:44 PM	Bubbler valve closed
3/10/2011	11:03:44 PM	Helium valve opened
3/10/2011	11:03:44 PM	Main Vac valve opened
3/10/2011	11:03:44 PM	Bypass valve opened
3/10/2011	11:03:44 PM	Helium MFC set to  100.000000
3/10/2011	11:03:44 PM	H2 MFC set to  0.000000
3/10/2011	11:03:44 PM	BCl3 MFC set to  0.000000
3/10/2011	11:03:44 PM	PHl3 MFC set to  0.000000
3/10/2011	11:03:44 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:03:44 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:03:44 PM	Tube furnace set to 0
3/10/2011	11:04:44 PM	Helium valve closed
3/10/2011	11:04:44 PM	H2 valve closed
3/10/2011	11:04:44 PM	BCl3 valve closed
3/10/2011	11:04:44 PM	PH3 valve closed
3/10/2011	11:04:44 PM	SiCl4 pre valve closed
3/10/2011	11:04:44 PM	SiCl4 post valve closed
3/10/2011	11:04:44 PM	Bubbler valve closed
3/10/2011	11:04:44 PM	Main Vac valve opened
3/10/2011	11:04:44 PM	Bypass valve opened
3/10/2011	11:04:44 PM	Helium MFC set to  0.000000
3/10/2011	11:04:44 PM	H2 MFC set to  0.000000
3/10/2011	11:04:44 PM	BCl3 MFC set to  0.000000
3/10/2011	11:04:44 PM	PHl3 MFC set to  0.000000
3/10/2011	11:04:44 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:04:44 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:04:44 PM	Tube furnace set to 0
3/10/2011	11:05:44 PM	H2 valve closed
3/10/2011	11:05:44 PM	BCl3 valve closed
3/10/2011	11:05:44 PM	PH3 valve closed
3/10/2011	11:05:44 PM	SiCl4 pre valve closed
3/10/2011	11:05:44 PM	SiCl4 post valve closed
3/10/2011	11:05:44 PM	Bubbler valve closed
3/10/2011	11:05:44 PM	Helium valve opened
3/10/2011	11:05:44 PM	Main Vac valve opened
3/10/2011	11:05:44 PM	Bypass valve opened
3/10/2011	11:05:44 PM	Helium MFC set to  100.000000
3/10/2011	11:05:44 PM	H2 MFC set to  0.000000
3/10/2011	11:05:44 PM	BCl3 MFC set to  0.000000
3/10/2011	11:05:44 PM	PHl3 MFC set to  0.000000
3/10/2011	11:05:44 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:05:44 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:05:44 PM	Tube furnace set to 0
3/10/2011	11:06:44 PM	Helium valve closed
3/10/2011	11:06:44 PM	H2 valve closed
3/10/2011	11:06:44 PM	BCl3 valve closed
3/10/2011	11:06:44 PM	PH3 valve closed
3/10/2011	11:06:44 PM	SiCl4 pre valve closed
3/10/2011	11:06:44 PM	SiCl4 post valve closed
3/10/2011	11:06:44 PM	Bubbler valve closed
3/10/2011	11:06:44 PM	Main Vac valve opened
3/10/2011	11:06:44 PM	Bypass valve opened
3/10/2011	11:06:44 PM	Helium MFC set to  0.000000
3/10/2011	11:06:44 PM	H2 MFC set to  0.000000
3/10/2011	11:06:44 PM	BCl3 MFC set to  0.000000
3/10/2011	11:06:44 PM	PHl3 MFC set to  0.000000
3/10/2011	11:06:44 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:06:44 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:06:45 PM	Tube furnace set to 0
3/10/2011	11:06:46 PM	Run finished at 11:06 PM
3/10/2011	11:06:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	11:13:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	11:13:49 PM	Recipe started at 11:13 PM
3/10/2011	11:13:49 PM	Helium valve closed
3/10/2011	11:13:49 PM	H2 valve closed
3/10/2011	11:13:49 PM	BCl3 valve closed
3/10/2011	11:13:49 PM	PH3 valve closed
3/10/2011	11:13:49 PM	SiCl4 pre valve closed
3/10/2011	11:13:49 PM	SiCl4 post valve closed
3/10/2011	11:13:49 PM	Main Vac valve closed
3/10/2011	11:13:49 PM	Bubbler valve closed
3/10/2011	11:13:49 PM	Bypass valve opened
3/10/2011	11:13:49 PM	Helium MFC set to  0.000000
3/10/2011	11:13:49 PM	H2 MFC set to  0.000000
3/10/2011	11:13:49 PM	BCl3 MFC set to  0.000000
3/10/2011	11:13:49 PM	PHl3 MFC set to  0.000000
3/10/2011	11:13:49 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:13:49 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:13:49 PM	Tube furnace set to 0
3/10/2011	11:13:50 PM	Helium valve closed
3/10/2011	11:13:50 PM	H2 valve closed
3/10/2011	11:13:50 PM	BCl3 valve closed
3/10/2011	11:13:50 PM	PH3 valve closed
3/10/2011	11:13:50 PM	SiCl4 pre valve closed
3/10/2011	11:13:50 PM	SiCl4 post valve closed
3/10/2011	11:13:50 PM	Bubbler valve closed
3/10/2011	11:13:50 PM	Main Vac valve opened
3/10/2011	11:13:50 PM	Bypass valve opened
3/10/2011	11:13:50 PM	Helium MFC set to  0.000000
3/10/2011	11:13:50 PM	H2 MFC set to  0.000000
3/10/2011	11:13:50 PM	BCl3 MFC set to  0.000000
3/10/2011	11:13:50 PM	PHl3 MFC set to  0.000000
3/10/2011	11:13:50 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:13:50 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:13:50 PM	Tube furnace set to 0
3/10/2011	11:14:50 PM	H2 valve closed
3/10/2011	11:14:50 PM	BCl3 valve closed
3/10/2011	11:14:50 PM	PH3 valve closed
3/10/2011	11:14:50 PM	SiCl4 pre valve closed
3/10/2011	11:14:50 PM	SiCl4 post valve closed
3/10/2011	11:14:50 PM	Bubbler valve closed
3/10/2011	11:14:50 PM	Helium valve opened
3/10/2011	11:14:50 PM	Main Vac valve opened
3/10/2011	11:14:50 PM	Bypass valve opened
3/10/2011	11:14:50 PM	Helium MFC set to  100.000000
3/10/2011	11:14:50 PM	H2 MFC set to  0.000000
3/10/2011	11:14:50 PM	BCl3 MFC set to  0.000000
3/10/2011	11:14:50 PM	PHl3 MFC set to  0.000000
3/10/2011	11:14:50 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:14:50 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:14:50 PM	Tube furnace set to 0
3/10/2011	11:15:50 PM	Helium valve closed
3/10/2011	11:15:50 PM	H2 valve closed
3/10/2011	11:15:50 PM	BCl3 valve closed
3/10/2011	11:15:50 PM	PH3 valve closed
3/10/2011	11:15:50 PM	SiCl4 pre valve closed
3/10/2011	11:15:50 PM	SiCl4 post valve closed
3/10/2011	11:15:50 PM	Bubbler valve closed
3/10/2011	11:15:50 PM	Main Vac valve opened
3/10/2011	11:15:50 PM	Bypass valve opened
3/10/2011	11:15:50 PM	Helium MFC set to  0.000000
3/10/2011	11:15:50 PM	H2 MFC set to  0.000000
3/10/2011	11:15:50 PM	BCl3 MFC set to  0.000000
3/10/2011	11:15:50 PM	PHl3 MFC set to  0.000000
3/10/2011	11:15:50 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:15:50 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:15:50 PM	Tube furnace set to 0
3/10/2011	11:16:50 PM	H2 valve closed
3/10/2011	11:16:50 PM	BCl3 valve closed
3/10/2011	11:16:50 PM	PH3 valve closed
3/10/2011	11:16:50 PM	SiCl4 pre valve closed
3/10/2011	11:16:50 PM	SiCl4 post valve closed
3/10/2011	11:16:50 PM	Bubbler valve closed
3/10/2011	11:16:50 PM	Helium valve opened
3/10/2011	11:16:50 PM	Main Vac valve opened
3/10/2011	11:16:50 PM	Bypass valve opened
3/10/2011	11:16:50 PM	Helium MFC set to  100.000000
3/10/2011	11:16:50 PM	H2 MFC set to  0.000000
3/10/2011	11:16:50 PM	BCl3 MFC set to  0.000000
3/10/2011	11:16:50 PM	PHl3 MFC set to  0.000000
3/10/2011	11:16:50 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:16:50 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:16:50 PM	Tube furnace set to 0
3/10/2011	11:17:50 PM	Helium valve closed
3/10/2011	11:17:50 PM	H2 valve closed
3/10/2011	11:17:50 PM	BCl3 valve closed
3/10/2011	11:17:50 PM	PH3 valve closed
3/10/2011	11:17:50 PM	SiCl4 pre valve closed
3/10/2011	11:17:50 PM	SiCl4 post valve closed
3/10/2011	11:17:50 PM	Bubbler valve closed
3/10/2011	11:17:50 PM	Main Vac valve opened
3/10/2011	11:17:50 PM	Bypass valve opened
3/10/2011	11:17:50 PM	Helium MFC set to  0.000000
3/10/2011	11:17:50 PM	H2 MFC set to  0.000000
3/10/2011	11:17:51 PM	BCl3 MFC set to  0.000000
3/10/2011	11:17:51 PM	PHl3 MFC set to  0.000000
3/10/2011	11:17:51 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:17:51 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:17:51 PM	Tube furnace set to 0
3/10/2011	11:18:51 PM	H2 valve closed
3/10/2011	11:18:51 PM	BCl3 valve closed
3/10/2011	11:18:51 PM	PH3 valve closed
3/10/2011	11:18:51 PM	SiCl4 pre valve closed
3/10/2011	11:18:51 PM	SiCl4 post valve closed
3/10/2011	11:18:51 PM	Bubbler valve closed
3/10/2011	11:18:51 PM	Helium valve opened
3/10/2011	11:18:51 PM	Main Vac valve opened
3/10/2011	11:18:51 PM	Bypass valve opened
3/10/2011	11:18:51 PM	Helium MFC set to  100.000000
3/10/2011	11:18:51 PM	H2 MFC set to  0.000000
3/10/2011	11:18:51 PM	BCl3 MFC set to  0.000000
3/10/2011	11:18:51 PM	PHl3 MFC set to  0.000000
3/10/2011	11:18:51 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:18:51 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:18:51 PM	Tube furnace set to 0
3/10/2011	11:19:51 PM	Helium valve closed
3/10/2011	11:19:51 PM	H2 valve closed
3/10/2011	11:19:51 PM	BCl3 valve closed
3/10/2011	11:19:51 PM	PH3 valve closed
3/10/2011	11:19:51 PM	SiCl4 pre valve closed
3/10/2011	11:19:51 PM	SiCl4 post valve closed
3/10/2011	11:19:51 PM	Bubbler valve closed
3/10/2011	11:19:51 PM	Main Vac valve opened
3/10/2011	11:19:51 PM	Bypass valve opened
3/10/2011	11:19:51 PM	Helium MFC set to  0.000000
3/10/2011	11:19:51 PM	H2 MFC set to  0.000000
3/10/2011	11:19:51 PM	BCl3 MFC set to  0.000000
3/10/2011	11:19:51 PM	PHl3 MFC set to  0.000000
3/10/2011	11:19:51 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:19:51 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:19:51 PM	Tube furnace set to 0
3/10/2011	11:20:51 PM	H2 valve closed
3/10/2011	11:20:51 PM	BCl3 valve closed
3/10/2011	11:20:51 PM	PH3 valve closed
3/10/2011	11:20:51 PM	SiCl4 pre valve closed
3/10/2011	11:20:51 PM	SiCl4 post valve closed
3/10/2011	11:20:51 PM	Bubbler valve closed
3/10/2011	11:20:51 PM	Helium valve opened
3/10/2011	11:20:51 PM	Main Vac valve opened
3/10/2011	11:20:51 PM	Bypass valve opened
3/10/2011	11:20:51 PM	Helium MFC set to  100.000000
3/10/2011	11:20:51 PM	H2 MFC set to  0.000000
3/10/2011	11:20:51 PM	BCl3 MFC set to  0.000000
3/10/2011	11:20:51 PM	PHl3 MFC set to  0.000000
3/10/2011	11:20:51 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:20:51 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:20:51 PM	Tube furnace set to 0
3/10/2011	11:21:51 PM	Helium valve closed
3/10/2011	11:21:51 PM	H2 valve closed
3/10/2011	11:21:51 PM	BCl3 valve closed
3/10/2011	11:21:51 PM	PH3 valve closed
3/10/2011	11:21:51 PM	SiCl4 pre valve closed
3/10/2011	11:21:51 PM	SiCl4 post valve closed
3/10/2011	11:21:51 PM	Bubbler valve closed
3/10/2011	11:21:51 PM	Main Vac valve opened
3/10/2011	11:21:51 PM	Bypass valve opened
3/10/2011	11:21:51 PM	Helium MFC set to  0.000000
3/10/2011	11:21:51 PM	H2 MFC set to  0.000000
3/10/2011	11:21:51 PM	BCl3 MFC set to  0.000000
3/10/2011	11:21:51 PM	PHl3 MFC set to  0.000000
3/10/2011	11:21:51 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:21:51 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:21:51 PM	Tube furnace set to 0
3/10/2011	11:22:51 PM	H2 valve closed
3/10/2011	11:22:52 PM	BCl3 valve closed
3/10/2011	11:22:52 PM	PH3 valve closed
3/10/2011	11:22:52 PM	SiCl4 pre valve closed
3/10/2011	11:22:52 PM	SiCl4 post valve closed
3/10/2011	11:22:52 PM	Bubbler valve closed
3/10/2011	11:22:52 PM	Helium valve opened
3/10/2011	11:22:52 PM	Main Vac valve opened
3/10/2011	11:22:52 PM	Bypass valve opened
3/10/2011	11:22:52 PM	Helium MFC set to  100.000000
3/10/2011	11:22:52 PM	H2 MFC set to  0.000000
3/10/2011	11:22:52 PM	BCl3 MFC set to  0.000000
3/10/2011	11:22:52 PM	PHl3 MFC set to  0.000000
3/10/2011	11:22:52 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:22:52 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:22:52 PM	Tube furnace set to 0
3/10/2011	11:23:52 PM	Helium valve closed
3/10/2011	11:23:52 PM	H2 valve closed
3/10/2011	11:23:52 PM	BCl3 valve closed
3/10/2011	11:23:52 PM	PH3 valve closed
3/10/2011	11:23:52 PM	SiCl4 pre valve closed
3/10/2011	11:23:52 PM	SiCl4 post valve closed
3/10/2011	11:23:52 PM	Bubbler valve closed
3/10/2011	11:23:52 PM	Main Vac valve opened
3/10/2011	11:23:52 PM	Bypass valve opened
3/10/2011	11:23:52 PM	Helium MFC set to  0.000000
3/10/2011	11:23:52 PM	H2 MFC set to  0.000000
3/10/2011	11:23:52 PM	BCl3 MFC set to  0.000000
3/10/2011	11:23:52 PM	PHl3 MFC set to  0.000000
3/10/2011	11:23:52 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:23:52 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:23:52 PM	Tube furnace set to 0
3/10/2011	11:24:52 PM	H2 valve closed
3/10/2011	11:24:52 PM	BCl3 valve closed
3/10/2011	11:24:52 PM	PH3 valve closed
3/10/2011	11:24:52 PM	SiCl4 pre valve closed
3/10/2011	11:24:52 PM	SiCl4 post valve closed
3/10/2011	11:24:52 PM	Bubbler valve closed
3/10/2011	11:24:52 PM	Helium valve opened
3/10/2011	11:24:52 PM	Main Vac valve opened
3/10/2011	11:24:52 PM	Bypass valve opened
3/10/2011	11:24:52 PM	Helium MFC set to  100.000000
3/10/2011	11:24:52 PM	H2 MFC set to  0.000000
3/10/2011	11:24:52 PM	BCl3 MFC set to  0.000000
3/10/2011	11:24:52 PM	PHl3 MFC set to  0.000000
3/10/2011	11:24:52 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:24:52 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:24:52 PM	Tube furnace set to 0
3/10/2011	11:25:52 PM	Helium valve closed
3/10/2011	11:25:52 PM	H2 valve closed
3/10/2011	11:25:52 PM	BCl3 valve closed
3/10/2011	11:25:52 PM	PH3 valve closed
3/10/2011	11:25:52 PM	SiCl4 pre valve closed
3/10/2011	11:25:52 PM	SiCl4 post valve closed
3/10/2011	11:25:52 PM	Bubbler valve closed
3/10/2011	11:25:52 PM	Main Vac valve opened
3/10/2011	11:25:52 PM	Bypass valve opened
3/10/2011	11:25:52 PM	Helium MFC set to  0.000000
3/10/2011	11:25:52 PM	H2 MFC set to  0.000000
3/10/2011	11:25:52 PM	BCl3 MFC set to  0.000000
3/10/2011	11:25:52 PM	PHl3 MFC set to  0.000000
3/10/2011	11:25:52 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:25:52 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:25:52 PM	Tube furnace set to 0
3/10/2011	11:26:52 PM	H2 valve closed
3/10/2011	11:26:52 PM	BCl3 valve closed
3/10/2011	11:26:52 PM	PH3 valve closed
3/10/2011	11:26:52 PM	SiCl4 pre valve closed
3/10/2011	11:26:52 PM	SiCl4 post valve closed
3/10/2011	11:26:52 PM	Bubbler valve closed
3/10/2011	11:26:52 PM	Helium valve opened
3/10/2011	11:26:52 PM	Main Vac valve opened
3/10/2011	11:26:52 PM	Bypass valve opened
3/10/2011	11:26:52 PM	Helium MFC set to  100.000000
3/10/2011	11:26:52 PM	H2 MFC set to  0.000000
3/10/2011	11:26:52 PM	BCl3 MFC set to  0.000000
3/10/2011	11:26:52 PM	PHl3 MFC set to  0.000000
3/10/2011	11:26:52 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:26:52 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:26:52 PM	Tube furnace set to 0
3/10/2011	11:27:52 PM	Helium valve closed
3/10/2011	11:27:52 PM	H2 valve closed
3/10/2011	11:27:52 PM	BCl3 valve closed
3/10/2011	11:27:52 PM	PH3 valve closed
3/10/2011	11:27:52 PM	SiCl4 pre valve closed
3/10/2011	11:27:52 PM	SiCl4 post valve closed
3/10/2011	11:27:52 PM	Bubbler valve closed
3/10/2011	11:27:52 PM	Main Vac valve opened
3/10/2011	11:27:52 PM	Bypass valve opened
3/10/2011	11:27:52 PM	Helium MFC set to  0.000000
3/10/2011	11:27:52 PM	H2 MFC set to  0.000000
3/10/2011	11:27:52 PM	BCl3 MFC set to  0.000000
3/10/2011	11:27:52 PM	PHl3 MFC set to  0.000000
3/10/2011	11:27:52 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:27:53 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:27:53 PM	Tube furnace set to 0
3/10/2011	11:28:53 PM	H2 valve closed
3/10/2011	11:28:53 PM	BCl3 valve closed
3/10/2011	11:28:53 PM	PH3 valve closed
3/10/2011	11:28:53 PM	SiCl4 pre valve closed
3/10/2011	11:28:53 PM	SiCl4 post valve closed
3/10/2011	11:28:53 PM	Bubbler valve closed
3/10/2011	11:28:53 PM	Helium valve opened
3/10/2011	11:28:53 PM	Main Vac valve opened
3/10/2011	11:28:53 PM	Bypass valve opened
3/10/2011	11:28:53 PM	Helium MFC set to  100.000000
3/10/2011	11:28:53 PM	H2 MFC set to  0.000000
3/10/2011	11:28:53 PM	BCl3 MFC set to  0.000000
3/10/2011	11:28:53 PM	PHl3 MFC set to  0.000000
3/10/2011	11:28:53 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:28:53 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:28:53 PM	Tube furnace set to 0
3/10/2011	11:29:53 PM	Helium valve closed
3/10/2011	11:29:53 PM	H2 valve closed
3/10/2011	11:29:53 PM	BCl3 valve closed
3/10/2011	11:29:53 PM	PH3 valve closed
3/10/2011	11:29:53 PM	SiCl4 pre valve closed
3/10/2011	11:29:53 PM	SiCl4 post valve closed
3/10/2011	11:29:53 PM	Bubbler valve closed
3/10/2011	11:29:53 PM	Main Vac valve opened
3/10/2011	11:29:53 PM	Bypass valve opened
3/10/2011	11:29:53 PM	Helium MFC set to  0.000000
3/10/2011	11:29:53 PM	H2 MFC set to  0.000000
3/10/2011	11:29:53 PM	BCl3 MFC set to  0.000000
3/10/2011	11:29:53 PM	PHl3 MFC set to  0.000000
3/10/2011	11:29:53 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:29:53 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:29:53 PM	Tube furnace set to 0
3/10/2011	11:30:53 PM	H2 valve closed
3/10/2011	11:30:53 PM	BCl3 valve closed
3/10/2011	11:30:53 PM	PH3 valve closed
3/10/2011	11:30:53 PM	SiCl4 pre valve closed
3/10/2011	11:30:53 PM	SiCl4 post valve closed
3/10/2011	11:30:53 PM	Bubbler valve closed
3/10/2011	11:30:53 PM	Helium valve opened
3/10/2011	11:30:53 PM	Main Vac valve opened
3/10/2011	11:30:53 PM	Bypass valve opened
3/10/2011	11:30:53 PM	Helium MFC set to  100.000000
3/10/2011	11:30:53 PM	H2 MFC set to  0.000000
3/10/2011	11:30:53 PM	BCl3 MFC set to  0.000000
3/10/2011	11:30:53 PM	PHl3 MFC set to  0.000000
3/10/2011	11:30:53 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:30:53 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:30:53 PM	Tube furnace set to 0
3/10/2011	11:31:53 PM	Helium valve closed
3/10/2011	11:31:53 PM	H2 valve closed
3/10/2011	11:31:53 PM	BCl3 valve closed
3/10/2011	11:31:53 PM	PH3 valve closed
3/10/2011	11:31:53 PM	SiCl4 pre valve closed
3/10/2011	11:31:53 PM	SiCl4 post valve closed
3/10/2011	11:31:53 PM	Bubbler valve closed
3/10/2011	11:31:53 PM	Main Vac valve opened
3/10/2011	11:31:53 PM	Bypass valve opened
3/10/2011	11:31:53 PM	Helium MFC set to  0.000000
3/10/2011	11:31:53 PM	H2 MFC set to  0.000000
3/10/2011	11:31:53 PM	BCl3 MFC set to  0.000000
3/10/2011	11:31:53 PM	PHl3 MFC set to  0.000000
3/10/2011	11:31:53 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:31:53 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:31:53 PM	Tube furnace set to 0
3/10/2011	11:32:54 PM	H2 valve closed
3/10/2011	11:32:54 PM	BCl3 valve closed
3/10/2011	11:32:54 PM	PH3 valve closed
3/10/2011	11:32:54 PM	SiCl4 pre valve closed
3/10/2011	11:32:54 PM	SiCl4 post valve closed
3/10/2011	11:32:54 PM	Bubbler valve closed
3/10/2011	11:32:54 PM	Helium valve opened
3/10/2011	11:32:54 PM	Main Vac valve opened
3/10/2011	11:32:54 PM	Bypass valve opened
3/10/2011	11:32:54 PM	Helium MFC set to  100.000000
3/10/2011	11:32:54 PM	H2 MFC set to  0.000000
3/10/2011	11:32:54 PM	BCl3 MFC set to  0.000000
3/10/2011	11:32:54 PM	PHl3 MFC set to  0.000000
3/10/2011	11:32:54 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:32:54 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:32:54 PM	Tube furnace set to 0
3/10/2011	11:33:54 PM	Helium valve closed
3/10/2011	11:33:54 PM	H2 valve closed
3/10/2011	11:33:54 PM	BCl3 valve closed
3/10/2011	11:33:54 PM	PH3 valve closed
3/10/2011	11:33:54 PM	SiCl4 pre valve closed
3/10/2011	11:33:54 PM	SiCl4 post valve closed
3/10/2011	11:33:54 PM	Bubbler valve closed
3/10/2011	11:33:54 PM	Main Vac valve opened
3/10/2011	11:33:54 PM	Bypass valve opened
3/10/2011	11:33:54 PM	Helium MFC set to  0.000000
3/10/2011	11:33:54 PM	H2 MFC set to  0.000000
3/10/2011	11:33:54 PM	BCl3 MFC set to  0.000000
3/10/2011	11:33:54 PM	PHl3 MFC set to  0.000000
3/10/2011	11:33:54 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:33:54 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:33:54 PM	Tube furnace set to 0
3/10/2011	11:33:55 PM	Run finished at 11:33 PM
3/10/2011	11:33:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/10/2011	11:35:18 PM	Bypass valve closed
3/10/2011	11:35:18 PM	Main Vac valve closed
3/10/2011	11:35:35 PM	Bypass valve opened
3/10/2011	11:35:35 PM	Main Vac valve opened
3/10/2011	11:36:39 PM	Recipe started at 11:36 PM
3/10/2011	11:36:39 PM	Helium valve closed
3/10/2011	11:36:39 PM	BCl3 valve closed
3/10/2011	11:36:39 PM	PH3 valve closed
3/10/2011	11:36:39 PM	SiCl4 pre valve closed
3/10/2011	11:36:39 PM	SiCl4 post valve closed
3/10/2011	11:36:39 PM	Main Vac valve closed
3/10/2011	11:36:39 PM	Bypass valve closed
3/10/2011	11:36:39 PM	Bubbler valve closed
3/10/2011	11:36:39 PM	H2 valve opened
3/10/2011	11:36:39 PM	Helium MFC set to  0.000000
3/10/2011	11:36:39 PM	H2 MFC set to  500.000000
3/10/2011	11:36:39 PM	BCl3 MFC set to  0.000000
3/10/2011	11:36:39 PM	PHl3 MFC set to  0.000000
3/10/2011	11:36:39 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:36:39 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:36:39 PM	Tube furnace set to 0
3/10/2011	11:37:57 PM	Helium valve closed
3/10/2011	11:37:57 PM	BCl3 valve closed
3/10/2011	11:37:57 PM	PH3 valve closed
3/10/2011	11:37:57 PM	SiCl4 pre valve closed
3/10/2011	11:37:57 PM	SiCl4 post valve closed
3/10/2011	11:37:57 PM	Main Vac valve closed
3/10/2011	11:37:57 PM	Bypass valve closed
3/10/2011	11:37:57 PM	H2 valve opened
3/10/2011	11:37:57 PM	Bubbler valve opened
3/10/2011	11:37:57 PM	Helium MFC set to  0.000000
3/10/2011	11:37:57 PM	H2 MFC set to  500.000000
3/10/2011	11:37:57 PM	BCl3 MFC set to  0.000000
3/10/2011	11:37:57 PM	PHl3 MFC set to  0.000000
3/10/2011	11:37:57 PM	SiCl4 MFC set to  0.000000
3/10/2011	11:37:57 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:37:57 PM	Tube furnace set to 1000
3/10/2011	11:57:57 PM	Helium valve closed
3/10/2011	11:57:57 PM	BCl3 valve closed
3/10/2011	11:57:57 PM	Main Vac valve closed
3/10/2011	11:57:57 PM	Bypass valve closed
3/10/2011	11:57:57 PM	H2 valve opened
3/10/2011	11:57:57 PM	PH3 valve opened
3/10/2011	11:57:57 PM	SiCl4 pre valve opened
3/10/2011	11:57:57 PM	SiCl4 post valve opened
3/10/2011	11:57:57 PM	Bubbler valve opened
3/10/2011	11:57:57 PM	Helium MFC set to  0.000000
3/10/2011	11:57:57 PM	H2 MFC set to  500.000000
3/10/2011	11:57:57 PM	BCl3 MFC set to  0.000000
3/10/2011	11:57:57 PM	PHl3 MFC set to  1.000000
3/10/2011	11:57:57 PM	SiCl4 MFC set to  50.000000
3/10/2011	11:57:57 PM	Bypass solenoid MFC set to  0.000000
3/10/2011	11:57:57 PM	Tube furnace set to 1000
